Abstract: A buckle pivotally arranged in a movable clamp 12 of a first tube holder 1 is attached with play to a buckle 120 pivotally arranged in a movable clamp 82 of a second tube holder 2. When tubes are held in the first and second tube holders 1 and 2, release of the tubes from the holders 1 and 2 is prevented by a movement of a plunger 203 in correspondence of excitation and demagnetization of a solenoid 202 for a predetermined period of operation of the apparatus after holding the tubes (i.e., for a period required from the locking of the buckle 120 until the completion of moving-down of a wafer holder).

Abstract: A buckle pivotally arranged in a movable clamp 12 of a first tube holder 1 is attached with play to a buckle 120 pivotally arranged in a movable clamp 82 of a second tube holder 2. When tubes are held in the first and second tube holders 1 and 2, release of the tubes from the holders 1 and 2 is prevented by a movement of a plunger 203 in correspondence of excitation and demagnetization of a solenoid 202 for a predetermined period of operation of the apparatus after holding the tubes (i.e., for a period required from the locking of the buckle 120 until the completion of moving-down of a wafer holder).

Abstract: A buckle pivotally arranged in a movable clamp 12 of a first tube holder 1 is attached with play to a buckle 120 pivotally arranged in a movable clamp 82 of a second tube holder 2. When tubes are held in the first and second tube holders 1 and 2, release of the tubes from the holders 1 and 2 is prevented by a movement of a plunger 203 in correspondence of excitation and demagnetization of a solenoid 202 for a predetermined period of operation of the apparatus after holding the tubes (i.e., for a period required from the locking of the buckle 120 until the completion of moving-down of a wafer holder).

Abstract: A tube connecting apparatus is arranged to hold tubes in a first tube holder and a second tube holder, to rotate a pair of rotatable clamping members which include separable pieces disposed in rotational symmetry for holding the tubes in either or both of the first tube holder and the second tube holder, to heat and melt the tubes by a heated cutting plate moving therebetween to cut the tubes, and to weld cut end faces of the different tubes. When the pair of clamping members are in a state of not holding the tubes rotation preventing members fixedly lock the clamping members in a predetermined position, preventing the clamping member from being rotated.