Abstract: There is disclosed a defect inspection apparatus, wherein a light source projects a linear light onto a transparent film to inspect, so that a light receiver receives light beams transmitted through the film. The light receiver is placed to look down the film, with its optical axis inclined by a cross angle ?1 to a normal line that is perpendicular to the film surface, and the cross angle ?1 is set in a range from 30° to 50°. The optical axis of the light receiver is also turned about the normal line by a rotational angle ?2 to a transport direction (S) of the film. The rotational angle ?2 is set in a range from minus 60° to plus 60°, on the assumption that the transport direction is zero degree.

Abstract: There is disclosed a defect inspection apparatus, wherein a light source projects a linear light onto a transparent film to inspect, so that a light receiver receives light beams transmitted through the film. The light receiver is placed to look down the film, with its optical axis inclined by a cross angle ?1 to a normal line that is perpendicular to the film surface, and the cross angle ?1 is set in a range from 30° to 50°. The optical axis of the light receiver is also turned about the normal line by a rotational angle ?2 to a transport direction (S) of the film. The rotational angle ?2 is set in a range from minus 60? to plus 60?, on the assumption that the transport direction is zero degree.

Abstract: A method and apparatus for scanning a surface of an optical disk which has signal recording pits or bumps covered with a transparent layer, with a flying spot to detect surface defects of the optical disk surface. The optical disk is rotated at a constant speed of rotation and scanned along a scanning line parallel to but spaced at least 10 mm from a line radial to the center of rotation of the optical disk. A light-detecting unit receives diffused light reflected by the disk surface to provide an output corresponding to the intensity of the diffused light and converts it into an electric output which is used to evaluate the surface of the optical disk.