Patents by Inventor Takuma Tsuda

Takuma Tsuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device
    Patent number: 7189002
    Abstract: In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is reduced, the surface of a guide shaft of a fixed body and/or the surface of the moving body is subjected to processing for reducing adhesion of gas molecules, for example, by coating the surface(s) with a material having a low adhesion probability of gas molecules, by which the quantity of gas being discharged is decreased.
    Type: Grant
    Filed: December 12, 2005
    Date of Patent: March 13, 2007
    Assignee: Toto Ltd.
    Inventors: Shinji Shinohara, Takuma Tsuda, Takeshi Hayashida
  • Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device
    Patent number: 7052182
    Abstract: In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is reduced, the surface of a guide shaft of a fixed body and/or the surface of the moving body is subjected to processing for reducing adhesion of gas molecules, for example, by coating the surface(s) with a material having a low adhesion probability of gas molecules, by which the quantity of gas being discharged is decreased.
    Type: Grant
    Filed: January 29, 2001
    Date of Patent: May 30, 2006
    Assignee: Toto Ltd.
    Inventors: Shinji Shinohara, Takuma Tsuda, Takeshi Hayashida
  • Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device
    Publication number: 20060093244
    Abstract: In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is reduced, the surface of a guide shat of a fixed body and/or the surface of the moving body is subjected to processing fir reducing adhesion of gas molecules, for example, by coating the surfaces) with a material having a low adhesion probability of gas molecules, by which the quantity of gas being discharged is decreased.
    Type: Application
    Filed: December 12, 2005
    Publication date: May 4, 2006
    Inventors: Shinji Shinohara, Takuma Tsuda, Takeshi Hayashida
  • Method of making a static pressure air bearing
    Patent number: 6735867
    Abstract: In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.
    Type: Grant
    Filed: July 26, 2002
    Date of Patent: May 18, 2004
    Assignees: Nikon Corporation, Toto Ltd.
    Inventors: Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda, Douglas C. Watson, W. Thomas Novak
  • Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device
    Publication number: 20030002756
    Abstract: In a hydrostatic gas bearing for use in a vacuum, in order to provide a hydrostatic gas bearing in which an increase in the quantity of gas being discharged during the movement of a moving body is reduced, the surface of a guide shaft of a fixed body and/or the surface of the moving body is subjected to processing for reducing adhesion of gas molecules, for example, by coating the surface(s) with a material having a low adhesion probability of gas molecules, by which the quantity of gas being discharged is decreased.
    Type: Application
    Filed: August 1, 2002
    Publication date: January 2, 2003
    Inventors: Shinji Shinohara, Takuma Tsuda, Takeshi Hayashida
  • Static pressure air bearing
    Patent number: 6499880
    Abstract: In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.
    Type: Grant
    Filed: August 16, 2001
    Date of Patent: December 31, 2002
    Assignees: Nikon Corporation, Toto Ltd.
    Inventors: Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda, Douglas C. Watson, W. Thomas Novak
  • Static pressure air bearing
    Publication number: 20020181808
    Abstract: In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.
    Type: Application
    Filed: July 26, 2002
    Publication date: December 5, 2002
    Applicant: NIKON CORPORATION
    Inventors: Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda, Douglas C. Watson, W. Thomas Novak
  • Static pressure air bearing
    Publication number: 20020034345
    Abstract: In order to provide a static pressure air bearing having two axes usable in a vacuum environment in which the connection of the supporting air exhaust pipe does not adversely affect the motion of the bearing mechanism, air exhaust pipes are connected only with the fixed part(s) of the lower axis. Air exhaust from the upper axis is conducted through inner air exhaust piping (passages) formed within the fixed parts of the upper and lower axes, so that the exhaust pipes need not be connected with the movable parts.
    Type: Application
    Filed: August 16, 2001
    Publication date: March 21, 2002
    Applicant: NIKON CORPORATION
    Inventors: Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda, Douglas C. Watson, W. Thomas Novak