Patents by Inventor Takeshi Hagino

Takeshi Hagino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210343864
    Abstract: In a semiconductor device having a main cell region and a sense cell region, a main contact trench and a sense contact trench extend in one direction. When viewed from a stacking direction of a drift layer and a body layer, in the one direction, the main contact trench and a first impurity region disposed in the main cell region protrude more than a main upper electrode toward a sense upper electrode, and the sense contact trench and the first impurity region disposed in the sense cell region protrude more than the sense upper electrode toward the main upper electrode.
    Type: Application
    Filed: July 13, 2021
    Publication date: November 4, 2021
    Inventor: Takeshi HAGINO
  • Patent number: 10969355
    Abstract: A coefficient-of-thermal-expansion measuring device includes: a temperature detector detecting an object's temperature; an optical interferometer measuring an object's length using single-wavelength light; an actual data acquiring unit changing the object's temperature to temperatures and acquiring actual data of the length measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data for each actual data by setting an order of interference within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data, the data sets having different combinations of selection of the pieces of verification data; and a judging unit calculating a linear approximation function for each data set, and judging, using an evaluation index value based on differences of the verification data in each data set from the linear approximation function, applicability of e
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: April 6, 2021
    Assignee: MITUTOYO CORPORATION
    Inventors: Yuichiro Yokoyama, Takeshi Hagino
  • Patent number: 10900917
    Abstract: A coefficient-of-thermal-expansion measuring device includes temperature control device, optical interferometer, and control device including: an actual data acquiring unit sequentially changing an object's temperature and acquiring actual data measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data by setting an order of interference of the actual data within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data at each temperature; and a judging unit deriving approximation functions with different orders from each data set, determining an evaluation index value based on differences of verification data from each approximation function, selecting a candidate data set with the smallest evaluation index value for each approximation function, and determining whether the candidate data set is the same for each approximation function
    Type: Grant
    Filed: July 20, 2018
    Date of Patent: January 26, 2021
    Assignee: MITUTOYO CORPORATION
    Inventors: Yuichiro Yokoyama, Takeshi Hagino
  • Patent number: 10627204
    Abstract: A step gauge and a reference gauge block are placed in a temperature-controlled chamber in parallel with each other. A temperature of the step gauge is changed to a first temperature and a second temperature using a measurement-target temperature adjuster and the temperature-controlled chamber. A distance between a first surface and a second surface of the step gauge is relatively measured at each of the first and second temperatures with reference to a distance between a first reference surface and a second reference surface of the reference gauge block. A coefficient of thermal expansion of the measurement target is calculated from the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.
    Type: Grant
    Filed: November 30, 2017
    Date of Patent: April 21, 2020
    Assignee: MITUTOYO CORPORATION
    Inventors: Takeshi Hagino, Yuichiro Yokoyama
  • Publication number: 20200072591
    Abstract: A measurement point determination method for determining the number or an arrangement of measurement points for a measurement apparatus that performs measurement processing of a measurement item at a plurality of measurement points, the method comprises the steps of acquiring a minimum value and a maximum value of the number of measurement points, acquiring a target value of uncertainty for the measurement item of the measurement apparatus, estimating uncertainties when the measurement item is measured by the measurement apparatus using two or more of the numbers of measurement points between the minimum value and the maximum value of the number of measurement points, and determining the number of measurement points of the measurement apparatus on the basis of the target value and the estimated uncertainties.
    Type: Application
    Filed: September 3, 2019
    Publication date: March 5, 2020
    Applicant: MITUTOYO CORPORATION
    Inventors: Takeshi HAGINO, Yuto INOUE, Masayuki NARA
  • Patent number: 10444008
    Abstract: In a spherical shape measurement method for measuring a surface shape, a sphere to be measured is made freely rotatable. The partial spherical shape of each measurement area, which is established so as to have an area overlapping with another measurement area adjacent to each other, is measured at each rotation position, and the surface shape is measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on the shape of the overlapping area. In the state of detaching the sphere from the sphere hold mechanism to which the sphere is freely attachable and detachable, the sphere support table holds the sphere. The sphere is re-held at a different position, so that the shape of the entire sphere can be measured with high accuracy.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: October 15, 2019
    Assignee: MITUTOYO CORPORATION
    Inventors: Takeshi Hagino, Yuichiro Yokoyama, Yutaka Kuriyama
  • Patent number: 10352678
    Abstract: A measurement target and a reference gauge are placed in parallel in an inside of a temperature-controlled chamber. After an interior temperature of the temperature-controlled chamber is set at a first temperature, a relative measurement of a length from a first surface to a second surface of the measurement target is performed with reference to a length from a first reference surface to a second reference surface of the reference gauge. Then, the interior temperature of the temperature-controlled chamber is set at a second temperature and a relative measurement of the length from the first surface to the second surface is similarly performed with reference to the length from the first reference surface to the second reference surface. A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.
    Type: Grant
    Filed: September 21, 2016
    Date of Patent: July 16, 2019
    Assignee: MITUTOYO CORPORATION
    Inventors: Yuichiro Yokoyama, Takeshi Hagino, Yutaka Kuriyama
  • Publication number: 20190064089
    Abstract: A coefficient-of-thermal-expansion measuring device includes: a temperature detector detecting an object's temperature; an optical interferometer measuring an object's length using single-wavelength light; an actual data acquiring unit changing the object's temperature to temperatures and acquiring actual data of the length measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data for each actual data by setting an order of interference within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data, the data sets having different combinations of selection of the pieces of verification data; and a judging unit calculating a linear approximation function for each data set, and judging, using an evaluation index value based on differences of the verification data in each data set from the linear approximation function, applicability of e
    Type: Application
    Filed: July 20, 2018
    Publication date: February 28, 2019
    Applicant: MITUTOYO CORPORATION
    Inventors: Yuichiro YOKOYAMA, Takeshi HAGINO
  • Publication number: 20190064090
    Abstract: A coefficient-of-thermal-expansion measuring device includes temperature control device, optical interferometer, and control device including: an actual data acquiring unit sequentially changing an object's temperature and acquiring actual data measured by the optical interferometer at each temperature; a data set generating unit generating pieces of verification data by setting an order of interference of the actual data within a predetermined range, selecting one piece of verification data at each temperature, and generating data sets each containing the selected piece of verification data at each temperature; and a judging unit deriving approximation functions with different orders from each data set, determining an evaluation index value based on differences of verification data from each approximation function, selecting a candidate data set with the smallest evaluation index value for each approximation function, and determining whether the candidate data set is the same for each approximation function
    Type: Application
    Filed: July 20, 2018
    Publication date: February 28, 2019
    Applicant: MITUTOYO CORPORATION
    Inventors: Yuichiro YOKOYAMA, Takeshi HAGINO
  • Publication number: 20180180396
    Abstract: A step gauge and a reference gauge block are placed in a temperature-controlled chamber in parallel with each other. A temperature of the step gauge is changed to a first temperature and a second temperature using a measurement-target temperature adjuster and the temperature-controlled chamber. A distance between a first surface and a second surface of the step gauge is relatively measured at each of the first and second temperatures with reference to a distance between a first reference surface and a second reference surface of the reference gauge block. A coefficient of thermal expansion of the measurement target is calculated from the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.
    Type: Application
    Filed: November 30, 2017
    Publication date: June 28, 2018
    Applicant: MITUTOYO CORPORATION
    Inventors: Takeshi HAGINO, Yuichiro YOKOYAMA
  • Publication number: 20170089683
    Abstract: A measurement target and a reference gauge are placed in parallel in an inside of a temperature-controlled chamber. After an interior temperature of the temperature-controlled chamber is set at a first temperature, a relative measurement of a length from a first surface to a second surface of the measurement target is performed with reference to a length from a first reference surface to a second reference surface of the reference gauge. Then, the interior temperature of the temperature-controlled chamber is set at a second temperature and a relative measurement of the length from the first surface to the second surface is similarly performed with reference to the length from the first reference surface to the second reference surface. A CTE of the measurement target is calculated based on the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.
    Type: Application
    Filed: September 21, 2016
    Publication date: March 30, 2017
    Applicant: MITUTOYO CORPORATION
    Inventors: Yuichiro YOKOYAMA, Takeshi HAGINO, Yutaka KURIYAMA
  • Patent number: 9518944
    Abstract: A temperature-controlled bath capable of swiftly changing the temperature of a sample to a target temperature and maintaining the temperature of the sample at a fixed temperature after the temperature change is provided. A temperature-controlled bath includes a temperature changing means, a temperature-controlled chamber, a sample holding chamber, and connection cut-off means. The temperature changing means is disposed in the temperature-controlled chamber, and the temperature of the temperature-controlled chamber is adjusted by the temperature changing means. The sample holding chamber is separated from the temperature-controlled chamber by a thermally conducive wall, and contains a sample therein. The connection cut-off means change a connection between the temperature-controlled chamber and the sample holding chamber to a connected state or a cut-off state.
    Type: Grant
    Filed: June 4, 2014
    Date of Patent: December 13, 2016
    Assignee: MITUTOYO CORPORATION
    Inventors: Yuichiro Yokoyama, Takeshi Hagino
  • Patent number: 9347771
    Abstract: A partial spherical shape of each measurement area of a sphere to be measured, which is established so as to have an area overlapping with another measurement area adjacent to each other, is measured at each rotation position, and the surface shape is measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on the shape of the overlapping area. The position at which the sphere is measured is changed and re-held. A positional displacement between half parts of the sphere before and after re-holding, which is caused by an effect of an error owing to the re-holding, is separated into three rotational components. Magnitudes of the three rotational components are quantified by image correlation and the positional displacement corrected. Then, the stitching operation is performed to measure the entire part of the sphere surface.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: May 24, 2016
    Assignee: MITUTOYO CORPORATION
    Inventors: Takeshi Hagino, Yuichiro Yokoyama
  • Patent number: 9297631
    Abstract: A spherical-form measuring apparatus includes a turntable 5, a holding unit 10 for holding the sphere 20, and a probe 6 for measuring a contour of a sphere part 22 of the sphere 20. The holding unit 10 includes a base part 12, a vertical holding part 14 and an inclined holding part 16 which are placed at separate positions on the base part 12. The vertical holding part 14 holds the stem part 24 of the sphere 20 with it set in a direction perpendicular to the turntable 5. The inclined holding part 16 holds the stem part 24 with it set in a direction at an angle. The vertical and inclined holding part 14, 16 are disposed such that their axial lines meet at an intersection point P and such that the distance from the point P to the vertical holding part 14 agrees with the distance from the point P to the inclined holding part 16.
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: March 29, 2016
    Assignee: MITUTOYO CORPORATION
    Inventors: Takeshi Hagino, Yuichiro Yokoyama, Yutaka Kuriyama
  • Publication number: 20160018216
    Abstract: A partial spherical shape of each measurement area of a sphere to be measured, which is established so as to have an area overlapping with another measurement area adjacent to each other, is measured at each rotation position, and the surface shape is measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on the shape of the overlapping area. The position at which the sphere is measured is changed and re-held. A positional displacement between half parts of the sphere before and after re-holding, which is caused by an effect of an error owing to the re-holding, is separated into three rotational components. Magnitudes of the three rotational components are quantified by image correlation and the positional displacement corrected. Then, the stitching operation is performed to measure the entire part of the sphere surface.
    Type: Application
    Filed: July 15, 2015
    Publication date: January 21, 2016
    Inventors: Takeshi Hagino, Yuichiro Yokoyama
  • Publication number: 20160018215
    Abstract: In a spherical shape measurement method for measuring a surface shape, a sphere to be measured is made freely rotatable. The partial spherical shape of each measurement area, which is established so as to have an area overlapping with another measurement area adjacent to each other, is measured at each rotation position, and the surface shape is measured by joining the partial spherical shapes of the measurement areas by a stitching operation based on the shape of the overlapping area. In the state of detaching the sphere from the sphere hold mechanism to which the sphere is freely attachable and detachable, the sphere support table holds the sphere. The sphere is re-held at a different position, so that the shape of the entire sphere can be measured with high accuracy.
    Type: Application
    Filed: July 15, 2015
    Publication date: January 21, 2016
    Inventors: Takeshi Hagino, Yuichiro Yokoyama, Yutaka Kuriyama
  • Patent number: 9180313
    Abstract: There is provided a range shifter which includes a transmissive plate whose thickness has been adjusted depending on a setup value of an amount of energy to be attenuated, and a holder portion that holds the transmissive plate, wherein the thickness of the transmissive plate is adjusted to be a thickness equivalent to an attenuation amount lower than the setup value by a predetermined rate thereof; and wherein, a superimposing mechanism capable of releasably superimposing an adjustment sheet over the transmissive plate, is provided to at least one of the transmissive plate and the holder portion, the adjustment sheet being adjusted to have a thickness equal to or less than a thickness equivalent to a two-fold attenuation amount of the predetermined rate.
    Type: Grant
    Filed: February 22, 2012
    Date of Patent: November 10, 2015
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Hirohide Yamamoto, Takeshi Hagino, Hiromitsu Inoue
  • Publication number: 20150031933
    Abstract: There is provided a range shifter which includes a transmissive plate whose thickness has been adjusted depending on a setup value of an amount of energy to be attenuated, and a holder portion that holds the transmissive plate, wherein the thickness of the transmissive plate is adjusted to be a thickness equivalent to an attenuation amount lower than the setup value by a predetermined rate thereof; and wherein, a superimposing mechanism capable of releasably superimposing an adjustment sheet over the transmissive plate, is provided to at least one of the transmissive plate and the holder portion, the adjustment sheet being adjusted to have a thickness equal to or less than a thickness equivalent to a two-fold attenuation amount of the predetermined rate.
    Type: Application
    Filed: February 22, 2012
    Publication date: January 29, 2015
    Applicant: Mitsubishi Electric Corporation
    Inventors: Hirohide Yamamoto, Takeshi Hagino, Hiromitsu Inoue
  • Publication number: 20150003494
    Abstract: A temperature-controlled bath capable of swiftly changing the temperature of a sample to a target temperature and maintaining the temperature of the sample at a fixed temperature after the temperature change is provided. A temperature-controlled bath includes a temperature changing means, a temperature-controlled chamber, a sample holding chamber, and connection cut-off means. The temperature changing means is disposed in the temperature-controlled chamber, and the temperature of the temperature-controlled chamber is adjusted by the temperature changing means. The sample holding chamber is separated from the temperature-controlled chamber by a thermally conducive wall, and contains a sample therein. The connection cut-off means change a connection between the temperature-controlled chamber and the sample holding chamber to a connected state or a cut-off state.
    Type: Application
    Filed: June 4, 2014
    Publication date: January 1, 2015
    Applicant: MITUTOYO CORPORATION
    Inventors: Yuichiro YOKOYAMA, Takeshi HAGINO
  • Patent number: 8879068
    Abstract: An abscissa calibration jig of a laser interference measuring apparatus, includes: an image projection unit configured to project an image with a marker; a first support mechanism configured to rotatably support the image projection unit around a first rotation axis passing a predetermined rotation center; and a second support mechanism configured to rotatably support the first support mechanism around a second rotation axis crossing the first rotation axis at the rotation center.
    Type: Grant
    Filed: July 20, 2012
    Date of Patent: November 4, 2014
    Assignee: Mitutoyo Corporation
    Inventors: Takeshi Hagino, Yuichiro Yokoyama, Yutaka Kuriyama