Patents by Inventor Takeshige Ishida

Takeshige Ishida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing device, substrate conveying device, and substrate processing method
    Patent number: 6742977
    Abstract: An unprocessed substrate is conveyed to a film-processing chamber at the same time a processed substrate is conveyed to a substrate preparation chamber, reducing the substrate processing cycle, thereby increasing the yield per unit time. The substrate preparation chamber has a two-tiered structure for receiving processed substrates and unprocessed substrates. A two-tiered transfer robot allows the substrates to be removed or placed into the preparation and process chambers at the same time, thus decreasing the cycle time for processing a substrate.
    Type: Grant
    Filed: February 15, 2000
    Date of Patent: June 1, 2004
    Assignee: Kokusai Electric Co., Ltd.
    Inventors: Satohiro Okayama, Motoichi Kanazawa, Takeshige Ishida, Tomohiko Takeda, Yukio Akita, Satoru Ichimura, Kazunori Suzuki, Teruo Yoshino, Tokunobu Akao, Yasunobu Nakayama