Patents by Inventor Takeshi Nokuo

Takeshi Nokuo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for controlling Z-position of probe
    Patent number: 7814775
    Abstract: Apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.
    Type: Grant
    Filed: March 18, 2010
    Date of Patent: October 19, 2010
    Assignee: JEOL Ltd.
    Inventors: Takeshi Nokuo, Jun Toyaba
  • Apparatus for Controlling Z-Position of Probe
    Publication number: 20100175154
    Abstract: Apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.
    Type: Application
    Filed: March 18, 2010
    Publication date: July 8, 2010
    Applicant: JEOL Ltd.
    Inventors: Takeshi Nokuo, Jun Toyaba
  • Method and apparatus for controlling Z-position of probe
    Patent number: 7712354
    Abstract: Method and apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: May 11, 2010
    Assignee: Jeol Ltd.
    Inventors: Takeshi Nokuo, Jun Toyaba
  • Method and system for inspecting specimen
    Patent number: 7388365
    Abstract: Method and system for obtaining a potential distribution image of a specimen using two probes having two probes contacted with a patterned surface of the specimen, a scanning unit for scanning a beam of electrons or ions over the specimen, a potential detection unit for detecting the electric potential at an arbitrary position on the specimen using the probes, and an acquisition unit for obtaining a potential distribution image of the specimen while synchronizing the output from the potential detection unit with the scanning of the beam.
    Type: Grant
    Filed: September 13, 2005
    Date of Patent: June 17, 2008
    Assignee: Jeol Ltd.
    Inventors: Takeshi Nokuo, Satoru Kawase, Tadaharu Mouri
  • Method and Apparatus for Controlling Z-Position of Probe
    Publication number: 20070277600
    Abstract: Method and apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.
    Type: Application
    Filed: May 4, 2007
    Publication date: December 6, 2007
    Applicant: JEOL LTD.
    Inventors: Takeshi Nokuo, Jun Toyaba
  • Method and system for inspecting specimen
    Publication number: 20060054813
    Abstract: Method and system for obtaining a potential distribution image of a specimen using two probes having two probes contacted with a patterned surface of the specimen, a scanning unit for scanning a beam of electrons or ions over the specimen, a potential detection unit for detecting the electric potential at an arbitrary position on the specimen using the probes, and an acquisition unit for obtaining a potential distribution image of the specimen while synchronizing the output from the potential detection unit with the scanning of the beam.
    Type: Application
    Filed: September 13, 2005
    Publication date: March 16, 2006
    Applicant: JEOL Ltd.
    Inventors: Takeshi Nokuo, Satoru Kawase, Tadaharu Mouri