Abstract: A method for process control of a semiconductor structure fabricated by a series of fabrication steps, the method comprising obtaining an image of the semiconductor structure indicative of at least two individual fabrication steps; wherein the image is generated by scanning the semiconductor structure with a charged particle beam and collecting signals emanating from the semiconductor structure; and processing, by a hardware processor, the image to determining a parameter of the semiconductor structure, wherein processing includes measuring step/s from among the fabrication steps as an individual feature.

Abstract: A method for process control of a semiconductor structure fabricated by a series of fabrication steps, the method comprising obtaining an image of the semiconductor structure indicative of at least two individual fabrication steps; wherein the image is generated by scanning the semiconductor structure with a charged particle beam and collecting signals emanating from the semiconductor structure; and processing, by a hardware processor, the image to determining a parameter of the semiconductor structure, wherein processing includes measuring step/s from among the fabrication steps as an individual feature.

Abstract: The present invention relates to polyolefin resin expanded particles capable of demonstrating excellent flame retarding effects with a small amount of flame retardant content, despite the fact that carbon black is used as a colorant, and polyolefin resin in-mold foamed article obtained by the in-mold foaming of the expanded particles. More specifically, the present invention relates to polyolefin resin expanded particles and to a polyolefin resin in-mold foamed article obtained by the in-mold foaming of the expanded particles, which contain 0.5 to 20 wt % of carbon black, and which also contain 0.01 to 10 wt % of a hindered amine flame retardant shown by the general formula (I) below.