Abstract: A piezoelectric valve stably supplies gas even for a long gas ejection time, with a high responsivity to opening the valve, is provided. The piezoelectric valve, including a gas-pressure-chamber for receiving a compressed gas supplied from outside, a gas-discharge-channel through which the compressed gas is discharged from the gas-pressure-chamber, comprises: a valve body disposed in the gas-pressure-chamber and opens/closes the gas-discharge-channel; a piezoelectric element for producing a driving force to move the valve body as a displacement; a displacement-enlarging-mechanism for enlarging the displacement of the piezoelectric element to act on the valve body; and a driving unit having a signal-generating-unit for generating a signal comprising a pre-pulse and a main pulse and provides the signal generated by the signal-generating-unit to a driving circuit as an input signal to apply a driving voltage to the piezoelectric element to make the piezoelectric element expand and drive the valve body open.

Abstract: A piezoelectric valve whose assembly work can be efficiently performed. A piezoelectric valve according to this invention includes a valve main body having a gas pressure chamber which receives compressed gas supplied from the outside, a plate which is disposed inside the valve main body and is fixed to the valve main body, and actuators each of which has a valve element, a piezoelectric element generating, in the form of a displacement, driving force required for operation of the valve element, and a displacement magnification mechanism for magnifying a displacement of the piezoelectric element and causing the magnified displacement to act on the valve element, are fixed to each of two surfaces of the plate, and are disposed inside the valve main body together with the plate.

Abstract: A piezoelectric valve stably supplies gas even for a long gas ejection time, with a high responsivity to opening the valve, is provided. The piezoelectric valve, including a gas-pressure-chamber for receiving a compressed gas supplied from outside, a gas-discharge-channel through which the compressed gas is discharged from the gas-pressure-chamber, comprises: a valve body disposed in the gas-pressure-chamber and opens/closes the gas-discharge-channel; a piezoelectric element for producing a driving force to move the valve body as a displacement; a displacement-enlarging-mechanism for enlarging the displacement of the piezoelectric element to act on the valve body; and a driving unit having a signal-generating-unit for generating a signal comprising a pre-pulse and a main pulse and provides the signal generated by the signal-generating-unit to a driving circuit as an input signal to apply a driving voltage to the piezoelectric element to make the piezoelectric element expand and drive the valve body open.

Abstract: A piezoelectric valve whose assembly work can be efficiently performed. A piezoelectric valve according to this invention includes a valve main body having a gas pressure chamber which receives compressed gas supplied from the outside, a plate which is disposed inside the valve main body and is fixed to the valve main body, and actuators each of which has a valve element, a piezoelectric element generating, in the form of a displacement, driving force required for operation of the valve element, and a displacement magnification mechanism for magnifying a displacement of the piezoelectric element and causing the magnified displacement to act on the valve element, are fixed to each of two surfaces of the plate, and are disposed inside the valve main body together with the plate.

Abstract: An inner tank 6 is arranged on a partition plate 2 in a main tank 1, and a spray nozzle 8 is provided in a top wall of the inner tank 6. A mist separator 33 is formed by a helical tube wound around an outer wall of the inner tank 6. An upper port 33a of the mist separator 33 is connected to a connector block 32 provided at an upper portion of the inner tank 6 and a lower port 33b is positioned at a lower portion of a main mist chamber 5. Smaller particles in a primary mist produced by the spray nozzle 8 float in an upper portion of an inner mist chamber 7. Larger particles in the primary mist descend toward a lower portion of the inner mist chamber 7, and these particles adhere onto an inner wall of the inner tank 6 to form a secondary mist consisting of the smaller particles.