Abstract: A filter unit for a Raman microscope mounted with a dark-field objective lens unit includes a frame body, a plurality of UV-LED elements that is disposed around a window part of the frame body to emit UV light, and a long-pass filter that is supported to the frame body to cover the window part of the frame body and transmits a light having a wavelength longer than the wavelength of the UV light. The filter unit has a dark-field UV irradiation function, and is able to impart a fluorescence observation function to the Raman microscope.

Abstract: A filter unit for a Raman microscope mounted with a dark-field objective lens unit includes a frame body, a plurality of UV-LED elements that is disposed around a window part of the frame body to emit UV light, and a long-pass filter that is supported to the frame body to cover the window part of the frame body and transmits a light having a wavelength longer than the wavelength of the UV light. The filter unit has a dark-field UV irradiation function, and is able to impart a fluorescence observation function to the Raman microscope.

Abstract: The figure is fixed in a given position. If peaks are seen in the positive Y direction, the minimum value of the difference in height between the spectrum and the figure in the range where the figure is present on the X-axis. The minimum value and the height of the figure at the reference point are added. The figure is moved within a range containing the reference point, and the minimum value of the difference in height between the spectrum and the figure is added to the height of the figure at the reference point, at each point on the figure. A maximum value L(xi) of the calculated values is obtained, and the maximum value L(xi) is obtained as a baseline value at the X coordinate of the reference point.

Abstract: A highly accurate three-dimensional measurement base is specified with simple settings. When a peak occurs in the positive Z-axis direction, a hemisphere or semi-spheroid figure (z?0) is placed to contain a position (xi, yi) where a base point should be obtained, scanning is performed such that the bottom of the figure contains the position (xi, yi), and the minimum value lmin of the difference between the Z position of a surface profile image and the height of the hemisphere or semi-spheroid figure at each position, and the height of the hemisphere or semi-spheroid figure at the position (xi, yi) are obtained. The maximum value of the sums is expressed as L(xi, yi), and a base point (Xi, Yi, L(xi,yi)) is specified. Base points are specified throughout the target surface by the same base point setting method, and a three-dimensional measurement base is specified on the basis of the specified base points.

Abstract: A highly accurate three-dimensional measurement base is specified with simple settings. When a peak occurs in the positive Z-axis direction, a hemisphere or semi-spheroid figure (z?0) is placed to contain a position (xi, yi) where a base point should be obtained, scanning is performed such that the bottom of the figure contains the position (xi, yi), and the minimum value lmin of the difference between the Z position of a surface profile image and the height of the hemisphere or semi-spheroid figure at each position, and the height of the hemisphere or semi-spheroid figure at the position (xi, yi) are obtained. The maximum value of the sums is expressed as L(xi, yi), and a base point (Xi, Yi, L(xi,yi)) is specified. Base points are specified throughout the target surface by the same base point setting method, and a three-dimensional measurement base is specified on the basis of the specified base points.

Abstract: The figure is fixed in a given position. If peaks are seen in the positive Y direction, the minimum value of the difference in height between the spectrum and the figure in the range where the figure is present on the X-axis. The minimum value and the height of the figure at the reference point are added. The figure is moved within a range containing the reference point, and the minimum value of the difference in height between the spectrum and the figure is added to the height of the figure at the reference point, at each point on the figure. A maximum value L(xi) of the calculated values is obtained, and the maximum value L(xi) is obtained as a baseline value at the X coordinate of the reference point.