Abstract: A control device of a compressor includes a valve control unit configured to control an anti-surge valve that returns fluid in a discharge side of the compressor to a suction side of the compressor in accordance with a control parameter, a simulation unit configured to simulate operational status of the compressor in a plant in accordance with a plant model and the control parameter of the plant to which the compressor is installed, and a control parameter adjusting unit configured to adjust the control parameter in accordance with a result of the simulation.

Abstract: With a simulation apparatus for a system including a motor-driven compressor, a compressor that does not suffer from a driving torque shortage and surging, but can operate at low costs, can be provided. A simulation apparatus for a motor-driven compressor system includes a simulation section in which a driving motor, a compressor driven by the driving motor, a suction throttle valve controlling the inlet flow rate of the compressor, and an anti-surge valve interposed between pipes for returning a part of gas discharged from the compressor to the inlet side of the compressor are translated into unit models and stored. The simulation apparatus further includes an input section through which designed specification data of the compressor is input, a data setting section storing the designed specification data, and a display section displaying unsteady-state Q-H characteristics and required driving torque obtained through simulation by the simulation section.

Abstract: A control device of a compressor includes a valve control unit configured to control an anti-surge valve that returns fluid in a discharge side of the compressor to a suction side of the compressor in accordance with a control parameter, a simulation unit configured to simulate operational status of the compressor in a plant in accordance with a plant model and the control parameter of the plant to which the compressor is installed, and a control parameter adjusting unit configured to adjust the control parameter in accordance with a result of the simulation.

Abstract: With a simulation apparatus for a system including a motor-driven compressor, a compressor that does not suffer from a driving torque shortage and surging, but can operate at low costs, can be provided. A simulation apparatus for a motor-driven compressor system includes a simulation section in which a driving motor, a compressor driven by the driving motor, a suction throttle valve controlling the inlet flow rate of the compressor, and an anti-surge valve interposed between pipes for returning a part of gas discharged from the compressor to the inlet side of the compressor are translated into unit models and stored. The simulation apparatus further includes an input section through which designed specification data of the compressor is input, a data setting section storing the designed specification data, and a display section displaying unsteady-state Q-H characteristics and required driving torque obtained through simulation by the simulation section.

Abstract: A steam supplying apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an on going ashing process. The closed vessel has a maximum horizontal cross sectional water evaporation area M and a minimum horizontal cross sectional water evaporation area S. The vessel is configured so that M/S<8, and the closed vessel has a submerged inside surface which is coated with a resin. The closed water-containing vessel is provided with a steam outlet connected thereto at a location above the surface of the water therein. The apparatus further includes a temperature-controlled liquid bath for the closed water-containing vessel and the vessel is at least partially submerged in the liquid bath.

Abstract: A method for controlling an apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an ongoing ashing process. In accordance with the procedure, steam evaporated in a closed steam supply tank is introduced into a vacuum chamber via a pressure reducing mass-flow controller.

Abstract: A plasma treating method subjects an object surface to a plasma treating within a chamber. First, first and second gasses are supplied into the chamber, where the first gas includes hydrogen molecules as a main component, the second gas includes a quantity of hydrogen less than that included in the first gas and is selected from a group of materials consisting of organic compounds and inorganic compounds, the organic compounds include hydrogen and oxygen and the inorganic compounds include hydrogen. Second, plasma of a mixed gas which is made up of the first and second gasses is generated within the chamber to subject the object surface to the plasma treating. Preferably, the second gas is water vapor.