Patents by Inventor Takeshi OKATO

Takeshi OKATO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
    Patent number: 12001133
    Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and an absorption film that absorbs the EUV light, in this order. The protection film contains 50 at % or more of Rh. When a band-shaped gray scale image parallel to an interface between the protection film and the multilayer reflective film is obtained by imaging a cross section of the protection film with a transmission electron microscope (TEM) and a luminance profile of the gray scale image in a longitudinal direction of the gray scale image is created, a number of peaks of the luminance profile per 100 nm in the longitudinal direction of the gray scale image is 50 or more.
    Type: Grant
    Filed: October 20, 2023
    Date of Patent: June 4, 2024
    Assignee: AGC Inc.
    Inventors: Takuma Kato, Daijiro Akagi, Takeshi Okato, Ryusuke Oishi, Yusuke Ono
  • REFLECTIVE MASK BLANK, REFLECTIVE MASK, METHOD OF MANUFACTURING REFLECTIVE MASK BLANK, AND METHOD OF MANUFACTURING REFLECTIVE MASK
    Publication number: 20240045320
    Abstract: A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and an absorption film that absorbs the EUV light, in this order. The protection film contains 50 at % or more of Rh. When a band-shaped gray scale image parallel to an interface between the protection film and the multilayer reflective film is obtained by imaging a cross section of the protection film with a transmission electron microscope (TEM) and a luminance profile of the gray scale image in a longitudinal direction of the gray scale image is created, a number of peaks of the luminance profile per 100 nm in the longitudinal direction of the gray scale image is 50 or more.
    Type: Application
    Filed: October 20, 2023
    Publication date: February 8, 2024
    Applicant: AGC Inc.
    Inventors: Takuma KATO, Daijiro AKAGI, Takeshi OKATO, Ryusuke OISHI, Yusuke ONO