Patents by Inventor Takeru Utsugi
Takeru Utsugi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12196673Abstract: A defect inspection apparatus includes a first objective lens having an optical axis is perpendicular to a wafer mounting surface of the stage, a second objective lens having an optical axis forms a predetermined acute angle with respect to the wafer mounting surface of the stage, and a dichroic mirror which reflects light having a first wavelength and transmits or reflects light having a second wavelength. Emitted light of a first optical path 111 from a first light source which is reflected from or transmitted through the dichroic mirror and first emitted light and second emitted light polarized and separated from a second light source which are transmitted through or reflected from the dichroic mirror are incident on the first objective lens, and emitted light of a second optical path from the first light source is incident on the second objective lens.Type: GrantFiled: March 31, 2020Date of Patent: January 14, 2025Assignee: HITACHI HIGH-TECH CORPORATIONInventors: Takeru Utsugi, Toshifumi Honda, Andreas Karsaklian Dal Bosco, Tomoto Kawamura, Kenshiro Ohtsubo
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Publication number: 20250012732Abstract: A surface inspection apparatus includes a differential interference contrast detection system. Illumination light is emitted to positions deviated by a predetermined shear amount as two illumination spots having different phases. Light is generated in first and second polarization directions different from each other from interference light obtained by interfering reflected light of the two illumination spots from a surface of a sample. Light in the first and second polarization directions is converted to generate first and second interference signals. A signal processing device is configured to process the first and second interference signals, and the first and second polarization directions of the light generated by the differential interference contrast detection system are set such that an intensity of the first interference signal and an intensity of the second interference signal are the same at an operation point at which there is no phase difference between the two illumination spots.Type: ApplicationFiled: January 12, 2022Publication date: January 9, 2025Inventors: Toshifumi HONDA, Takeru UTSUGI, Masato ISHIZUKA, Ryuji UKAI
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Publication number: 20240280483Abstract: Provided is a technique capable of reducing an influence of an inter-beam phase difference unrelated to a defect and accurately detecting even a defect having a low aspect ratio by a defect inspection device using differential interference contrast. To achieve the above purpose, provided is the defect inspection device using differential interference contrast that inspects a specimen using light. The defect inspection device includes: a light source configured to emit a light beam; a polarized light separation element configured to split the light beam into a first beam and a second beam which are polarized and orthogonal to each other; a sensor configured to detect a signal from the first beam and the second beam reflected from the specimen; and a processing processor configured to process the signal detected by the sensor. The processing processor uses a signal string obtained based on information around a measured point to be measured on the specimen to correct a measured signal at the measured point.Type: ApplicationFiled: July 14, 2021Publication date: August 22, 2024Applicant: Hitachi High-Tech CorporationInventors: Takeru UTSUGI, Toshifumi HONDA, Kenshiro OHTSUBO
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Publication number: 20240159520Abstract: A defect inspection apparatus that includes a differential interference contrast illumination system that irradiates a sample surface with an illumination spot set composed of two polarized illumination spots that have different phases at a predetermined wavelength and that are offset by a predetermined shear amount, a differential interference contrast detection system that condenses reflected light beams of the two polarized illumination spots reflected from the sample surface to generate interference light beams, a scanning unit that scans the sample surface using the two polarized illumination spots, a sensor unit that photoelectrically converts the interference light beams generated by the differential interference contrast detection system to generate interference signals, a height displacement measurement unit that processes the interference signals to measure height displacement between the illumination spots, and a height shape reconstruction unit that accumulates height displacement data of the illuType: ApplicationFiled: April 6, 2021Publication date: May 16, 2024Inventors: Toshifumi HONDA, Takeru UTSUGI
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Publication number: 20230409949Abstract: One preferred aspect of the invention is a quantum computer of a semiconductor, including: a semiconductor crystalline substrate; a gate electrode array structure formed on a surface of the semiconductor crystalline substrate; and a reservoir unit that is a carrier supply unit, in which a classic potential barrier is formed in the semiconductor crystalline substrate by controlling an applied voltage to the gate electrode array structure, and a charge supplied from the reservoir unit is transported into the classic potential barrier.Type: ApplicationFiled: February 28, 2023Publication date: December 21, 2023Inventors: Takeru UTSUGI, Noriyuki LEE, Ryuta TSUCHIYA, Digh HISAMOTO, Toshiyuki MINE
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Publication number: 20230394348Abstract: The invention addresses providing a technology that enables it to restrain a temperature rise because of current consumed by a quantum semiconductor and wiring conductors for control. A quantum calculator disclosed herein comprises a first refrigeration tube to cool a metal body; a refrigerator framing which encloses inside the metallic body and the first refrigeration tube; a quantum bit array chip having a plurality of silicon-spin quantum bits; and multiple control wiring conductors to drive the quantum bit array chip. The quantum bit array chip is placed on the metal body and made up of multiple regions and sub-regions, each of the regions performing a quantum operation independently. The multiple control wiring conductors are connected to the multiple regions and sub-regions respectively as multiple groups of control wiring conductors. The multiple control wring conductors are disposed across the first refrigeration tube.Type: ApplicationFiled: February 28, 2023Publication date: December 7, 2023Inventors: Satoru AKIYAMA, Takeru UTSUGI, Yusuke WACHI, Satoshi MURAOKA
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Publication number: 20230060883Abstract: A defect inspection apparatus includes a first objective lens having an optical axis is perpendicular to a wafer mounting surface of the stage, a second objective lens having an optical axis forms a predetermined acute angle with respect to the wafer mounting surface of the stage, and a dichroic mirror which reflects light having a first wavelength and transmits or reflects light having a second wavelength. Emitted light of a first optical path 111 from a first light source which is reflected from or transmitted through the dichroic mirror and first emitted light and second emitted light polarized and separated from a second light source which are transmitted through or reflected from the dichroic mirror are incident on the first objective lens, and emitted light of a second optical path from the first light source is incident on the second objective lens.Type: ApplicationFiled: March 31, 2020Publication date: March 2, 2023Inventors: Takeru UTSUGI, Toshifumi HONDA, Andreas KARSAKLIAN DAL BOSCO, Tomoto KAWAMURA, Kenshiro OHTSUBO
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Publication number: 20220413204Abstract: According to the invention, a light guide plate-type video display device and a video display system that are capable of displaying a video with less color deviation and less video distortion are provided. A video display device 101 configured to display a video includes a video projection unit 200 configured to project video light, a video deflection unit 210, and a light guide portion 230. The video deflection unit 210 deflects video light emitted by the video projection unit 200 and causes the video light to propagate to the light guide portion 230, and the light guide portion 230 causes the entered video light to propagate therein and outputs the video light. Here, the video deflection unit 210 or the light guide portion 230 is configured to reduce color dispersion of the video light outputted from the light guide portion 230.Type: ApplicationFiled: October 6, 2020Publication date: December 29, 2022Inventors: Ryuji UKAI, Takahiro MOURI, Takeru UTSUGI, Toshiteru NAKAMURA, Takuma KUNO, Masahito UCHIYAMA
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Patent number: 11513473Abstract: Provided is a waveguide having a light diffraction unit that diffracts incident light by a multiplex-recorded hologram, in which, in the light diffraction unit, a plurality of holograms having different angles with respect to an incident surface of the waveguide are formed, and when certain parallel light beams are incident, different wavelengths are diffracted by the plurality of holograms.Type: GrantFiled: May 14, 2020Date of Patent: November 29, 2022Assignee: HITACHI-LG DATA STORAGE, INC.Inventors: Takeru Utsugi, Hiromichi Yamakawa
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Patent number: 11493759Abstract: It is an objective of this disclosure to protect a highly transparent hologram light guide plate from water vapor and ultraviolet ray, thereby suppressing deterioration of the hologram light guide plate even when employed in a head mount display used in outdoor environments. A hologram light guide plate according to this disclosure comprises a protection layer that protects a hologram layer and an intermediate layer that is placed between a glass layer and the protection layer, wherein the glass layer and the hologram layer form a transfer layer that transfers image light. The intermediate layer causes the image light to transfer only in the transfer layer in a section from an input area of the image light to an output area of the image light.Type: GrantFiled: June 16, 2020Date of Patent: November 8, 2022Assignee: HITACHI-LG DATA STORAGE, INC.Inventors: Tomoto Kawamura, Takeru Utsugi, Mitsuru Nagasawa, Hiromichi Yamakawa
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Patent number: 11428939Abstract: The present invention provides a light-guiding plate which is applicable to incident rays over a wide ray angular range and wide wavelength rage, and is able to suppress a decrease in optical efficiency. A light-guiding plate 200 having a light diffracting portion 1200 for diffracting incident light by a multiple-recorded hologram is configured such that, in the light diffracting portion, when light 1210 of a single wavelength having a certain angular range is incident, at least two or more outgoing rays 1220 are discretely emitted with a first angular space ?s, and the emitted rays each have a second angular range ?a, and the first angular space ?s is equal to or larger than the second angular range ?a.Type: GrantFiled: November 22, 2018Date of Patent: August 30, 2022Assignee: HITACHI-LG DATA STORAGE, INC.Inventors: Takeru Utsugi, Ryuji Ukai
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Publication number: 20210382309Abstract: An objective of the present disclosure is to provide an image display device capable of (1) improving light utilization efficiency in a waveguide direction, and (2) overcoming a trade-off relationship between FoV and an eye-box in a non-waveguide direction. In the image display device according to the present disclosure, the waveguide includes a first angle conversion region for angular conversion of first image light, and a second angle conversion region for angular conversion of second image light in a direction different from the first image light.Type: ApplicationFiled: May 24, 2021Publication date: December 9, 2021Inventors: Takeru UTSUGI, Tomoto KAWAMURA
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Publication number: 20210165224Abstract: The purpose of the present invention is to provide a waveguide, a method for manufacturing the waveguide, and an image display device using the same, which can be applied to incident light with a wide light angle range and a wide wavelength range, and can suppress a decrease in optical efficiency while maintaining high see-through performance. In order to achieve the above purpose, the waveguide has a light diffraction unit that diffracts the incident light by a multiplex-recorded hologram, wherein the light diffraction unit has at least two regions, and the light diffraction unit diffracts light of different wavelengths by the respective regions when certain parallel light ray is incident.Type: ApplicationFiled: July 2, 2019Publication date: June 3, 2021Inventor: Takeru UTSUGI
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Publication number: 20210055693Abstract: Provided is a waveguide having a light diffraction unit that diffracts incident light by a multiplex-recorded hologram, in which, in the light diffraction unit, a plurality of holograms having different angles with respect to an incident surface of the waveguide are formed, and when certain parallel light beams are incident, different wavelengths are diffracted by the plurality of holograms.Type: ApplicationFiled: May 14, 2020Publication date: February 25, 2021Inventors: Takeru UTSUGI, Hiromichi YAMAKAWA
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Publication number: 20210033864Abstract: It is an objective of this disclosure to protect a highly transparent hologram light guide plate from water vapor and ultraviolet ray, thereby suppressing deterioration of the hologram light guide plate even when employed in a head mount display used in outdoor environments. A hologram light guide plate according to this disclosure comprises a protection layer that protects a hologram layer and an intermediate layer that is placed between a glass layer and the protection layer, wherein the glass layer and the hologram layer form a transfer layer that transfers image light. The intermediate layer causes the image light to transfer only in the transfer layer in a section from an input area of the image light to an output area of the image light.Type: ApplicationFiled: June 16, 2020Publication date: February 4, 2021Inventors: Tomoto KAWAMURA, Takeru UTSUGI, Mitsuru NAGASAWA, Hiromichi YAMAKAWA
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Publication number: 20210003763Abstract: A hologram recording device for producing a hologram that diffracts incident light includes: a laser light source; a first half-wave plate that controls a polarization direction of a light beam emitted from the laser light source; a polarizing beam splitter that reflects S-polarized light to emit the S-polarized light as an “A” light ray and transmits P-polarized light to emit the P-polarized light as a “B” light ray with respect to the light beam passing through the first half-wave plate, and splits the light beam in two directions; a first wedge prism mirror that reflects the “A” light ray; a second half-wave plate that polarizes the “B” light ray into S-polarized light; a second wedge prism mirror that reflects the S-polarized light polarized by the second half-wave plate; and a recording medium irradiated with light rays reflected by the first wedge prism mirror and the second wedge prism mirror.Type: ApplicationFiled: April 15, 2020Publication date: January 7, 2021Inventors: Mayumi SASAKI, Takeru UTSUGI
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Publication number: 20200278546Abstract: The present invention provides a light-guiding plate which is applicable to incident rays over a wide ray angular range and wide wavelength rage, and is able to suppress a decrease in optical efficiency. A light-guiding plate 200 having a light diffracting portion 1200 for diffracting incident light by a multiple-recorded hologram is configured such that, in the light diffracting portion, when light 1210 of a single wavelength having a certain angular range is incident, at least two or more outgoing rays 1220 are discretely emitted with a first angular space ?s, and the emitted rays each have a second angular range ?a, and the first angular space ?s is equal to or larger than the second angular range ?a.Type: ApplicationFiled: November 22, 2018Publication date: September 3, 2020Inventors: Takeru UTSUGI, Ryuji UKAI
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Patent number: 10649118Abstract: This imaging device comprises: an image sensor which converts an optical image, captured by pixels arranged in an array on an imaging surface, into an image signal and outputs the image signal; a modulation unit which is provided to a light-receiving surface of the image sensor and modulates the intensity of light; and an image processing unit which carries out image processing on an output image output by the image sensor. The modulation unit has a grating substrate and a first grating pattern formed on a first surface of the grating substrate facing a surface of the image sensor near the light-receiving surface. The grating pattern is configured from a plurality of concentric circles having pitches which are inversely proportional to the distance from the origin point of at least one reference coordinate, the concentric circles do not overlap with each other within the grating pattern.Type: GrantFiled: May 17, 2017Date of Patent: May 12, 2020Assignee: Hitachi, Ltd.Inventors: Kazuyuki Tajima, Takeshi Shimano, Takeru Utsugi
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Publication number: 20190278006Abstract: This imaging device comprises: an image sensor which converts an optical image, captured by pixels arranged in an array on an imaging surface, into an image signal and outputs the image signal; a modulation unit which is provided to a light-receiving surface of the image sensor and modulates the intensity of light; and an image processing unit which carries out image processing on an output image output by the image sensor. The modulation unit has a grating substrate and a first grating pattern formed on a first surface of the grating substrate facing a surface of the image sensor near the light-receiving surface. The grating pattern is configured from a plurality of concentric circles having pitches which are inversely proportional to the distance from the origin point of at least one reference coordinate, the concentric circles do not overlap with each other within the grating pattern.Type: ApplicationFiled: May 17, 2017Publication date: September 12, 2019Inventors: Kazuyuki TAJIMA, Takeshi SHIMANO, Takeru UTSUGI
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Patent number: 9841731Abstract: To reduce an influence of stray light and stably record/reproduce high-quality data in holographic recording/reproduction. A holographic memory device includes an optical system that guides a reference beam to an optical information recording medium at a desired angle of incidence, a control part that controls the angle of incidence of the reference beam generated in the optical system, and a lens part that images the reference beam in a desired position of the optical information recording medium. Further, at least a first light beam at a first angle and a second light beam at a second angle different from the first angle are output from the optical element, and the optical element is provided so that the first light beam may propagate within an effective diameter of the lens part and the second light beam may propagate to an outside of the effective diameter of the lens part.Type: GrantFiled: August 3, 2015Date of Patent: December 12, 2017Assignee: Hitachi-LG Data Storage, Inc.Inventors: Takeru Utsugi, Kazuyoshi Yamazaki