Patents by Inventor Takeya INOUE

Takeya INOUE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PURIFICATION PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND PROCESSING METHOD
    Publication number: 20230111710
    Abstract: A purification processing apparatus for supplying purified isopropyl alcohol to a substrate processing apparatus. The purification processing apparatus includes: a processing chamber in which unpurified isopropyl alcohol and ionic liquid are mixed, and the isopropyl alcohol and the ionic liquid are separated to purify the isopropyl alcohol; an unpurified solvent supply port configured to supply the unpurified isopropyl alcohol to the processing chamber; an ionic liquid supply port configured to supply the ionic liquid to the processing chamber; and a purified solvent outlet configured to supply the purified isopropyl alcohol from the processing chamber to the substrate processing apparatus.
    Type: Application
    Filed: October 5, 2022
    Publication date: April 13, 2023
    Inventors: Takeya INOUE, Kenji SEKIGUCHI, Mitsuaki IWASHITA, Hirokazu UEDA, Koji AKIYAMA, Ryuichi ASAKO