Patents by Inventor Takeru KOGUMA

Takeru KOGUMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230348351
    Abstract: Provided is a compound, a polymer, a composition, a composition for film formation, a pattern formation method, an insulating film formation method, and a method for producing a compound, by which a resist having excellent exposure sensitivity can be obtained. A compound represented by the following formula (1): wherein RA is a hydrogen atom, a methyl group, or a trifluoromethyl group; RX is ORB or a hydrogen atom; RB is a substituted or unsubstituted alkyl group having 1 to 30 carbon atoms; and P is a hydroxy group, an alkoxy group, an ester group, an acetal group, a carboxyalkoxy group, a carbonate ester group, a nitro group, an amino group, a carboxyl group, a thiol group, an ether group, a thioether group, a phosphine group, a phosphone group, a urethane group, a urea group, an amide group, an imide group, or a phosphate group.
    Type: Application
    Filed: December 21, 2021
    Publication date: November 2, 2023
    Inventors: Tadashi OMATSU, Yu OKADA, Takeru KOGUMA, Masahiro MATSUMOTO, Yushi NIIMI, Masatoshi ECHIGO