Patents by Inventor Takeo Konno

Takeo Konno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10636634
    Abstract: A sputtering apparatus according to one embodiment of the present invention includes a substrate holder, a cathode unit arranged at a position diagonally opposite to the substrate holder, a position sensor for detecting a rotational position of the substrate, and a holder rotation controller for adjusting a rotation speed of the substrate according to the detected rotational position. The holder rotation controller controls the rotation speed so that the rotation speed of the substrate when the cathode unit is located on a side in a first direction as an extending direction of a process target surface of the relief structure is lower than the rotation speed of the substrate when the cathode unit is located on a side in a second direction which is perpendicular to the first direction along the rotation of the substrate.
    Type: Grant
    Filed: May 4, 2018
    Date of Patent: April 28, 2020
    Assignee: CANON ANELVA CORPORATION
    Inventors: Koji Tsunekawa, Masahiro Suenaga, Takeo Konno
  • Publication number: 20180254172
    Abstract: A sputtering apparatus according to one embodiment of the present invention includes a substrate holder, a cathode unit arranged at a position diagonally opposite to the substrate holder, a position sensor for detecting a rotational position of the substrate, and a holder rotation controller for adjusting a rotation speed of the substrate according to the detected rotational position. The holder rotation controller controls the rotation speed so that the rotation speed of the substrate when the cathode unit is located on a side in a first direction as an extending direction of a process target surface of the relief structure is lower than the rotation speed of the substrate when the cathode unit is located on a side in a second direction which is perpendicular to the first direction along the rotation of the substrate.
    Type: Application
    Filed: May 4, 2018
    Publication date: September 6, 2018
    Inventors: Koji TSUNEKAWA, Masahiro SUENAGA, Takeo KONNO
  • Patent number: 9991102
    Abstract: A sputtering apparatus according to one embodiment of the present invention includes a substrate holder, a cathode unit arranged at a position diagonally opposite to the substrate holder, a position sensor for detecting a rotational position of the substrate, and a holder rotation controller for adjusting a rotation speed of the substrate according to the detected rotational position. The holder rotation controller controls the rotation speed so that the rotation speed of the substrate when the cathode unit is located on a side in a first direction as an extending direction of a process target surface of the relief structure is lower than the rotation speed of the substrate when the cathode unit is located on a side in a second direction which is perpendicular to the first direction along the rotation of the substrate.
    Type: Grant
    Filed: November 23, 2015
    Date of Patent: June 5, 2018
    Assignee: CANON ANELVA CORPORATION
    Inventors: Koji Tsunekawa, Masahiro Suenaga, Takeo Konno
  • Publication number: 20160079045
    Abstract: A sputtering apparatus according to one embodiment of the present invention includes a substrate holder, a cathode unit arranged at a position diagonally opposite to the substrate holder, a position sensor for detecting a rotational position of the substrate, and a holder rotation controller for adjusting a rotation speed of the substrate according to the detected rotational position. The holder rotation controller controls the rotation speed so that the rotation speed of the substrate when the cathode unit is located on a side in a first direction as an extending direction of a process target surface of the relief structure is lower than the rotation speed of the substrate when the cathode unit is located on a side in a second direction which is perpendicular to the first direction along the rotation of the substrate.
    Type: Application
    Filed: November 23, 2015
    Publication date: March 17, 2016
    Inventors: Koji TSUNEKAWA, Masahiro SUENAGA, Takeo KONNO
  • Patent number: 8968538
    Abstract: A magnetic film having excellent uniformity in in-plane distribution of film thickness or sheet resistance is formed when the film is formed by forming a magnetic field on a processing surface of a substrate (21) and performing oblique incidence sputtering by using high discharge power. A sputtering apparatus (1) is provided with a substrate holder (22) for holding rotatably the substrate (21) in the surface direction of the processing surface of the substrate; a substrate magnetic field forming device (30) which is disposed to surround the substrate (21) and forms a magnetic field on the processing surface of the substrate (21); cathodes (41) which are arranged diagonally above the substrate (21) and are supplied with electric discharge power; a position detecting device (23) for detecting a rotation position of the substrate (21); and a control device (50) which adjusts the rotation speed of the substrate (21) in accordance with the rotation position detected by the position detecting device (23).
    Type: Grant
    Filed: September 29, 2009
    Date of Patent: March 3, 2015
    Assignee: Canon Anelva Corporation
    Inventors: Toru Kitada, Naoki Watanabe, Motonobu Nagai, Masahiro Suenaga, Takeo Konno
  • Publication number: 20130038182
    Abstract: The purpose of the invention is to provide an inverter-driven dynamo electric machine and system for the same having high reliability and high efficiency such that even in the case of inverter pulse voltages having high dv/dt, generation of shaft voltages and generation of shaft currents causing electric corrosion of a bearing with the generation of the shaft voltages are suppressed, thereby keeping the bearing free of electric corrosion. The purpose of the invention is achieved by the following method. That is, the purpose is achieved by an inverter-driven dynamo electric machine and system for the same including at least one machine support bearing which supports a shaft of a rotor, and one electric discharge bearing which discharges the voltage generated in the shaft of the rotor, wherein a bearing having a lower dielectric breakdown voltage between an inner ring and an outer ring than that of the machine support bearing is used as the electric discharge bearing.
    Type: Application
    Filed: March 17, 2010
    Publication date: February 14, 2013
    Applicant: HITACHI, LTD.
    Inventors: Koji Obata, Takeo Konno, Keisuke Abe, Norinaga Suzuki
  • Publication number: 20110223346
    Abstract: A magnetic film having excellent uniformity in in-plane distribution of film thickness or sheet resistance is formed when the film is formed by forming a magnetic field on a processing surface of a substrate (21) and performing oblique incidence sputtering by using high discharge power. A sputtering apparatus (1) is provided with a substrate holder (22) for holding rotatably the substrate (21) in the surface direction of the processing surface of the substrate; a substrate magnetic field forming device (30) which is disposed to surround the substrate (21) and forms a magnetic field on the processing surface of the substrate (21); cathodes (41) which are arranged diagonally above the substrate (21) and are supplied with electric discharge power; a position detecting device (23) for detecting a rotation position of the substrate (21) ; and a control device (50) which adjusts the rotation speed of the substrate (21) in accordance with the rotation position detected by the position detecting device (23).
    Type: Application
    Filed: September 29, 2009
    Publication date: September 15, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: Toru Kitada, Naoki Watanabe, Motonobu Nagai, Masahiro Suenaga, Takeo Konno
  • Patent number: 5430873
    Abstract: During a software designing operation, a designer accesses a level prescribing unit through an interaction managing control unit. The level prescribing unit provides the guidance to specification information and design parts, etc. at a desired design level. If the designer selects and inputs specification information or design parts, the design editor corresponding to the design specification information in a design editor unit is activated, so that the designer is guided and aided through a display to produce a desired software. At this time, the information about the state of the editing operation "completed" or "not completed" is stored with the directory. The designed document satisfying a specific condition, for example, a document determined to be "design completed", is stored as a data base by a design data base storing unit.
    Type: Grant
    Filed: September 14, 1992
    Date of Patent: July 4, 1995
    Assignee: Fujitsu Limited
    Inventors: Hiroaki Abe, Itaru Fukao, Harumi Taneda, Yuji Kubota, Yasuhiko Arima, Naoshi Nakagawa, Takeo Konno, Yoshinori Arihara, Yuriko Suzuki
  • Patent number: 4490434
    Abstract: A recording sheet for thermal-dye transfer type recording having a coating layer which is placed on a substrate which is contacted with a coloring material layer containing sublimable dye and on which the dye is transferred by heating, wherein the coating layer includes both particular fine silica and particular binder, whereby the sheet provides a clear record with superior color density.
    Type: Grant
    Filed: February 28, 1983
    Date of Patent: December 25, 1984
    Assignee: Jujo Paper Co., Ltd.
    Inventors: Hiroyo Oshima, Isao Kano, Yutaka Kojima, Kazuo Harada, Takeo Konno