Abstract: A liquid supplying device includes: a first pump and a second pump respectively provided in a liquid supplying path that supplies liquid contained in a liquid accommodating portion to an applicator; a filter passing through the liquid that flows toward the applicator; and a return flow path that returns the liquid passing through the filter to the liquid accommodating portion. In a circulating mode that supplies the liquid to the return flow path and stops supply of the liquid to the applicator, any of the first pump and the second pump continuously supplies the liquid to the return flow path.

Abstract: A check valve which allows liquid to flow in one direction while preventing liquid from flowing in a direction reverse to said one direction, the check valve comprising: an inflow port allowing liquid to flow therein; an outflow port allowing liquid to flow out thereof; a valve seat provided between the inflow port and the outflow port, the valve seat having a valve hole through which the inflow port communicates with the outflow port; a valve chamber provided between the valve seat and the outflow port; a valve element disposed in the valve chamber, the valve element opening and closing the valve hole; a plurality of holding surfaces located radially outside the valve element, the holding surfaces extending in an axial direction; and an elastic member supported on the holding surfaces and set in the valve chamber, the elastic member applying an elastic force directed toward the valve hole to the valve element.

Abstract: A check valve which allows liquid to flow in one direction while preventing liquid from flowing in a direction reverse to said one direction, the check valve comprising: an inflow port allowing liquid to flow therein; an outflow port allowing liquid to flow out thereof; a valve seat provided between the inflow port and the outflow port, the valve seat having a valve hole through which the inflow port communicates with the outflow port; a valve chamber provided between the valve seat and the outflow port; a valve element disposed in the valve chamber, the valve element opening and closing the valve hole; a plurality of holding surfaces located radially outside the valve element, the holding surfaces extending in an axial direction; and an elastic member supported on the holding surfaces and set in the valve chamber, the elastic member applying an elastic force directed toward the valve hole to the valve element.

Abstract: In a liquid supply apparatus, plungers which respectively expand and contract pump chambers are reciprocated linearly in an axial direction with their phases shifted to each other, thereby continuously discharging liquid. In a pump block, drive rods are mounted so as to be reciprocatable in an axial direction. At a center in an axial direction of shafts attached to the drive rods, drive rollers are mounted, and rollers are mounted at both ends of the shafts. Guide grooves which support the guide rollers are formed in guide blocks.

Abstract: In a liquid supply apparatus, plungers which respectively expand and contract pump chambers are reciprocated linearly in an axial direction with their phases shifted to each other, thereby continuously discharging liquid. In a pump block, drive rods are mounted so as to be reciprocatable in an axial direction. At a center in an axial direction of shafts attached to the drive rods, drive rollers are mounted, and rollers are mounted at both ends of the shafts. Guide grooves which support the guide rollers are formed in guide blocks.

Abstract: A chemical liquid supplying apparatus which can discharge chemical liquid with high accuracy is provided. The apparatus is used to discharge the chemical liquid in a chemical liquid tank from an application nozzle. The apparatus has a combined member formed integrally with a pump case and a cylinder, and a flexible tube serving as a pump member is provided in the pump case, wherein its inside is a pump chamber and its outside is a pump-side driving chamber. A piston is assembled to the cylinder and when the piston is reciprocated by a motor, the pump chamber is expanded and contracted. A gap between the piston and the cylinder is covered with a diaphragm, and an interior of the diaphragm is a seal space. Therefore, an incompressible medium having leaked from the gap between the piston and the cylinder enters into the seal space and does not leak to the outside.

Abstract: In a chemical liquid supplying apparatus, discharge accuracy of chemical liquid is enhanced, and durability of a flexible tube is enhanced. By the flexible tube incorporated into a pump housing, an interior of the pump housing is partitioned into a pump chamber, which communicates with a liquid inlet and a liquid outlet, and a drive chamber in which an incompressible, indirect medium is enclosed. Outer surfaces of end portions of the flexible tube are sealed by outer seal members, and their inner surfaces are sealed by inner seal members. Fastening cylindrical bodies disposed in the end portions of the flexible tube are radially expanded by wedge sleeves, whereby the outer and inner seal members are caused to closely contact with the flexible tube.

Abstract: A chemical liquid supplying apparatus, which can discharge chemical liquid with high precision, is provided. A pump assembly is detachably mounted in a pump case in which liquid inflow and discharge ports are formed. The pump assembly includes: a cylindrical body in which a piston is slidably incorporated axially; an elastically deformable bellows forming a pump chamber in the pump case and forming a drive chamber in which an indirect medium is enclosed; and an axially elastically-deformable bellows cover continuing with a sliding surface of the piston and forming a seal chamber in which the indirect medium is enclosed, and the pump assembly is unitized. The pump assembly is coupled to a drive shaft via a connecting member, and by axial-directional reciprocating movement of this drive shaft, the piston causes the bellows to perform a pump operation, whereby the chemical liquid is discharged from a liquid discharge portion.

Abstract: A chemical liquid supplying apparatus 10 has a bellows 11, which includes a small-size bellows portion 13, a large-size bellows portion 14 with a larger volume change per axial-directional unit displacement amount than that of the small-size bellows portion 13, and a drive portion 12 therebetween. An apparatus main body 10a to which the bellows 11 is attached includes a supporting member 21 to which a fixed end portion 15 of the bellows 11 is attached and a supporting member 22 to which a fixed end portion 16 of the bellows 11 is attached. A drive sleeve 27 surrounds the bellows 11 and is rotatably supported on the apparatus main body 10a. A driven cylinder body 32 attached to the drive portion 12 converts rotation of the drive sleeve 27 to axial-directional movement of the drive portion 12.

Abstract: A chemical liquid supplying apparatus which can discharge chemical liquid with high accuracy is provided. The apparatus is used to discharge the chemical liquid in a chemical liquid tank from an application nozzle. The apparatus has a combined member formed integrally with a pump case and a cylinder, and a flexible tube serving as a pump member is provided in the pump case, wherein its inside is a pump chamber and its outside is a pump-side driving chamber. A piston is assembled to the cylinder and when the piston is reciprocated by a motor, the pump chamber is expanded and contracted. A gap between the piston and the cylinder is covered with a diaphragm, and an interior of the diaphragm is a seal space. Therefore, an incompressible medium having leaked from the gap between the piston and the cylinder enters into the seal space and does not leak to the outside.

Abstract: A chemical liquid supplying apparatus which can discharge chemical liquid with high accuracy is provided. The apparatus is used to discharge the chemical liquid in a chemical liquid tank from an application nozzle. The apparatus has a combined member formed integrally with a pump case and a cylinder, and a flexible tube serving as a pump member is provided in the pump case, wherein its inside is a pump chamber and its outside is a pump-side driving chamber. A piston is assembled to the cylinder and when the piston is reciprocated by a motor, the pump chamber is expanded and contracted. A gap between the piston and the cylinder is covered with a diaphragm, and an interior of the diaphragm is a seal space. Therefore, an incompressible medium having leaked from the gap between the piston and the cylinder enters into the seal space and does not leak to the outside.

Abstract: A flexible tank has a volume-variable chamber formed so as to be sectioned by a flexible tube that is expanded or contracted in accordance with the amount of the contained chemical liquid, and adaptor parts attached to the flexible tube. A primary-side port open to the volume-variable chamber is open into one of the adaptor parts, and a secondary-side port open to the volume-variable chamber is open into the other adaptor part. The contact between the chemical liquid and air in the volume-variable chamber is suppressed to minimum level, thereby containing the chemical liquid without deteriorating the cleanliness of the chemical liquid, and improving discharge accuracy of the chemical liquid.

Abstract: A chemical liquid supply device applies chemical liquid from a nozzle to a processed object. The nozzle is provided in a moving head, which reciprocates between an applying position and a waiting position and includes an application valve operating so as to take an applying state of applying the liquid from the nozzle and a stopped state of stopping the application. Chemical liquid is pumped from a tank through a filter to a valve chamber of the application valve via a supply tube. The valve chamber is connected to a buffer tank through a circulation tube. The circulation tube is provided with a circulation valve for opening/closing its flow path.

Abstract: A chemical liquid supplying apparatus can discharge chemical liquid with high accuracy and monitor a leakage of an incompressible medium from a region between a piston and a cylinder. A pump has a flexible tube for partitioning a pump chamber and a drive chamber, and the incompressible medium is supplied to the drive chamber by the piston reciprocating in a cylinder hole of the cylinder. A bellows cover is provided between the piston and the cylinder, and forms a seal chamber contiguous to a sliding face of the piston. A seal-chamber pressure sensor is attached to the cylinder so as to detect the pressure of the incompressible medium for sealing enclosed in the seal chamber, and a deterioration degree of a seal member is determined by detecting the pressure in the seal chamber.

Abstract: A chemical liquid supplying apparatus capable of discharging chemical liquid with high accuracy and monitoring a leakage of an incompressible medium from a region between a piston and a cylinder is provided. A pump has a flexible tube for partitioning a pump chamber and a drive chamber, and the incompressible medium is supplied to the drive chamber by the piston reciprocating within a cylinder hole of the cylinder. A first bellows cover for forming a first seal chamber is provided between a large-diameter piston portion and the cylinder, and a second bellows cover for forming a second seal chamber is provided between a small-diameter piston portion and the cylinder. To detect pressure of the incompressible medium enclosed in the seal chambers, a seal-chamber pressure sensor is attached to the cylinder, and a deterioration degree of seal members is determined by detecting the pressure.

Abstract: A flexible tube 20 has an inlet side fixed end 21, and an outlet side fixed end 22, and an elastic deformation portion 23 is provided between them. The elastic deformation portion 23 is provided with convex arc portions 42. In the convex arc portions 42, three apices 41 provided apart at approximately regular intervals in the circumferential direction are each curved in a convex shape outward so as to have smaller curvature radius than that of a virtual circle S tangent to the apices 41 from each apex as a center for deformation. Concave arc portions 43 are formed consecutively between the respective convex arc portions 42 in circumferential direction, and the concave arc portions 43 are each curved in a concave shape outward. At a time of expansion and shrinkage of the elastic deformation portion, the respective convex arc portions 42 elastically deform in the circumferential direction, and the concave arc portions 43 elastically deform in the radial direction.

Abstract: A buffer tank section (6) includes a liquid accumulation chamber (61) communicating with, through a liquid introduction flow path (42), a liquid tank (46) accumulation chemical liquid. A filter section (4) includes a filter inlet (41a) and a filter outlet (41b), wherein the filter inlet (41a) communicates with a liquid discharge vent (60d) of the buffer tank section (6). In a pump (11), a pump inlet (11a) is connected to the filter outlet (41b) and a pump outlet (11b) is connected to a discharge nozzle (50) through a liquid discharge flow path (47). A return flow path (48) is connected between the pump outlet (11b) and the buffer tank section (6), wherein the chemical liquid, discharged from the pump (11), is returned to the liquid accumulation chamber (61). An exhaust flow path (49) is connected to the buffer tank section (6), thereby exhausting air in the liquid accumulation chamber (61).

Abstract: In a chemical liquid supplying apparatus, discharge accuracy of chemical liquid is enhanced, and durability of a flexible tube is enhanced. By the flexible tube incorporated into a pump housing, an interior of the pump housing is partitioned into a pump chamber, which communicates with a liquid inlet and a liquid outlet, and a drive chamber in which an incompressible, indirect medium is enclosed. Outer surfaces of end portions of the flexible tube are sealed by outer seal members, and their inner surfaces are sealed by inner seal members. Fastening cylindrical bodies disposed in the end portions of the flexible tube are radially expanded by wedge sleeves, whereby the outer and inner seal members are caused to closely contact with the flexible tube.

Abstract: A chemical liquid supplying apparatus, which can discharge chemical liquid with high precision, is provided. A pump assembly is detachably mounted in a pump case in which liquid inflow and discharge ports are formed. The pump assembly includes: a cylindrical body in which a piston is slidably incorporated axially; an elastically deformable bellows forming a pump chamber in the pump case and forming a drive chamber in which an indirect medium is enclosed; and an axially elastically-deformable bellows cover continuing with a sliding surface of the piston and forming a seal chamber in which the indirect medium is enclosed, and the pump assembly is unitized. The pump assembly is coupled to a drive shaft via a connecting member, and by axial-directional reciprocating movement of this drive shaft, the piston causes the bellows to perform a pump operation, whereby the chemical liquid is discharged from a liquid discharge portion.

Abstract: A chemical liquid supplying apparatus 10 has a bellows 11, and the bellows 11 includes a small-size bellows portion 13, a large-size bellows portion 14 with a larger volume change per axial-directional unit displacement amount than that of the small-size bellows portion 13, and a drive portion 12 provided therebetween. An apparatus main body 10a to which the bellows 11 is attached includes a supporting member 21 to which a fixed end portion 15 of the bellows 11 is attached and a supporting member 22 to which a fixed end portion 16 of the bellows 11 is attached. A drive sleeve 27 is fitted outside the bellows 11 to be rotatable with respect to the apparatus main body 10a. A driven cylinder body 32 for converting rotation of the drive sleeve 27 to axial-directional movement of the drive portion 12 is attached to the drive portion 12. When the drive sleeve 27 is rotated by a motor 38, the drive portion 12 is reciprocated axially, whereby the bellows 11 performs a pump operation.