Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage ribs, for supporting thin plates respectively on multiple stages at regular intervals. The ribs are provided in parallel on each of opposing side walls of the container casing in such a way that the supporting rib portions cooperate to hold the thin plates. An open end of the thin-plate supporting container serves as an inlet/outlet port, through which the thin plates are loaded and unloaded from the container. Each of the supporting rib portions is composed of an inlet portion adjacent the inlet/outlet-port and a support portion interior thereof. Further, the opening between opposed side surfaces of adjacent ribs is set to be sufficiently large that the thin plate can be easily loaded and unloaded.

Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage rib pieces, for supporting thin plates respectively on multiple stages at regular intervals. The supporting rib portions are provided on each of side walls of a casing of the container in parallel in such a way that each of the supporting rib portions provided on one of the side walls and a corresponding one of the supporting rib portions provided on the other of the side walls face each other and sandwich the thin plate. An opening portion of the thin-plate supporting container is an inlet/outlet port, through which the thin plate is loaded or unloaded from the container. Each of the supporting rib portions is composed of an inlet portion placed at the inlet/outlet-port-side thereof and a matching portion placed at an inner part thereof.

Abstract: A thin-plate supporting container provided with supporting rib portions, each of which consists of multi-stage ribs, for supporting thin plates respectively on multiple stages at regular intervals. The ribs are provided in parallel on each of opposing side walls of the container casing in such a way that the supporting rib portions cooperate to hold the thin plates. An open end of the thin-plate supporting container serves as an inlet/outlet port, through which the thin plates are loaded and unloaded from the container. Each of the supporting rib portions is composed of an inlet portion adjacent the inlet/outlet-port and a support portion interior thereof. Further, the opening between opposed side surfaces of adjacent ribs is set to be sufficiently large that the thin plate can be easily loaded and unloaded.

Abstract: A wafer carrier box contains a wafer carrier which holds at the same time, a plurality of thin sheets, such as magnetic disks, compact disks, silicon wafers for producing semiconductors, or glass bases for LCDs, for operations including conveying, storing and surface-processing the thin sheets. On wall surfaces of the wafer carrier box and/or wafer carrier are bar codes including processing histories and control directly written by a laser beam. The wafer carrier is formed of a material such as polypropylene containing 0.0001 to 0.5 percent by weight of Si or other material that acts as an exothermic body. The other material may be a catalytic substance normally included in production of the wafer carrier. Deterioration in identification capability, which may occur due to chemical liquids, is eliminated. Therefore damage to the bar code which provides lot identification is prevented and improved processing is achieved.

Abstract: There is disclosed a container which conveys a semiconductor wafer and in which the face of the wafer is chemically treated. The container comprises a receiving platelike member and a cover made from a transparent or semitransparent plastic. The platelike member is made from a hydrophobic plastic such as a fluorocarbon resin and provides a quite small area in contact with the sample of the wafer to support it. Tonguelike portions extend steeply upwardly around the sample. When the cover is closed, the tonguelike portions are thrown toward the center of the container, bent, and pressed against the side surface of the sample. The container locks the sample without making contact with the face of the sample. The top cover is fitted over the platelike member to maintain the airtightness. To assure the airtightness, the container is equipped with an O ring and a tightening implement.

Abstract: An inner surface of each of the side walls of a basket for processing thins plates is provided with plural rod-like projections extending inwardly in opposite directions to each other acting as a space holding member, a plurality of these rod-like projections are arranged in spaced apart relation along an inserting direction of the thin plates so as to form a group of rod-like projections, the groups of rod-like projections are arranged in side-by-side relation with a specified pitch for every spacing of the spaced-apart thin plates, the thin plates are inserted between adjoining groups of rod-like projections, thereby a flowing communication of the processing liquid or air is further improved as compared with the space holding member made by the continuous partition wall of the prior art, resulting in that an etching process or a centrifugal drying for the stored thin plates can be performed efficiently.