Abstract: A light deflector can be driven by a low voltage by reducing contact area with a plate shape member and other members. The light deflector can be driven by a low voltage by reducing a contact area with a plate shape member and other members. More particularly, a frictional force and fixing strength are reduced at a contact area with a control member deployed around a plate shape member and the plate shape member. The fixing strength is reduced at a contact area with a fulcrum member and the plate shape member. Also, the fixing strength is reduced at a contact area with a substrate (or an insulation layer on a substrate) and the plate shape member.

Abstract: An optical system is disclosed, including: an optical deflecting array including a plurality of optical deflecting devices arranged in a two-dimensional array, each of optical deflecting devices displacing a member having an optical reflection area and deflecting light, so that an incoming light flux entering the optical reflection area is deflected to a reflection direction being changed, a light source illuminating the optical deflecting array, and a projection lens projecting reflected light from the optical deflecting array based on color information. Each of the optical deflecting devices deflects light to two-axis directions, incoming light fluxes having different colors enter each of the optical deflecting devices from two directions respectively corresponding to two deflection axes, and are reflected by each of the optical deflecting devices based on the color information; and each of reflected light fluxes is led to the projection lens for a respective arbitrary time.

Abstract: An optical deflection device is disclosed that is able to drive a mirror therein to move smoothly. In the optical deflection device, notches are formed in the mirror, and when the notches hit against a bearing member, the mirror is stopped, thus preventing the mirror from being out of position in the horizontal direction. In addition, eaves at the top of the bearing member prevent the mirror from being out of position in the upward direction. Further, a ridge acting as a fulcrum prevents the mirror from being out of position in the downward direction. Moreover, the bearing member limits movement of the mirror in the bearing direction. Therefore, the mirror can rotate smoothly until it hits against the electrodes, and the mirror is rotatable but not out of position.

Abstract: An optical system is disclosed, including: an optical deflecting array including a plurality of optical deflecting devices arranged in a two-dimensional array, each of optical deflecting devices displacing a member having an optical reflection area and deflecting light, so that an incoming light flux entering the optical reflection area is deflected to a reflection direction being changed, a light source illuminating the optical deflecting array, and a projection lens projecting reflected light from the optical deflecting array based on color information. Each of the optical deflecting devices deflects light to two-axis directions, incoming light fluxes having different colors enter each of the optical deflecting devices from two directions respectively corresponding to two deflection axes, and are reflected by each of the optical deflecting devices based on the color information; and each of reflected light fluxes is led to the projection lens for a respective arbitrary time.

Abstract: A light deflector can be driven by a low voltage by reducing contact area with a plate shape member and other members. The light deflector can be driven by a low voltage by reducing a contact area with a plate shape member and other members. More particularly, a frictional force and fixing strength are reduced at a contact area with a control member deployed around a plate shape member and the plate shape member. The fixing strength is reduced at a contact area with a fulcrum member and the plate shape member. Also, the fixing strength is reduced at a contact area with a substrate (or an insulation layer on a substrate) and the plate shape member.

Abstract: An optical deflection device is disclosed that is able to drive a mirror therein to move smoothly. In the optical deflection device, notches are formed in the mirror, and when the notches hit against a bearing member, the mirror is stopped, thus preventing the mirror from being out of position in the horizontal direction. In addition, eaves at the top of the bearing member prevent the mirror from being out of position in the upward direction. Further, a ridge acting as a fulcrum prevents the mirror from being out of position in the downward direction. Moreover, the bearing member limits movement of the mirror in the bearing direction. Therefore, the mirror can rotate smoothly until it hits against the electrodes, and the mirror is rotatable but not out of position.

Abstract: A semiconductor device has a semiconductor material substrate, a first insulating film formed on the substrate, a first metallic wiring formed partly on the first insulating film, a second insulating film formed on the first insulating film, a second metallic wiring formed partly on the second insulating film and a via hole for electrically connecting the first metallic wiring and the second metallic wiring. The via hole has a lower portion which extends below the level of a top face of the first metallic wiring and is tapered to help keep the via hole electrically insulated from the substrate.

Abstract: A semiconductor device has a semiconductor material substrate a first insulating film formed on the substrate, a first metallic wiring formed partly on the first insulating film, a second insulating film formed on the first insulating film, a second metallic wiring formed partly on the second insulating film and a via hole for electrically connecting the first metallic wiring and the second metallic wiring. The via hole has a lower portion which extends below the level of a top face of the first metallic wiring and is tapered to help keep the via hole electrically insulated from the substrate.

Abstract: A photoelectric transfer device includes at least one photoelectric transfer cell having the following elements: A photoelectric transfer element generates a photoelectric current based on a quantity of incident light. An amplifier element includes first FET and functions as a source follower in which a source voltage of the first FET is varied so as to follow up a gate voltage thereof. A read unit outputs, as an output signal, the source voltage of the source follower. The photoelectric transfer element is connected to a gate and source of the amplifier element so that a voltage between the gate and source of the amplifier element is applied across the photoelectric transfer element.