Abstract: The apparatus includes a reticle stage for carrying a reticle and a wafer stage having an X-stage for carrying a wafer. The reticle is moved in -X-direction by means of the reticle stage while the wafer is moved in +X-direction by means of the X-stage for scanning, so that the image of the pattern on the reticle is serially transferred and printed onto the wafer. A laser interferometer supplies i) to a velocity calculation unit, measured values representing the X-coordinate of the reticle stage as periodically measured with a predetermined period and ii) to a frequency divider, a sampling timing signal indicating each time the measured value has become definite. The frequency divider outputs a calculation trigger signal.

Abstract: A superconducting tunnel junction radiation sensing device includes first and second superconductor electrodes and a tunnel barrier layer interposed therebetween. The tunnel barrier layer is made up of a thin-wall portion and a thick-wall portion each formed of a semiconductor or an insulator, and each having opposite surfaces respectively contacting the first and second superconductor electrodes, and each extending adjacent each other in a same horizontal plane between the first and second electrodes. The thick-wall portion has a vertical thickness which is at least twice that of the thin-wall portion. Furthermore, the thickness of the thin-wall portion is such that a tunnel effect is enabled therethrough form the first electrode to the second electrode, and the thickness of the thick-wall portion is such that a tunnel effect is substantially prohibited therethrough from the first electrode to the second electrode.