Abstract: A method for fabricating a dielectric device including a capacitor, a pyroelectric infrared detector, and the like is disclosed. The method comprises the steps of etching a dielectric substance film formed on a substrate to form a predetermined pattern with an etchant comprised of hydrofluoric acid and an oxidizing agent, and removing residues resulting from the etching by treating the etched layer with a first treating solution containing a reducing agent and subsequently with a second treating solution containing an acid.

Abstract: A small and highly sensitive capacitance type pressure sensor is obtained by filling an alkali halide material such as KBr into a through-hole, forming a conductive thin film on the surface, and dissolving and removing the alkali halide material. An insulating plate disposed with a through-hole in the thickness direction is filled with a molten alkali halide material such as KBr. After forming a conductive thin film on the surface of the alkali halide material filled into the through-hole and the vicinity thereof, the alkali halide material is dissolved by water and removed. In this way, a diaphragm is made of the through-hole and the conductive thin film. A curve of the diaphragm caused by a pressure difference between the both faces of the conductive thin film is detected as a capacitance change between the conductive thin film and the electrode layer.

Abstract: A thermal recording apparatus records information on a thermal recording sheet, the thermal recording sheet having a thermal characteristic by which the information is recorded through heating the thermal recording sheet to a first temperature and information which has been recorded on the thermal recording sheet is erased therefrom by heating the thermal recording sheet to a second temperature. The thermal recording apparatus includes, a thermal head for heating the thermal recording sheet in a pattern, a recording controller for driving the thermal head so that the thermal recording sheet is heated to the first temperature in a pattern corresponding to the information to be recorded, and an erasing controller for supplying thermal energy to the thermal recording sheet on which information has been recorded by using the thermal head so that the thermal recording sheet is heated to the second temperature.

Abstract: A method whereby perovskite type oxide dielectric thin films with ABO.sub.3 structure are able to be formed with such features as good stability, uniformity, reproducibility, or the like, with high through-put by having a deposition process, wherein the thin films are deposited on a substrate, and a stabilization process, where no deposition of the thin films takes place, repeated alternatingly while the substrate temperature being kept near the temperature at which perovskite type oxide dielectric thin films are formed. Also, by employing (i) a processing method wherein a decomposing excitation of a reactive gas due to plasma takes place on or near the deposition surface in a gaseous atmosphere comprising a gas that reacts with the elements composing the thin films, (ii) a processing method wherein an oxidation reaction takes place on the deposition surface in a gaseous atmosphere comprising at least ozone (O.sub.

Abstract: A method whereby perovskite type oxide dielectric thin films with ABO.sub.3 structure are able to be formed with such features as good stability, uniformity, reproducibility, or the like, with high through-put by having a deposition process, wherein the thin films are deposited on a substrate, and a stabilization process, where no deposition of the thin films takes place, repeated alternatingly while the substrate temperature being kept near the temperature at which perovskite type oxide dielectric thin films are formed. Also, by employing (i) a processing method wherein a decomposing excitation of a reactive gas due to plasma takes place on or near the deposition surface in a gaseous atmosphere comprising a gas that reacts with the elements composing the thin films, (ii) a processing method wherein an oxidation reaction takes place on the deposition surface in a gaseous atmosphere comprising at least ozone (O.sub.

Abstract: A thin film sensor element includes a sensor holding substrate having an opening part and a multilayer film adhered thereon at least consisting of an electrode film A, an electrode film B having (100) plane orientation, and a piezoelectic dielectric oxide film present between the electrode film A and the electrode film B. As a result, a thin film sensor element which is small, light, highly accurate, and inexpensive can be attained which can be used for an acceleration sensor element and a pyroelectric infrared sensor element. On the surface of a flat plate KBr substrate, a rock-salt crystal structure oxide of a conductive NiO is formed by a plasma MOCVD method whose vertical direction is crystal-oriented to <100> direction against the substrate surface. By means of a sputtering method, a PZT film is formed by an epitaxial growth on that surface, and a Ni-Cr electrode film is formed thereon.

Abstract: A decurling device wherein paper is transported from a roll while being decurled by a decurling roller. A controller controls the decurling by temporarily stopping rotation of the decurling roller. Particular embodiments include provision of a pressing plate pressing the paper toward the decurling roller and control of the roller in accordance with curl of the paper by detection of diameter of the roll and by detection of path the paper follows during feeding.

Abstract: A small and highly sensitive capacitance type pressure sensor is obtained by filling an alkali halide material such as KBr into a through-hole, forming a conductive thin film on the surface, and dissolving and removing the alkali halide material. An insulating plate disposed with a through-hole in the thickness direction is filled with a molten alkali halide material such as KBr. After forming a conductive thin film on the surface of the alkali halide material filled into the through-hole and the vicinity thereof, the alkali halide material is dissolved by water and removed. In this way, a diaphragm is made of the through-hole and the conductive thin film. A curve of the diaphragm caused by a pressure difference between the both faces of the conductive thin film is detected as a capacitance change between the conductive thin film and the electrode layer.

Abstract: A dielectric film is provided which may be used as an insulating layer of a capacitor of a semiconductor DRAM. The dielectric film is comprised of three elements, namely, titanium, silicon and oxygen. The dielectric film has a high dielectric constant and a small leakage current. The film is manufactured from the raw materials of titanium chloride and silicon hydride, and at least one of O.sub.2, N.sub.2 O, and a mixture of O.sub.2 and N.sub.2 O by plasma-decomposing the raw materials with the application of a strong electric field.

Abstract: A low vapor-pressure material feeding apparatus comprises a bubbler (4, 5), accommodating a low vapor-pressure material (6) therein, for bubbling the low vapor-pressure material (6) with an inert gas fed from an inert gas container (3). A bifurcated gas feeding passage (51, 8) is provided between the gas container (3) and a vacuum chamber (50). One branch passage directly introduces an inert gas into the vacuum chamber (50), and the other branch passage introduces an inert gas into the bubbler (4, 5). A gas mixture of a vaporized low vapor-pressure material (6) and the inert gas, is supplied from the bubbler (4, 5) to a vacuum chamber (50). A gas flow meter (7) detects a flow amount of the gas mixture. On a basis of a gas flow amount detected by the gas flow meter (7), an inert gas controller (10) adjusts a feeding amount of inert gas so that a total amount of an inert gas introduced directly into said vacuum chamber (50) and an inert gas introduced into the bubbler (4, 5) is kept at a constant value.

Abstract: A device incorporated in a facsimile transceiver or similar recording apparatus of the type using a roll of paper for removing the curl of the paper. The device has a regular transport path, an uncurl transport path, and a separator fixed in place at a position where the two transport paths branch off. The separator steers the paper to either of the two transport paths on the basis of the height of a curl existing at the leading edge of the paper. The separator has a generally triangular configuration which has an apex at the center in the widthwise direction perpendicular to an intended direction of paper transport and inclines from the apex toward opposite ends. As a result, the paper is admitted into the regular transport path or the uncurl transport path little by little from part of the leading edge thereof.

Abstract: A document scanning apparatus includes an image signal part for generating a number of successive image signals from a document which is transported along a transport path between a pair of feeding rollers and a pair of ejection rollers, a first detection part for detecting a position of the document in the transport path where a document transport is disordered when a front edge of the document being transported comes in contact with the ejection rollers, a second detection part for detecting a position of the document in the transport path where the document transport is disordered when a rear edge of the document being transported separates from the feeding rollers, and a signal correction part for correcting a defective image signal when at least one of the first detection part and the second detection part detects the position of the document where the document transport is disordered, the defective image signal being corrected through a prescribed signal correction which is carried out for a number of i

Abstract: An apparatus for producing a thin film of tantalum oxide comprising a vacuum chamber with a heater, an ampule of an organic tantalum compound, a container of a carrier gas, a container of an oxygen-containing gas, and a three way valve having a liquid inlet, a gas inlet and an outlet, the liquid inlet being connected with the ampule via a liquid flow controller, the gas inlet being connected with the containers of gas, the outlet being connected with the vacuum chamber, whereby the tantalum compound vaporized at the three way valve can obtain constant supply by the flow controller regardless of the ambient temperature, resulting in the tantalum oxide film of uniform quality.

Abstract: An optical reader includes a transport mechanism for transporting a document in a document transport direction. The transport mechanism includes a lower guide plate and an upper guide plate opposite to the lower guide plate so as to form a gap through which the document is transported. The lower guide plate has an opening window. A light source obliquely projects light along a projection optical axis onto the document through the opening window. A read element receives light reflected by the document and outputting an electrical signal corresponding to the received light. The read element has a read optical axis along which the light reflected by the document comes. The read optical axis and the projection optical axis intersect on the side of the upper guide plate outside of the gap.

Abstract: A manufacturing method for the thin film superconductor is disclosed in which photons having energies larger than ultraviolet rays are irradiated to the thin film superconductor on or after formation of the thin film. Further, manufacturing methods for superconductive magnetic memory, Josephson device and superconductive transistor are disclosed.

Abstract: A thermal recording apparatus for example for use in a facsimile machine includes a thermal printhead provided with a plurality of heat-producing elements arranged in the form of a single array and a platen roller which is pressed against the thermal printhead to keep a sheet of recording paper pressed against the array of heat-producing elements so that a heat pattern defined by the array of heat-producing elements is transferred to the sheet of recording paper efficiently. The platen roller is provided to be movable between a recording position where the platen roller is located separated away from the heat-producing elements so as to allow the sheet of recording paper to be separated away from the heat-producing elements and a stand-by position where the platen roller is located and adjacent to the heat-producing elements to keep the sheet of recording paper pressed against the heat-producing elements.

Abstract: An image reading and recording apparatus includes a read/write head in which a reading head and a recording head are assembled into a unitary head body, a sheet feeding mechanism for feeding a sheet in engagement with the head body at a predetermined engagement position, wherein the reading head and the recording head are provided respectively on the head body such that a distance between the reading head and the engagement position is set larger than a distance between the recording head and the engagement position.

Abstract: A superconductor structure of very high performance is realized by forming a crystalline coating on a substrate of semiconductor, etc. and epitaxially depositing a crystalline superconductor film of good quality on this crystalline coating. Especially, CaF.sub.2 crystal and ZrO.sub.2 crystal of CaF.sub.2 crystal structure have latice constants which match well with the substrate such as Si, GaAs, etc. and the superconductor. The crystalline coating may be a perovskite material such as BaTiO.sub.3 when the superconductor is a perovskite material.

Abstract: An input/output or reading/recording device includes an optical reader and a thermal recorder which are both fixedly mounted on a head unit integrally as spaced apart from each other, with the optical reader upstream of the recorder. A feed roller, which is driven to rotate, is pressed against the head unit and it is positioned to be pressed against the optical reader during a reading mode and against the recorder during a recording mode. Depending on the current mode of operation, an original document to be read or a recording medium to be recorded is passed between the head unit and the feed roller. Since the optical reader is located upstream of the recorder, when the device is operating in the recording mode, the optical reader can be activated at least partly to monitor the recording medium during the recording mode of operation.

Abstract: The facsimile transmission and reception apparatus comprises transportation means for originals and a recording paper transporation means, which are for transporting and positioning the original document and the recording paper substantially in the same width range normal to the movement direction of the original document and the recording paper, and the original document inserted, with an image information bearing side up, is transported substantially vertically from an upper position to a lower position.