Abstract: A mounting table includes an electrostatic chuck, a base, and a cylindrical sleeve. The electrostatic chuck has a top surface to be exposed to plasma and a bottom surface opposite to the top surface, and a first through-hole is formed through the electrostatic chuck. The base is bonded to the bottom surface of the electrostatic chuck by a first adhesive, and a second through-hole is formed through the base. The second through-hole communicates with the first through-hole and has a diameter larger than a diameter of the first through-hole. The sleeve is bonded to the bottom surface of the electrostatic chuck by a second adhesive while communicating with the first through-hole.

Abstract: A mounting table includes an electrostatic chuck, a base, and a cylindrical sleeve. The electrostatic chuck has a top surface to be exposed to plasma and a bottom surface opposite to the top surface, and a first through-hole is formed through the electrostatic chuck. The base is bonded to the bottom surface of the electrostatic chuck by a first adhesive, and a second through-hole is formed through the base. The second through-hole communicates with the first through-hole and has a diameter larger than a diameter of the first through-hole. The sleeve is bonded to the bottom surface of the electrostatic chuck by a second adhesive while communicating with the first through-hole.

Abstract: A planetarium has a planet projection system comprising: a rotatable stage positioned concentrically with a precession axis of a fixed star projection globe and performing an X-axis motion; and a sleeve-type planet projector positioned at an eccentric position with respect to an X axis on the rotatable stage and performing a Y-axis motion for allowing a projection direction to vary upward and downward in relation to the rotatable stage. The X-axis and Y-axis motions are controlled on the basis of values calculated by a planet-movement operation unit receiving date and time data, to project the movement of planets.

Abstract: A planetarium has a planet projection system comprising: a rotatable stage positioned concentrically with a precession axis of a fixed star projection globe and performing an X-axis motion; and a sleeve-type planet projector positioned at an eccentric position with respect to an X axis on the rotatable stage and performing a Y-axis motion for allowing a projection direction to vary upward and downward in relation to the rotatable stage. The X-axis and Y-axis motions are controlled on the basis of values calculated by a planet-movement operation unit receiving date and time data, to project the movement of planets.