Abstract: A squeegee device (10) for cleaning includes a main supporting base (20) in which an opening (24) is formed along a cleaning width direction of a cleaning surface (W), and a pair of squeegees (30) and (40) arranged to extend along the cleaning width direction along the periphery of the opening (24) and formed of an elastic body. Tips of the pair of squeegees (30, 40) are arranged at an angle relative to each other and contact each other in an airtight state, and pressing the tips against the cleaning surface (W) can open a gap between the tips.

Abstract: A squeegee device (10) for cleaning includes a main supporting base (20) in which an opening (24) is formed along a cleaning width direction of a cleaning surface (W), and a pair of squeegees (30) and (40) arranged to extend along the cleaning width direction along the periphery of the opening (24) and formed of an elastic body. Tips of the pair of squeegees (30, 40) are arranged at an angle relative to each other and contact each other in an airtight state, and pressing the tips against the cleaning surface (W) can open a gap between the tips.

Abstract: A fluid-conveying apparatus conveys fluid using a channel for the fluid to flow. The apparatus includes a pressure-generating device for generating pressure for conveying the fluid, a plurality of processing areas for processing the fluid, a valve which is disposed between the processing areas and controls the fluid flow, and a pressure-relieving device for relieving the pressure in the channel.

Abstract: A fluid-processing device is provided for bringing two kinds of fluids into contact to mix or react with each other. The device comprises a first supply path connected to a first feed inlet for feeding a first fluid for supplying the first fluid, and plural second supply paths connected to a second feed inlet for feeding a second fluid for supplying the second fluid; the second supply paths being arranged along supply direction of the first fluid, the second supply paths being surrounded by the first fluid, the second fluid discharged from fluid outlets of the second supply paths being brought into contact with the first fluid in the first supply path.

Abstract: A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.

Abstract: A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.

Abstract: A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.

Abstract: A method for producing a crystalline film by melting and resolidifying a film, characterized in preparing a film having a specific region and obtained either by (A) a step of forming a film in which a “specific region” and an “region continuous to a periphery of the specific region and different in thickness from the specific region” co-exist, or by (B) a step of irradiating a film with an electromagnetic wave or particles having a mass in mutually different conditions between a specific region and a peripheral region thereof, and melting and resolidifying at least a part of the film. As the spatial position of the specific region can be exactly and easily controlled, it is possible to obtain a crystalline film in which a crystal grain is formed in a desired position.

Abstract: A fluid-processing device is provided for bringing two kinds of fluids into contact to mix or react with each other. The device comprises a first supply path connected to a first feed inlet for feeding a first fluid for supplying the first fluid, and plural second supply paths connected to a second feed inlet for feeding a second fluid for supplying the second fluid; the second supply paths being arranged along supply direction of the first fluid, the second supply paths being surrounded by the first fluid, the second fluid discharged from fluid outlets of the second supply paths being brought into contact with the first fluid in the first supply path.

Abstract: A method for producing a crystalline film by melting and resolidifying a film, characterized in preparing a film having a specific region and obtained either by (A) a step of forming a film in which a “specific region” and an “region continuous to a periphery of the specific region and different in thickness from the specific region” co-exist, or by (B) a step of irradiating a film with an elecrtromagnetic wave or particles having a mass in mutually different conditions between a specific region and a peripheral region thereof, and melting and resolidifying at least a part of the film. As the spatial position of the specific region can be exactly and easily controlled, it is possible to obtain a crystalline film in which a crystal grain is formed in a desired position.

Abstract: A fluid delivery device is provided which comprises a microchannel device for cutting out a certain amount of a sample from a micorochannel by controlling a valve opening. The fluid delivery device has a valve for controlling a flow of a fluid, comprising a flow channel for the fluid, and a valve in the flow channel, wherein the valve operates in accordance with a pressure difference between the upstream side and downstream side of the valve caused by the flow of the fluid through the flow channel, allowing the fluid to flow when the pressure difference is lower than a prescribed value P0, and intercepting the fluid not to flow when the pressure difference is P0 or more.

Abstract: A process for producing a mass transfer device is provided which enables packing of a packing material uniformly in a flow channel, and transfers a specified substance by flowing a fluid containing the specified substance through a flow channel on a substrate. A mass transfer device produced by the process is also provided. The process for producing a mass transfer device comprises steps of preparing a substrate, forming a flow channel on the surface of the substrate, applying a liquid drop composed of a packing material and a liquid medium, and packing the packing material in the flow channel by removing the liquid medium.

Abstract: A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.

Abstract: A micro liquid delivery device includes a flow channel for flowing a liquid, at least two pressure-generators for generating pressures provided in the flow channel, and a variable member placed between the pressure-generators and capable of transforming between a first stable state and a second stable state by a generated pressure. A branch of the flow channel is selected by transforming the variable member into the first stable state or the second stable state. A valve for changeover of flow channel branches includes a variable member placed between a pressure-generator and transformable between a first stable state and a second stable state by a generated pressure, with the valve serving to select a branch of flow channel branches by the variable member.

Abstract: A liquid transport device capable of introducing and transporting a liquid and preventing a backward flow of the liquid in a small-sized analysis system is provided. The liquid transport device has a substrate 201, an ejection orifice 205, which is formed integrally with the substrate 201 and through which a liquid is ejected, a space portion 210, which is formed so as to communicate with the ejection orifice 205 and through which the liquid ejected from the ejection orifice flies, and a flow channel 204, which communicates with the space portion 210 and which is positioned within such a distance range that the flying liquid can reach the flow channel.

Abstract: A beam having a base material of silicon monocrystal and at least one projection which is integrally formed so as to be supported at least at one end thereof and which has two surfaces having an orientation plane (111), includes a bottom surface in a plane which is common with a plane of the base material; a groove penetrating from the bottom surface to a top of the projection; and a protecting member having a resistance property against a crystal anisotropic etching liquid and covering an inner wall of the groove.

Abstract: A device for detecting a target substance in a fluid is provided. This device comprises a periodic structure having a vacant portion for passing the fluid containing the target substance and a solid portion arranged regularly and capable of transmitting an electromagnetic wave, an electro-magnetic wave-projecting means for projecting the electromagnetic wave to the periodic structure, and a detecting means for measuring the magnetic wave emitted from the periodic structure to detect a change in periodic distribution of a refractive index. This sensor is highly sensitive in a small size.

Abstract: A fluid-conveying apparatus conveys fluid using a channel for the fluid to flow. The apparatus includes a pressure-generating device for generating pressure for conveying the fluid, a plurality of processing areas for processing the fluid, a valve which is disposed between the processing areas and controls the fluid flow, and a pressure-relieving device for relieving the pressure in the channel.

Abstract: A fluid delivery device is provided which comprises a microchannel device for cutting out a certain amount of a sample from a micorochannel by controlling a valve opening. The fluid delivery device has a valve for controlling a flow of a fluid, comprising a flow channel for the fluid, and a valve in the flow channel, wherein the valve operates in accordance with a pressure difference between the upstream side and downstream side of the valve caused by the flow of the fluid through the flow channel, allowing the fluid to flow when the pressure difference is lower than a prescribed value P0, and intercepting the fluid not to flow when the pressure difference is P0 or more.

Abstract: A method for producing a crystalline film by melting and resolidifying a film, characterized in preparing a film having a specific region and obtained either by (A) a step of forming a film in which a “specific region” and an “region continuous to a periphery of the specific region and different in thickness from the specific region” co-exist, or by (B) a step of irradiating a film with an elecrtromagnetic wave or particles having a mass in mutually different conditions between a specific region and a peripheral region thereof, and melting and resolidifying at least a part of the film. As the spatial position of the specific region can be exactly and easily controlled, it is possible to obtain a crystalline film in which a crystal grain is formed in a desired position.