Patents by Inventor Takeshi Rokukawa

Takeshi Rokukawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Interferometer system, lithography apparatus, and article manufacturing method
    Patent number: 9804510
    Abstract: Provided is an interferometer system that irradiates an object to be measured with measuring light to thereby measure the position of the object to be measured. The interferometer system includes a laser light source; an interferometer configured to separate laser light emitted from an emission opening of the laser light source into the measuring light and reference light; and an optical path protecting member configured to surround an optical axis such that the laser light passes through the inside thereof and of which one opening is in contact with the emission opening.
    Type: Grant
    Filed: January 13, 2014
    Date of Patent: October 31, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Zenichi Hamaya, Ryo Takai, Shinichiro Hirai, Takeshi Rokukawa, Takashi Miura
  • INTERFEROMETER SYSTEM, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
    Publication number: 20140198307
    Abstract: Provided is an interferometer system that irradiates an object to be measured with measuring light to thereby measure the position of the object to be measured. The interferometer system includes a laser light source; an interferometer configured to separate laser light emitted from an emission opening of the laser light source into the measuring light and reference light; and an optical path protecting member configured to surround an optical axis such that the laser light passes through the inside thereof and of which one opening is in contact with the emission opening.
    Type: Application
    Filed: January 13, 2014
    Publication date: July 17, 2014
    Inventors: Zenichi Hamaya, Ryo Takai, Shinichiro Hirai, Takeshi Rokukawa, Takashi Miura