Patents by Inventor Takeshi Yokouchi

Takeshi Yokouchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pressure control method and processing device
    Publication number: 20050176258
    Abstract: First and second pressure sensors 132 and 134 that perform pressure detection over different pressure detection ranges from each other detect the pressure within a process chamber 102 of an etching device 100. A pressure controller 144 selects optimal pressure data in correspondence to the pressure inside the process chamber from the pressure data provided by the first and second pressure sensors 132 and 134. It also analyzes the selected pressure data at a resolution selected in correspondence to the pressure inside the process chamber 102 and thus obtains pressure data achieving a predetermined data density. The pressure controller 134 controls a pressure control valve 130 so as to ensure that the pressure data match preset pressure data.
    Type: Application
    Filed: April 11, 2005
    Publication date: August 11, 2005
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Eiji Hirose, Noriyuki Iwabuchi, Takeshi Yokouchi, Shingo Suzuki
  • Pressure control method and processing device
    Patent number: 6908864
    Abstract: First and second pressure sensors 132 and 134 that perform pressure detection over different pressure detection ranges from each other detect the pressure within a process chamber 102 of an etching device 100. A pressure controller 144 selects optimal pressure data in correspondence to the pressure inside the process chamber from the pressure data provided by the first and second pressure sensors 132 and 134. It also analyzes the selected pressure data at a resolution selected in correspondence to the pressure inside the process chamber 102 and thus obtains pressure data achieving a predetermined data density. The pressure controller 134 controls a pressure control valve 130 so as to ensure that the pressure data match preset pressure data.
    Type: Grant
    Filed: December 14, 2000
    Date of Patent: June 21, 2005
    Assignee: Tokyo Electron Limited
    Inventors: Eiji Hirose, Noriyuki Iwabuchi, Takeshi Yokouchi, Shingo Suzuki
  • Pressure control method
    Publication number: 20020182878
    Abstract: First and second pressure sensors 132 and 134 that perform pressure detection over different pressure detection ranges from each other detect the pressure within a process chamber 102 of an etching device 100. A pressure controller 144 selects optimal pressure data in correspondence to the pressure inside the process chamber from the pressure data provided by the first and second pressure sensors 132 and 134. It also analyzes the selected pressure data at a resolution selected in correspondence to the pressure inside the process chamber 102 and thus obtains pressure data achieving a predetermined data density. The pressure controller 134 controls a pressure control valve 130 so as to ensure that the pressure data match preset pressure data.
    Type: Application
    Filed: June 13, 2002
    Publication date: December 5, 2002
    Inventors: Eiji Hirose, Noriyuki Iwabuchi, Takeshi Yokouchi, Shingo Suzuki