Abstract: The object of the present invention can be achieved by an adhesive film for semiconductor element, including: a (meth) acrylic ester copolymer (A); and a silica (B), wherein the (meth) acrylic ester copolymer (A) has a hydroxyl group and a carboxylic group, or has an epoxy group, and has a weight-average molecular weight of 100,000 to 1,000,000, wherein the silica (B) has mean particle diameter of 1 to 100 nm, and wherein none of a thermosetting resin and a curing agent (C) is contained in non-volatile components, or total contents of the thermosetting resin and the curing agent (C) in the non-volatile components is equal to or lower than 5 wt %.