Patents by Inventor Taksuhiko Ema

Taksuhiko Ema has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for forming a pattern and substrate-processing apparatus
    Publication number: 20040131980
    Abstract: A pattern forming method comprises forming a photosensitive resin film on a substrate, exposing the photosensitive resin film, forming a pattern of the photosensitive resin film by supplying a developing solution to the photosensitive resin film, and slimming to remove a surface layer of the pattern by causing the pattern to contact with an activated water.
    Type: Application
    Filed: July 23, 2003
    Publication date: July 8, 2004
    Inventors: Kei Hayasaki, Shinichi Ito, Tomoyuki Takeishi, Kenji Kawano, Taksuhiko Ema