Abstract: In a two-dimensional conveyance line employing an electromagnetic conveyance technique, carriers are conveyed in consideration of the length of a group of stagnated carriers, so as to reduce idle positions and ensure conveyance efficiency of a specimen inspection system and maximize the number of carriers conveyed simultaneously. Current is supplied to a winding of an electromagnetic circuit and an electromagnetic force is generated between the winding and a carrier with a magnet that holds a test tube to move the carrier. The processing efficiency of a specimen inspection system is improved by changing the current of the electromagnetic circuit to change a conveyance speed of the carrier to which the specimen sample is mounted, and by shortening the conveyance time, and reducing the conveyance speed of the carrier and increasing the number of carriers that are conveyed simultaneously as an alternative to detouring the carrier during congestion.

Abstract: Provided are a specimen transport device and a specimen transport carrier capable of preventing shake of a specimen as compared with related art without limiting a transport path in electromagnetic transport. A specimen carrier 100 includes two or more gripping portions 101 configured to support specimen containers 150 having different diameters from different directions, and a transport surface 201 on which the specimen carrier 100 is to slide. The specimen carrier 100 includes a direction adjustment unit configured to adjust a traveling direction of the specimen carrier 100 when the specimen carrier 100 slides on a surface of the transport surface 201, such that a direction of a force with which one of the two or more gripping portions 101 grips the specimen container 150 is opposite to the traveling direction of the specimen carrier 100.

Abstract: A sample examination automation system includes a conveyance line, a large-scale sample carrier buffer, an analyzer coupling unit, and a conveyance managing unit. The conveyance line conveys a sample carrier. One or a plurality of sample containers is mountable on the sample carrier. The large-scale sample carrier buffer stores a plurality of the sample carriers. The analyzer coupling unit, which is couplable to an analyzer, incorporates a sample carrier sub-buffer capable of storing the sample carriers by an amount smaller than an amount of the large-scale sample carrier buffer. The conveyance managing unit has a function of controlling a sample carrier conveyance destination. The conveyance managing unit is configured to determine an amount of the sample carriers supplied to the sample carrier sub-buffer via the large-scale sample carrier buffer according to a storage situation of the sample carriers in the sample carrier sub-buffer.

Abstract: A management unit 101 for integrally managing a sample conveyance system 100 generates conveyance path information for conveying a holder 30 on the basis of conditions of conveyance tiles 401 detected by control drivers 301, 302, 303, 304 that perform detection of conditions and driving of the conveyance tiles 401, and control units 201, 202, 203 that manage operations of the plurality of conveyance tiles 401 and that can move the holder 30 in a planar two-dimensional direction, generate a conveyance path of the holder 30 on the basis of the conveyance path information, generate command signals for the conveyance tiles 401, and output the signals to the control drivers 301, 302, 303, 304.

Abstract: An automated sample inspection system is provided with a conveyance line for conveying sample carriers; an empty sample carrier line for conveying empty sample carriers; and a buffer line for temporarily holding empty sample carriers supplied from the empty sample carrier line to the conveyance line. According to the depletion status of the buffer line of each processing system, and the depletion status of other processing systems adjacent to each processing system, the number of empty sample carriers to be conveyed from the empty sample carrier line to the buffer line of each processing system, and the number of empty sample carriers to be conveyed from the empty sample carrier line of each processing system to the empty sample carrier line of another adjacent processing system are determined. Consequently, delays in the processes in the system can be suppressed due to the suppression of the depletion of sample carriers.

Abstract: A sample examination automation system that allows reducing a delay of conveyance due to a stop of supply of empty sample carriers without disposing a conveyance line for empty sample carrier is provided. The sample examination automation system includes a conveyance line, a large-scale sample carrier buffer, an analyzer coupling unit, and a conveyance managing unit. The conveyance line conveys a sample carrier. One or a plurality of sample containers is mountable on the sample carrier. The large-scale sample carrier buffer stores a plurality of the sample carriers. The analyzer coupling unit is couplable to an analyzer. The analyzer coupling unit incorporates a sample carrier sub-buffer. The sample carrier sub-buffer is capable of storing the sample carriers by an amount smaller than an amount of the large-scale sample carrier buffer. The conveyance managing unit has a function of controlling a sample carrier conveyance destination.

Abstract: An automated sample inspection system is provided with a conveyance line for conveying sample carriers; an empty sample carrier line for conveying empty sample carriers; and a buffer line for temporarily holding empty sample carriers supplied from the empty sample carrier line to the conveyance line. According to the depletion status of the buffer line of each processing system, and the depletion status of other processing systems adjacent to each processing system, the number of empty sample carriers to be conveyed from the empty sample carrier line to the buffer line of each processing system, and the number of empty sample carriers to be conveyed from the empty sample carrier line of each processing system to the empty sample carrier line of another adjacent processing system are determined. Consequently, delays in the processes in the system can be suppressed due to the suppression of the depletion of sample carriers.

Abstract: The present invention addresses the problem of inefficient utilization in a specimen pre-processing connection system due to integrated operation of a portion for connecting with pre-processing and a portion for connecting with an automated analysis system. The specific structure of the present invention contributes to providing a highly efficient system by causing a function for connecting to pre-processing and receiving a specimen from a pre-processing system and a function for connecting to an automated analysis system and transferring a specimen to the automated analysis system to each operate independently in a single unit, so that the functions do not affect each other during reset processing, and making it possible for either function to operate alone.

Abstract: The present invention addresses the problem of inefficient utilization in a specimen pre-processing connection system due to integrated operation of a portion for connecting with pre-processing and a portion for connecting with an automated analysis system. The specific structure of the present invention contributes to providing a highly efficient system by causing a function for connecting to pre-processing and receiving a specimen from a pre-processing system and a function for connecting to an automated analysis system and transferring a specimen to the automated analysis system to each operate independently in a single unit, so that the functions do not affect each other during reset processing, and making it possible for either function to operate alone.

Abstract: Continuous web feed is provided by using an apparatus for unwinding a web on a continuous basis by means of an automatic web splicing apparatus. An arm supporting a web roll is rocked when unwinding of the web is switched between web rolls. When the web is switched from one of web rolls (roll A) to the other (roll B), the remaining core of the web roll is removed subsequent to switching. Then the web roll installation position is shifted to the side reverse to the front and back of the web being unwound from the other web roll (roll B). After that, a new web roll is mounted in position. When the web is switched from the other web roll (roll B) to the web roll (roll A), the remaining core of the web roll is removed subsequent to switching. The web roll installation position is arranged in such a way that a new web roll is then mounted on the same side as the front and back of the web being unwound from the web roll.

Abstract: Continuous web feed is provided by using an apparatus for unwinding a web on a continuous basis by means of an automatic web splicing apparatus. An arm supporting a web roll is rocked when unwinding of the web is switched between web rolls. When the web is switched from one of web rolls (roll A) to the other (roll B), the remaining core of the web roll is removed subsequent to switching. Then the web roll installation position is shifted to the side reverse to the front and back of the web being unwound from the other web roll (roll B). After that, a new web roll is mounted in position. When the web is switched from the other web roll (roll B) to the web roll (roll A), the remaining core of the web roll is removed subsequent to switching. The web roll installation position is arranged in such a way that a new web roll is then mounted on the same side as the front and back of the web being unwound from the web roll.

Abstract: A method of removing a native oxide film on a main surface of a silicon wafer. The native oxide film is formed in a contact hole of a patterned BPSG film or PSG film formed on the main surface. The method includes the steps of: placing a silicon wafer in a reaction chamber hermetically separated from outside atmosphere, and supplying mixed vapor of hydrogen fluoride and substantially high concentration alcohol to the reaction chamber. The step of supplying the mixed vapor of hydrogen fluoride and substantially high concentration alcohol preferably includes the steps of generating vapor from an azeotropic concentration mixture of hydrogen fluoride and alcohol, generating vapor of high purity alcohol solution and mixing these vapors. The vapor of hydrogen fluoride easily enters a small opening, which enables etching of the native oxide film. Since substantially high concentration alcohol exists in the reaction atmosphere, moisture the like by-product of etching is removed by the alcohol.