Abstract: There is provided a substrate processing apparatus including a process chamber defined at least by a reaction tube and a furnace opening part provided at a lower portion of the reaction tube; a nozzle provided at the furnace opening part and extending from the furnace opening part to an inside of the reaction tube; a gas supply system provided at an upstream side of the nozzle; a blocking part provided at a boundary between the gas supply system and the nozzle; and a controller configured to control the gas supply system and the blocking part such that the blocking part co-operates with the gas supply system to supply gases into the process chamber through the nozzle.

Abstract: There is provided a substrate processing apparatus including a process chamber defined at least by a reaction tube and a furnace opening part provided at a lower portion of the reaction tube; a nozzle provided at the furnace opening part and extending from the furnace opening part to an inside of the reaction tube; a gas supply system provided at an upstream side of the nozzle; a blocking part provided at a boundary between the gas supply system and the nozzle; and a controller configured to control the gas supply system and the blocking part such that the blocking part co-operates with the gas supply system to supply gases into the process chamber through the nozzle.

Abstract: There is provided a technique that cleans a member in a process container by performing a cycle a predetermined number of times, the cycle including: (a) separately supplying a cleaning gas and an additive gas that reacts with the cleaning gas, respectively, from any two supply parts among at least three supply parts into the process container after processing a substrate; and (b) separately supplying the cleaning gas and the additive gas, respectively, from any two supply parts among the at least three supply parts into the process container, wherein at least one selected from the group of the cleaning gas and the additive gas is supplied from different supply parts in (a) and (b).

Abstract: A method of manufacturing a semiconductor device includes forming a film on a substrate by performing a cycle a predetermined number of times. The cycle includes non-simultaneously performing (a) forming a first layer by supplying a precursor to the substrate from a first nozzle and (b) forming a second layer by supplying a reactant to the substrate from a second nozzle different from the first nozzle to thereby modify the first layer. The act (a) includes sequentially performing (a-1) supplying an inert gas from the second nozzle at a first flow rate smaller than a flow rate of the precursor in a state in which the precursor is supplied from the first nozzle and (a-2) supplying an inert gas from the second nozzle at a second flow rate larger than the flow rate of the precursor in a state in which the precursor is supplied from the first nozzle.

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; an input shaft; an output shaft; and five friction elements. A first ring gear is constantly locked. A third carrier is connected with a second ring gear to define a rotating member. The input shaft is constantly connected with a second carrier, and the output shaft is constantly connected with the rotating member. The five friction elements are adapted to selectively connect among the carriers, ring gears and sun gears. Each of at least seven forward speed-ratios and one reverse speed-ratio is achieved by an engaged state of two friction elements selected from the five friction elements.

Abstract: An automatic transmission includes a first planetary gear set including first to third rotating elements; a second planetary gear set including fourth to sixth rotating elements; a third planetary gear set including seventh to sixth to ninth rotating elements; an input shaft constantly connected with the first rotating element; an output shaft constantly connected with the second rotating element; and at least five friction elements including a first friction element capable of locking a rotation of the eighth rotating element, a second friction element configured to selectively connect the second rotating element with the fifth rotating element, a third friction element configured to selectively connect the second rotating element with a second rotating member defined by the sixth and seventh rotating elements, a fourth friction element configured to selectively connect the fifth rotating element with the eighth rotating element, and a fifth friction element configured to selectively connect the first rotati

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; an input shaft; an output shaft; and five friction elements. A first ring gear is constantly locked. A third carrier is connected with a second ring gear to define a rotating member. The input shaft is constantly connected with a second carrier, and the output shaft is constantly connected with the rotating member. The five friction elements are adapted to selectively connect among the carriers, ring gears and sun gears. Each of at least seven forward speed-ratios and one reverse speed-ratio is achieved by an engaged state of two friction elements selected from the five friction elements.

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; an input shaft; an output shaft; and five friction elements. A first ring gear is constantly locked. A third carrier is connected with a second ring gear to define a rotating member. The input shaft is constantly connected with a second carrier, and the output shaft is constantly connected with the rotating member. The five friction elements include a first friction element adapted to selectively connect a first carrier with a third ring gear; a second friction element adapted to selectively connect a first sun gear with the second carrier; a third friction element adapted to selectively connect the first sun gear with a second sun gear; a fourth friction element adapted to selectively connect the first carrier with the second carrier; and a fifth friction element adapted to selectively connect the first carrier with the second sun gear.

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; an input shaft; an output shaft; and five friction elements. The five friction elements include a first friction element adapted to selectively connect a first ring gear with a second carrier, a second friction element adapted to selectively connect the first ring gear with the second rotating member, a third friction element adapted to selectively connect the second carrier with a third ring gear, a fourth friction element adapted to selectively stop a rotation of the third ring gear, and a fifth friction element adapted to selectively connect the first sun gear with the second carrier. Each of at least seven forward speed-ratios and one reverse speed-ratio is achieved by an engaged state of two friction elements selected from the five friction elements.

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; an input shaft; an output shaft; and five friction elements. A first ring gear is constantly locked. A third sun gear is connected with a first sun gear to define a first rotating member, and a second sun gear is connected with a first carrier to define a second rotating member. The input shaft is constantly connected with the first rotating member, and the output shaft is constantly connected with a third carrier.

Abstract: An automatic transmission is provided with three planetary gear units and five friction elements that establish at least six forward speeds and one reverse speed by engaging different combinations of three out of five friction elements simultaneously. In the automatic transmission, an output shaft is always connected to a first ring gear of the first planetary gear unit. A second ring gear of the second planetary gear unit is always fixed. A first carrier of the first planetary gear unit and a third ring gear of the third planetary gear unit are connected together to form a first rotating member. A second sun gear of the second planetary gear unit and a third carrier of the third planetary gear unit are connected together to form a second rotating member.

Abstract: An automatic transmission is provided with three planetary gear units and five friction elements. The first planetary gear unit includes a first sun gear that is always fixed, a first carrier supporting a first pinion in meshed engagement with the first sun gear and a first ring gear in meshed engagement with the first pinion. The first to fifth friction elements are operatively arranged with respect to the first, second and third planetary gear units to selectively establish at least seven forward speeds and one reverse speed by combining simultaneous engagement of two out of five friction elements for transmitting torque from the input shaft to the output shaft.

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; and at least five friction elements. The at least five friction elements includes a first clutch adapted to selectively connect a first carrier with a second carrier; a first brake adapted to selectively stop a rotation of the second carrier; a second brake adapted to selectively stop a rotation of a rotating member having a first sun gear, a second ring gear, and a third carrier; a third brake adapted to selectively stop a rotation of a third sun gear; and a second clutch adapted to selectively connect the first carrier with a second sun gear. Each of at least seven forward speed-ratios and one reverse speed-ratio is achieved by engaging two friction elements selected from the first and second clutches and the first to third brakes.

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; and at least five friction elements. The at least five friction elements includes a first clutch adapted to selectively connect a first carrier with a second carrier; a first brake adapted to selectively stop a rotation of the second carrier; a second brake adapted to selectively stop a rotation of a rotating member having a first sun gear, a second ring gear, and a third carrier; a third brake adapted to selectively stop a rotation of a third sun gear; and a second clutch adapted to selectively connect the first carrier with a second sun gear. Each of at least seven forward speed-ratios and one reverse speed-ratio is achieved by engaging two friction elements selected from the first and second clutches and the first to third brakes.

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; and at least five friction elements. The at least five friction elements includes a first clutch adapted to selectively connect a first carrier with a second carrier; a first brake adapted to selectively stop a rotation of the second carrier; a second brake adapted to selectively stop a rotation of a rotating member having a first sun gear, a second ring gear, and a third carrier; a third brake adapted to selectively stop a rotation of a third sun gear; and a second clutch adapted to selectively connect the first carrier with a second sun gear. Each of at least seven forward speed-ratios and one reverse speed-ratio is achieved by engaging two friction elements selected from the first and second clutches and the first to third brakes.

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; and at least five friction elements. The at least five friction elements includes a first clutch adapted to selectively connect a first carrier with a second carrier; a first brake adapted to selectively stop a rotation of the second carrier; a second brake adapted to selectively stop a rotation of a rotating member having a first sun gear, a second ring gear, and a third carrier; a third brake adapted to selectively stop a rotation of a third sun gear; and a second clutch adapted to selectively connect the first carrier with a second sun gear. Each of at least seven forward speed-ratios and one reverse speed-ratio is achieved by engaging two friction elements selected from the first and second clutches and the first to third brakes.

Abstract: An automatic transmission includes a first planetary gear set including first to third rotating elements; a second planetary gear set including fourth to sixth rotating elements; a third planetary gear set including seventh to sixth to ninth rotating elements; an input shaft constantly connected with the first rotating element; an output shaft constantly connected with the second rotating element; and at least five friction elements including a first friction element capable of locking a rotation of the eighth rotating element, a second friction element configured to selectively connect the second rotating element with the fifth rotating element, a third friction element configured to selectively connect the second rotating element with a second rotating member defined by the sixth and seventh rotating elements, a fourth friction element configured to selectively connect the fifth rotating element with the eighth rotating element, and a fifth friction element configured to selectively connect the first rotati

Abstract: An automatic transmission includes a first planetary gear set; a second planetary gear set; a third planetary gear set; and at least five friction elements. The at least five friction elements includes a first clutch adapted to selectively connect a first carrier with a second carrier; a first brake adapted to selectively stop a rotation of the second carrier; a second brake adapted to selectively stop a rotation of a rotating member having a first sun gear, a second ring gear, and a third carrier; a third brake adapted to selectively stop a rotation of a third sun gear; and a second clutch adapted to selectively connect the first carrier with a second sun gear. Each of at least seven forward speed-ratios and one reverse speed-ratio is achieved by engaging two friction elements selected from the first and second clutches and the first to third brakes.

Abstract: A double piston and belt type continuously variable transmission comprises a primary pulley provided with a primary piston chamber and a primary clamp chamber; a secondary pulley provided with a secondary piston chamber and a secondary clamp chamber; and an endless belt operatively put around the primary and secondary pulleys. A switching circuit is arranged to connect both the primary and secondary clamp chambers to either one of the primary and secondary piston chambers, which shows a higher hydraulic pressure than the other.