Abstract: There is provided a wafer inspection device that is capable of bringing a polishing wafer into proper contact with probes without lowering throughput. The total value T of a thickness t1 of a polishing plate, a thickness t2 of a polishing wafer and a magnitude t3 extending from a lower surface of a main body of a pogo frame to a lower end of each probe of a probe card is set to be larger than a magnitude t4 of a lip seal protruding from an upper surface of a chuck top.

Abstract: An inspection system, for inspecting an inspection target on a stage in a low temperature environment, includes a system main body including an inspection apparatus having inspection chambers each accommodating an inspection unit for performing electrical inspection of an inspection target on a stage and having inspection spaces arranged in multiple stages vertically, the plurality of inspection chambers being arranged horizontally, and a loader unit for transferring the inspection target with respect to the stage of the inspection unit; and a coolant supply unit configured to supply a coolant to the stage. The system main body further includes coolant line arrangement spaces, in which coolant lines extending from the coolant supply unit are arranged, provided above or below the respective inspection spaces to correspond to the respective inspection spaces, and the coolant lines are directed toward the corresponding inspection spaces in each of the coolant line arrangement spaces.

Abstract: A control device of a rotary electric machine capable of preventing occurrence of electrical resonance when a conversion operation abnormality of a DC voltage converter occurs is provided. In a case that the DC voltage converter stops a conversion operation and the conversion operation abnormality that input/output voltages become equal occurs, when a vehicle speed proportional to an electric motor rotation number exceeds a torque limit start vehicle speed, i.e., when the electric motor rotation number exceeds a torque limit start rotation number, a torque limit control for limiting an output torque of the electric motor is executed. The torque limit start vehicle speed is set to a vehicle speed corresponding to a lower limit frequency of a predetermined frequency range where there is a high likelihood of an electrical resonance occurring in the DC voltage converter when the conversion operation abnormality occurs.

Abstract: A solder-ball-supplying method, a solder-ball-supplying device and a solder-bump-forming method, which are flux-less and capable of being also applied to electrodes having a fine pitch. A substrate on which a resist with openings is positioned on electrode(s), which has a diameter of 10 through 30 ?m, of the substrate is prepared. Next, plural solder balls SBL each having a grain diameter of 1 through 10 ?m are shaken down to the opening(s) of the resist from a hopper and filled therein. Next, by sliding and moving a squeegee on an upper surface of the resist along X-Y direction, the solder balls SBL shaken down to the resist other than the openings are scrapped and removed and the solder balls SBL in the openings and around them are pushed into the openings by the squeegee.

Abstract: A control device of a rotary electric machine capable of preventing occurrence of electrical resonance when a conversion operation abnormality of a DC voltage converter occurs is provided. In a case that the DC voltage converter stops a conversion operation and the conversion operation abnormality that input/output voltages become equal occurs, when a vehicle speed proportional to an electric motor rotation number exceeds a torque limit start vehicle speed, i.e., when the electric motor rotation number exceeds a torque limit start rotation number, a torque limit control for limiting an output torque of the electric motor is executed. The torque limit start vehicle speed is set to a vehicle speed corresponding to a lower limit frequency of a predetermined frequency range where there is a high likelihood of an electrical resonance occurring in the DC voltage converter when the conversion operation abnormality occurs.

Abstract: An inspection system, for inspecting an inspection target on a stage in a low temperature environment, includes a system main body including an inspection apparatus having inspection chambers each accommodating an inspection unit for performing electrical inspection of an inspection target on a stage and having inspection spaces arranged in multiple stages vertically, the plurality of inspection chambers being arranged horizontally, and a loader unit for transferring the inspection target with respect to the stage of the inspection unit; and a coolant supply unit configured to supply a coolant to the stage. The system main body further includes coolant line arrangement spaces, in which coolant lines extending from the coolant supply unit are arranged, provided above or below the respective inspection spaces to correspond to the respective inspection spaces, and the coolant lines are directed toward the corresponding inspection spaces in each of the coolant line arrangement spaces.

Abstract: There is provided a wafer inspection device that is capable of bringing a polishing wafer into proper contact with probes without lowering throughput. The total value T of a thickness t1 of a polishing plate, a thickness t2 of a polishing wafer and a magnitude t3 extending from a lower surface of a main body of a pogo frame to a lower end of each probe of a probe card is set to be larger than a magnitude t4 of a lip seal protruding from an upper surface of a chuck top.

Abstract: A gas turbine combustor includes a plurality of fuel nozzles, a premixing plate, and a plurality of annular flow sleeves. The plurality of annular flow sleeves includes an inner annular flow sleeve and an outer annular flow sleeve. The plurality of annular flow sleeves is formed to divide an airflow passage into a plurality of flow passages including an inner and an outer circumferential flow passages. The airflow passage is formed around the plurality of fuel nozzles. The airflow passage extends from an upstream side of the plurality of fuel nozzles to fuel injecting ports of the fuel nozzles. The plurality of annular flow sleeves rectifies a flow of air in each of the flow passages and guiding the flow of air to the fuel injecting ports of the fuel nozzles.

Abstract: Disclosed is a gas turbine combustor equipped with a burner constructed to fire a plurality of combustors at the same time at a fuel/air ratio suitable for gas turbine ignition. A plurality of supports mounted for fixing an air injection hole plate to the combustor are provided at substantially the same phase position as that of cross fire tubes, and combustion air allocations are adjusted. Thus, flame propagation during gas turbine ignition is accelerated and all combustor cans are fired. In addition, porous plates are disposed downstream of the supports and the combustion air allocations are readjusted. Furthermore, air injection holes proximate to the cross fire tubes are particularly reduced in diameter to further adjust the combustion air allocations.

Abstract: A solder-ball-supplying method, a solder-ball-supplying device and a solder-bump-forming method, which are flux-less and capable of being also applied to electrodes having a fine pitch. A substrate on which a resist with openings is positioned on electrode(s), which has a diameter of 10 through 30 ?m, of the substrate is prepared. Next, plural solder balls SBL each having a grain diameter of 1 through 10 ?m are shaken down to the opening(s) of the resist from a hopper and filled therein. Next, by sliding and moving a squeegee on an upper surface of the resist along X-Y direction, the solder balls SBL shaken down to the resist other than the openings are scrapped and removed and the solder balls SBL in the openings and around them are pushed into the openings by the squeegee.

Abstract: A gas turbine combustor including a cluster-type burner is adapted to stabilize a combustion state by supplying a desired flow rate of combustion air to inner circumferential and outer circumferential fuel nozzle regions. A burner section of the combustor includes a plurality of fuel nozzles 2 and a premixing plate 4 in which are formed a plurality of premixing passages 3 each positioned at a downstream side of the corresponding one of the fuel nozzles 2, injected fuel from the plurality of fuel nozzles 2 being mixed with air in the premixing passage 3 before being supplied to a combustion chamber and burnt therein. The burner section also includes guide vanes 34, 35, 36 that rectify a flow of air and guide this air flow from an upstream side of the fuel nozzles 2 to fuel injecting ports of the fuel nozzles 2; wherein the guide vanes guide a desired amount of air to the fuel injecting ports of the fuel nozzles and stabilize combustion.

Abstract: A combustor of the prior art that defines the outlet position and direction of an air hole and suppresses adhesion of flame to an air hole outlet can reduce a discharge amount of NOx by increasing a distance over which fuel and air are mixed with each other. However, such a combustor is not sufficiently discussed for measures to suppress the occurrence of combustion oscillation resulting from the variation of a flame surface. A combustor 2 according to the present invention includes a combustion chamber 5 to which fuel and air are supplied; air holes 32 adapted to supply air to the combustion chamber 5; fuel nozzles 25 adapted to supply gaseous fuel to the air holes 32; and orifices 24 adapted to allow the gaseous fuel supplied to the air holes 32 to cause a pressure drop.

Abstract: Disclosed is a gas turbine combustor equipped with a burner constructed to fire a plurality of combustors at the same time at a fuel/air ratio suitable for gas turbine ignition. A plurality of supports mounted for fixing an air injection hole plate to the combustor are provided at substantially the same phase position as that of cross fire tubes, and combustion air allocations are adjusted. Thus, flame propagation during gas turbine ignition is accelerated and all combustor cans are fired. In addition, porous plates are disposed downstream of the supports and the combustion air allocations are readjusted. Furthermore, air injection holes proximate to the cross fire tubes are particularly reduced in diameter to further adjust the combustion air allocations.

Abstract: A combustor includes a chamber mixing and burning fuel and air and an air hole plate disposed on a wall surface of the chamber. The air hole plate includes a plurality of rows disposed concentrically of a plurality of air holes jetting coaxial jets of fuel and air into the chamber. A first fuel nozzle and a second fuel nozzle are disposed near a fuel hole for jetting fuel into an air hole row on an inner peripheral side. The first fuel nozzle is structured to suppress turbulence of surrounding air flow and the second fuel nozzle is structured to promote turbulence of a surrounding air flow. In accordance with the aspect of the present invention, good flame stability can be maintained while further reducing NOx in a combustor using coaxial jets.

Abstract: A two-shaft gas turbine is capable of starting premixed combustion without extinguishing a flame. The two-shaft gas turbine includes a combustor and a gas generator controller. The combustor has a premix burner that includes combustion regions in which premixed combustion is to be carried out individually. The gas generator controller controls the combustor. In a method for starting the premixed combustion in the combustor, the gas generator controller selects at least one of the combustion regions in which the premixed combustion is to be carried out, on the basis of a fuel-air ratio, and starts premix combustion in the selected combustion region or separately in each of the selected combustion regions. Further, as the fuel-air ratio is increased, the controller increases the number of the selected region in which the premixed combustion is carried out.

Abstract: A burner is provided that has high flame stability and reduces NOx emissions. In the burner, air holes of an air hole member have a central axis inclined relative to a burner central axis. The leading end portion of a first fuel nozzle is configured to be able to suppress turbulence of air-flow flowing on the outer circumference side of the first fuel nozzle. The tip of the first fuel nozzle is located on a fuel jetting-out directional downstream side of the inlet of the fuel hole. The tip of the second fuel nozzle is located on a fuel jetting-out directional downstream side of the air hole inlet.

Abstract: A combustor of the prior art that defines the outlet position and direction of an air hole and suppresses adhesion of flame to an air hole outlet can reduce a discharge amount of NOx by increasing a distance over which fuel and air are mixed with each other. However, such a combustor is not sufficiently discussed for measures to suppress the occurrence of combustion oscillation resulting from the variation of a flame surface. A combustor 2 according to the present invention includes a combustion chamber 5 to which fuel and air are supplied; air holes 32 adapted to supply air to the combustion chamber 5; fuel nozzles 25 adapted to supply gaseous fuel to the air holes 32; and orifices 24 adapted to allow the gaseous fuel supplied to the air holes 32 to cause a pressure drop.

Abstract: A burner is provided that has high flame stability and reduces NOx emissions. In the burner, air holes of an air hole member have a central axis inclined relative to a burner central axis. The leading end portion of a first fuel nozzle is configured to be able to suppress turbulence of air-flow flowing on the outer circumference side of the first fuel nozzle. The tip of the first fuel nozzle is located on a fuel jetting-out directional downstream side of the inlet of the fuel hole. The tip of the second fuel nozzle is located on a fuel jetting-out directional downstream side of the air hole inlet.

Abstract: A combustor includes a chamber mixing and burning fuel and air and an air hole plate disposed on a wall surface of the chamber. The air hole plate includes a plurality of rows disposed concentrically of a plurality of air holes jetting coaxial jets of fuel and air into the chamber. A first fuel nozzle and a second fuel nozzle are disposed near a fuel hole for jetting fuel into an air hole row on an inner peripheral side. The first fuel nozzle is structured to suppress turbulence of surrounding air flow and the second fuel nozzle is structured to promote turbulence of a surrounding air flow. In accordance with the aspect of the present invention, good flame stability can be maintained while further reducing NOx in a combustor using coaxial jets.

Abstract: A burner is provided that has high flame stability and reduces NOx emissions. In the burner, air holes of an air hole member have a central axis inclined relative to a burner central axis. The leading end portion of a first fuel nozzle is configured to be able to suppress turbulence of air-flow flowing on the outer circumference side of the first fuel nozzle. The tip of the first fuel nozzle is located on a fuel jetting-out directional downstream side of the inlet of the fuel hole. The tip of the second fuel nozzle is located on a fuel jetting-out directional downstream side of the air hole inlet.