Patents by Inventor Takeshi Takabatake

Takeshi Takabatake has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11955360
    Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.
    Type: Grant
    Filed: December 24, 2020
    Date of Patent: April 9, 2024
    Assignees: TOCALO CO., Ltd., HITACHI HIGH-TECH CORPORATION
    Inventors: Takeshi Takabatake, Tomohiro Nakasuji, Akira Itoh, Kentaro Seto, Yutaka Omoto, Hiroho Kitada, Kazuumi Tanaka
  • Publication number: 20230154780
    Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.
    Type: Application
    Filed: December 24, 2020
    Publication date: May 18, 2023
    Applicants: TOCALO Co., Ltd., HITACHI HIGH-TECH CORPORATION
    Inventors: Takeshi TAKABATAKE, Tomohiro NAKASUJI, Akira ITOH, Kentaro SETO, Yutaka OMOTO, Hiroho KITADA, Kazuumi TANAKA
  • Patent number: 10605300
    Abstract: A thermal spray powder is provided that contains, as constituent elements, a first element selected from W and Mo; a second element selected from Co, Ni, and Fe; a third element selected from C and B; and a fourth element formed of Si. The amount of the second element in the thermal spray powder is 40% by mole or less. The mole ratio of the fourth element to the second element in the thermal spray powder is 0.002 or greater and 0.03 or less. The thermal spray powder has a crystal phase containing Co, Ni, or Fe; W; and C or a crystal phase containing Co, Ni, or Fe; W or Mo; and B. In an X-ray diffraction spectrum of the thermal spray powder, the peak intensity attributed to Co, Ni, or Fe is at most 0.1 times the largest peak intensity in the same X-ray diffraction spectrum.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: March 31, 2020
    Assignees: TOCALO CO., LTD., FUJIMI INCORPORATED
    Inventors: Noriyuki Yasuo, Takeshi Takabatake, Tatsuo Suidzu, Hiroaki Mizuno, Takaya Masuda, Tatsuya Kuno
  • Patent number: 10539176
    Abstract: A thermal spray powder is provided that contains, as constituent elements, a first element selected from W and Mo; a second element selected from Co, Ni, and Fe; a third element selected from C and B; and a fourth element selected from Al and Mg. The amount of the second element in the thermal spray powder is 20% by mole or greater. The mole ratio of the fourth element to the second element in the thermal spray powder is 0.05 or greater and 0.5 or less. The thermal spray powder has a crystal phase containing Co, Ni, or Fe; W; and C or a crystal phase containing Co, Ni, or Fe; W or Mo; and B. In an X-ray diffraction spectrum of the thermal spray powder, the peak intensity attributed to Co, Ni, or Fe is at most 0.1 times the largest peak intensity in the same X-ray diffraction spectrum.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: January 21, 2020
    Assignees: FUJIMI INCORPORATED, TOCALO CO., LTD.
    Inventors: Tatsuo Suidzu, Noriyuki Yasuo, Takeshi Takabatake, Hiroaki Mizuno, Takaya Masuda, Tatsuya Kuno
  • Publication number: 20170314612
    Abstract: A thermal spray powder is provided that contains, as constituent elements, a first element selected from W and Mo; a second element selected from Co, Ni, and Fe; a third element selected from C and B; and a fourth element selected from Al and Mg. The amount of the second element in the thermal spray powder is 20% by mole or greater. The mole ratio of the fourth element to the second element in the thermal spray powder is 0.05 or greater and 0.5 or less. The thermal spray powder has a crystal phase containing Co, Ni, or Fe; W; and C or a crystal phase containing Co, Ni, or Fe; W or Mo; and B. In an X-ray diffraction spectrum of the thermal spray powder, the peak intensity attributed to Co, Ni, or Fe is at most 0.1 times the largest peak intensity in the same X-ray diffraction spectrum.
    Type: Application
    Filed: October 28, 2015
    Publication date: November 2, 2017
    Applicants: FUJIMI INCORPORATED, TOCALO CO., Ltd.
    Inventors: Tatsuo SUIDZU, Noriyuki YASUO, Takeshi TAKABATAKE, Hiroaki MIZUNO, Takaya MASUDA, Tatsuya KUNO
  • Publication number: 20170314613
    Abstract: A thermal spray powder is provided that contains, as constituent elements, a first element selected from W and Mo; a second element selected from Co, Ni, and Fe; a third element selected from C and B; and a fourth element formed of Si. The amount of the second element in the thermal spray powder is 40% by mole or less. The mole ratio of the fourth element to the second element in the thermal spray powder is 0.002 or greater and 0.03 or less. The thermal spray powder has a crystal phase containing Co, Ni, or Fe; W; and C or a crystal phase containing Co, Ni, or Fe; W or Mo; and B. In an X-ray diffraction spectrum of the thermal spray powder, the peak intensity attributed to Co, Ni, or Fe is at most 0.1 times the largest peak intensity in the same X-ray diffraction spectrum.
    Type: Application
    Filed: October 28, 2015
    Publication date: November 2, 2017
    Applicants: FUJIMI INCORPORATED, TOCALO CO., Ltd.
    Inventors: Noriyuki YASUO, Takeshi TAKABATAKE, Tatsuo SUIDZU, Hiroaki MIZUNO, Takaya MASUDA, Tatsuya KUNO
  • Patent number: 7569976
    Abstract: A piezo-electric substrate is mainly comprised of a base material and a film formed on one main surface of the base material. In the base material, the main surface on which the film is formed is a roughed main surface. The piezo-electric substrate is obtained by forming the film comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material on the roughened main surface using a thermal spraying method.
    Type: Grant
    Filed: July 20, 2007
    Date of Patent: August 4, 2009
    Assignees: Koike Co., Ltd., Tocalo Co., Ltd.
    Inventors: Noboru Tamura, Nakaba Ichikawa, Takeshi Takabatake, Kaname Yasuda
  • Publication number: 20080024037
    Abstract: A piezo-electric substrate is mainly comprised of a base material and a film formed on one main surface of the base material. In the base material, the main surface on which the film is formed is a roughed main surface. The piezo-electric substrate is obtained by forming the film comprised of a material with a coefficient of linear expansion smaller than a coefficient of linear expansion of the base material on the roughened main surface using a thermal spraying method.
    Type: Application
    Filed: July 20, 2007
    Publication date: January 31, 2008
    Applicants: Koike Co., Ltd., Tocalo Co., Ltd.
    Inventors: Noboru Tamura, Nakaba Ichikawa, Takeshi Takabatake, Kaname Yasuda