Abstract: An EL display device in which the adhesion between a substrate and a sealing film is increased and in which the occurrence of cracks in the sealing film is reduced is provided. A lower inorganic film (31) has a multilayer structure including a first inorganic layer (34), which is in contact with the substrate and an EL element, and a second inorganic layer (35). The absolute value of the film stress of the first inorganic layer (34) is less than the absolute value of the film stress of the second inorganic layer (35), and the film thickness of the first inorganic layer (34) is less than the film thickness of the second inorganic layer (35).

Abstract: A mask comprises a mask substrate having a protruding section in an opening end surface of an opening, having an acute angle defined by ?1 and ?2 of no more than 43°, and having a height from a film-formation surface on the substrate to a tip section of the protruding section greater than the thickness of the film to be formed on the film-formation surface.

Abstract: An organic EL display device (1) includes: a plurality of organic EL elements (30) each including a lower electrode (31), an EL layer (32), and an upper portion (33); and a sealing layer (40) covering the plurality of organic EL elements (30), the organic EL display device (1) having, in a non-light-emitting portion (5) of a display region (2), at least one contact hole (34) extending through at least the upper electrode (33) and the EL layer (32) and allowing the sealing layer (40) to be in contact with a surface of a layer below the organic EL layer (32).

Abstract: The present invention provides a cleaning method by which it is possible to prevent deformation of a film formation mask (31). While the film formation mask (31) disposed between a shower head (4) and a susceptor (3) within a chamber (2) is cooled, a cleaning gas made into plasma, which cleaning gas reacts with a reaction product (32) deposited on a surface of the film formation mask (31), is blown on the film formation mask (31).

Abstract: Provided is an organic EL display device (electroluminescence device) including a TFT substrate (substrate) and an organic EL element (electroluminescence device) provided on the TFT substrate, wherein the organic EL display device includes a sealing layer that seals the organic EL element. The sealing layer is provided with a first, a second, and a third sealing film that are sequentially stacked from the organic EL element side, the first and third sealing films are each formed of an inorganic film, and the second sealing film is formed of an octamethylcyclotetrasiloxane film.

Abstract: Provided is a TFT substrate (substrate); a second electrode (vapor-deposited membrane) that is formed on the TFT substrate and includes a protruding portion; and a sealing membrane provided so as to cover the second electrode, wherein, when ? represents an absolute value of a stress of the sealing membrane, t represents a thickness of the sealing membrane, and P represents a sum of a product of an oblique side length and an oblique side slope in a minute region on an oblique side of the protruding portion, a value of an index N expressed by the expression (N=?·t·P) is less than or equal to 935 MPa·?m2.

Abstract: Disclosed is an organic EL display device which includes: a first resin substrate 10a; a basecoat film 11a provided on the first resin substrate 10a; an organic EL element 18 provided over the basecoat film 11a, a first sealing film 19 covering the organic EL element 18; a second resin substrate 10b facing the first resin substrate 10a, and provided closer to the first sealing film 19 with an adhesive layer 21 interposed between the second resin substrate 10b and the first sealing film 19; and a second sealing film 23a provided outside the first sealing film 19 and enhancing adhesion between the basecoat film 11a and a stack including the first sealing film 19 and the adhesive layer 21.

Abstract: An organic EL display device 1 includes: an organic EL element 4 provided above an element substrate 10; and a sealing film 2 formed above the element substrate 10 so as to cover the organic EL element 4, and made of silicon nitride (SiNx). The sealing film 2 is comprised of a first sealing layer 25, a second sealing layer 26 provided on the surface of the first sealing layer 25, and a third sealing layer 27 provided on the surface of the second sealing layer 26. This organic EL display device 1 is characterized in that a ratio of an SiN-group content to an NH-group content is higher in the first and third sealing layers 25 and 27 than in the second sealing layer 26 based on the absorption area ratio determined by FT-IR measurement.

Abstract: An organic EL display device including a TFT substrate (substrate) and an organic EL element (electroluminescent element) that is provided on the TFT substrate includes a sealing layer that seals the organic EL element. The sealing layer is composed of a laminated structure that is constituted by an organic film and first and second inorganic films. Recessed/protruding portions are provided on surfaces of the organic film and the first and second inorganic films.

Abstract: An organic EL display device (electroluminescence device) including a TFT substrate (substrate), an organic EL element (electroluminescence element) disposed on the TFT substrate, a first inorganic film covering the organic EL element, at least one protruding body having a frame shape, the at least one protruding body being configured by an organic film and surrounding the electroluminescence element on the first inorganic film, a second inorganic film covering the first inorganic film and the at least one protruding body, and a leveled film configured by an organic film and provided on the second inorganic film.

Abstract: An organic EL display 1 includes a sealing film 2 provided on a plastic substrate 10 to cover an organic EL element 4. The sealing film 2 includes a first sealing layer 25 on a surface of the plastic substrate 10, three stress relief layers 26, 27, and 28 on a surface of the first sealing layer 25, and a second sealing layer 29 on a surface of the stress relief layer 28. The stress relief layers 26, 27, and 28 each have a higher coefficient of thermal expansion than the first and second sealing layers 25 and 29. The stress relief layer 27 interposed between the stress relief layers 26 and 28 has a higher coefficient of thermal expansion than the stress relief layers 26 and 28.

Abstract: The present invention includes a frame-shaped sealing material, a filling layer, and a support. The frame-shaped sealing material is provided between a TFT substrate and a counter substrate, and is configured to seal an organic EL element (electroluminescent element) along with the TFT substrate and the counter substrate. The filling layer is composed of a liquid filler, and is filled in the space between the counter substrate, a sealing film, and the sealing material. The support is located inside the sealing material and between the TFT substrate and the counter substrate, and also supports the TFT substrate and the counter substrate.

Abstract: A mask comprises a mask substrate having a protruding section in an opening end surface of an opening, having an acute angle defined by ?1 and ?2 of no more than 43°, and having a height from a film-formation surface on the substrate to a tip section of the protruding section greater than the thickness of the film to be formed on the film-formation surface.

Abstract: A the organic EL display 1 includes: a first substrate 10; an organic EL element 4 provided above the first substrate 10; and a multilayer sealing film 2 provided above the first substrate 10 to cover the organic EL element 4, and including a barrier layer and a buffer layer lower in hardness than the barrier layer. The organic EL element covered with the multilayer sealing film includes a protrusion, and a relationship (d/h)<2 holds where h is a height of the protrusion directly below the buffer layer and d is a thickness of the buffer layer.

Abstract: An organic EL display device (electroluminescent device) equipped with an organic EL element (electroluminescent element) includes an opposing substrate that is provided on an organic EL element side and that opposes a TFT substrate (substrate), a desiccant that is provided between the TFT substrate and the opposing substrate in such a manner as to cover the organic EL element, a frame-shaped seal material that seals the organic EL element between the TFT substrate and the opposing substrate, and a holding member for holding the desiccant, the holding member being provided on the opposing substrate side inside the seal material.

Abstract: In an organic EL display device (electroluminescent device) including an organic EL element (electroluminescent element), a sealing film is provided to seal the organic EL element. The sealing film includes a first inorganic layer, a first organic layer, a second inorganic layer, a second organic layer, and a third inorganic layer (uppermost inorganic layer), which are arranged in this order. The first and second organic layers are formed so that the thickness of the end portions gradually decreases from the thickness of the central portions. The third inorganic layer is provided to cover the end portions of each of the first inorganic layer, the first organic layer, the second inorganic layer, and the second organic layer.

Abstract: An organic EL device includes a TFT substrate 1, a first electrode 5 provided on the TFT substrate 1, an organic EL layer 6 provided on the first electrode 5, a second electrode 7 provided on the organic EL layer 6, and a sealing film 10 covering the second electrode 7. The TFT substrate 1 is provided thereon with upward projections 11 and 12. The upward projections 11 and 12 are covered with the sealing film 10.

Abstract: In an organic EL display device that includes a TFT substrate (substrate) and an organic EL element (electroluminescent element) provided on the TFT substrate, a sealing film is provided that seals the organic EL element. The sealing film includes one or more layers of inorganic film. The thickness of a peripheral portion of at least one layer of inorganic film among the one or more layers of inorganic film is made thick. Further, a liquid repellent layer is provided covering the sealing film.

Abstract: An organic EL display device 1 that includes a TFT substrate (substrate) 2 and an organic EL element (electroluminescent element) 4 provided on the TFT substrate 2 includes a sealing film 14 that seals the organic EL element 4. The sealing film 14 has a layered structure composed of an organic layer 14b and inorganic layers 14a, 14c. At least a peripheral portion 14b2 of the organic layer 14b has a lower carbon content than a central portion 14b1 of the organic layer 14b.

Abstract: In an organic EL display device (electroluminescence device) including a flexible TFT substrate (substrate), an organic EL element (electroluminescence element) provided on the TFT substrate, and a sealing film that seals the organic EL element, a foldable bend portion is provided. The film thickness of the sealing film is reduced at the bend portion.