Patents by Inventor Takezo MAWAKI

Takezo MAWAKI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SELECTIVE FILM FORMATION METHOD
    Publication number: 20230175115
    Abstract: A selective film forming method includes: preparing a substrate including a first film having a first surface and a second film having a second surface, the second film being different from the first film; selectively adsorbing a secondary alcohol gas and/or a tertiary alcohol gas to the second surface; and selectively forming a film on the first surface by supplying at least a raw material gas.
    Type: Application
    Filed: March 29, 2021
    Publication date: June 8, 2023
    Inventors: Shuji AZUMO, Kota UMEZAWA, Katsutoshi ISHII, Akira SHIMIZU, Akinobu TERAMOTO, Tomoyuki SUWA, Yasuyuki SHIRAI, Takezo MAWAKI