Abstract: The present invention provides a detection method which allows specific defects that would occur on a wafer surface to be detected more reliably. A method of detecting a specific defect of the present invention includes the steps of: acquiring a light point map which is in-plane position information of a light point detected in a position corresponding to a defect on a surface of a wafer by irradiating the surface of the wafer with light (S101); specifying a determination region where a specific defect is expected to be formed and a reference region which is a given region other than the determination region in the light point map, and calculating a ratio of a light point density of the determination region to a light point density of the reference region (S102); and determining whether or not the specific defect is formed based on the calculated ratio (S103).

Abstract: The present invention provides a detection method which allows specific defects that would occur on a wafer surface to be detected more reliably. A method of detecting a specific defect of the present invention includes the steps of: acquiring a light point map which is in-plane position information of a light point detected in a position corresponding to a defect on a surface of a wafer by irradiating the surface of the wafer with light (S101); specifying a determination region where a specific defect is expected to be formed and a reference region which is a given region other than the determination region in the light point map, and calculating a ratio of a light point density of the determination region to a light point density of the reference region (S102); and determining whether or not the specific defect is formed based on the calculated ratio (S103).

Abstract: A storage device of a design data server stores geometrical data (e.g., dimensions, surface area, volume and the like) and the attribute data (e.g., product material name and the like) of the product. When an operator performs a CAD operation through a CAD system, cost factor data are automatically acquired from the geometrical data and the attribute data stored in the storage device of the design data server through an automatic acquisition feature of the CAD system. A cost of the product is computed based on the cost factor data and is displayed on the CAD terminal.

Abstract: A data transmission system includes a main controlling unit for producing pieces of address information, each piece of address information being indicative of a first address for a data source and a second address for a destination. The data transmission system further includes a plurality of component units assigned individual addresses, respectively, and a timing controlling unit sequentially supplying the pieces of address information to the component units at predetermined timings. In operation, one of the component units with the individual address matched with the first address serves as the data source and another component unit with the individual address matched with the second address serves as the destination communicating with the data source.