Abstract: The present invention is directed to provide a semiconductor surface treating agent; composition which is capable of stripping an anti-reflection coating layer, a resist layer, and a cured resist layer in the production process of a semiconductor device and the like easily and in a short time, as well as a method for treating a semiconductor surface, comprising that the composition is used.

Abstract: The present invention is directed to provide a semiconductor surface treating agent composition which is capable of stripping an anti-reflection coating layer, a resist layer, and a cured resist layer in the production process of a semiconductor device and the like easily and in a short time, as well as a method for treating a semiconductor surface, comprising that the composition is used.

Abstract: A process for producing an aminoalkylsulfonic acid of formula [2]: wherein R1 and R2 are each independently hydrogen, alkyl, aryl or aralkyl; and R3 and R4 are each independently hydrogen or alkyl, comprising reacting an aminoalkylsulfonate salt of formula [1]: wherein M is alkali metal, organic ammonium or ammonium ion; and R1 to R4 are as described above, an aqueous solution thereof, or a solution dissolving any one of them in a water-soluble organic solvent, selected from alcohols having 1 to 3 carbon, carboxylic acids having 2 to 12 carbon and dimethylformamide, with an organic acid; and a method of salt exchange for an aminoalkylsulfonate salt of formula [1?]: wherein M? is alkali metal, organic ammonium or ammonium ion; and R1 and R4 are as described above, comprising reacting the aminoalkylsulfonate salt formula [2] with a hydroxide of formula [6]: M?OH[6] wherein M? is as described above, in alcohol or water.

Abstract: A process for producing an aminoalkylsulfonic acid of formula [2]: wherein R1 and R2 are each independently hydrogen, alkyl, aryl or aralkyl; and R3 and R4 are each independently hydrogen or alkyl, comprising reacting an aminoalkylsulfonate salt of formula [1]: wherein M is alkali metal, organic ammonium or ammonium ion; and R1 to R4 are as described above, an aqueous solution thereof, or a solution dissolving any one of them in a water-soluble organic solvent, selected from alcohols having 1 to 3 carbon, carboxylic acids having 2 to 12 carbon and dimethylformamide, with an organic acid; and a method of salt exchange for an aminoalkylsulfonate salt of formula [1?]: wherein M? is alkali metal, organic ammonium or ammonium ion; and R1 and R4 are as described above, comprising reacting the aminoalkylsulfonate salt formula [2] with a hydroxide of formula [6]: M?OH??[6] wherein M? is as described above, in alcohol or water.

Abstract: The present invention provides a method for preparation of a quaternary ammonium salt comprising reacting an alkyl halide with 2 equimolar amount or more per the alkyl halide of a pyridine compound or an N-lower alkyl imidazole at 120° C. to 350° C., and a method for the continuous production of a quatemary ammonium salt comprises introducing continuously an alkyl halide and 2 equimolar amount or more per the alkyl halide of a pyridine compound or an N-lower alkyl imidazole into a pipe reactor from the one end thereof under heating at 120 to 350° C. to pass through the pipe reactor wherein a reaction is allowed to take place, and taking out continuously the resulting quaternary ammonium salt from the other end of the reactor.

Abstract: The present invention provides a method for preparation of a quaternary ammonium salt comprising reacting an alkyl halide with 2 equimolar amount or more per the alkyl halide of a pyridine compound or an N-lower alkyl imidazole at 120° C. to 350°C., and a method for the continuous production of a quatemary ammonium salt comprises introducing continuously an alkyl halide and 2 equimolar amount or more per the alkyl halide of a pyridine compound or an N-lower alkyl imidazole into a pipe reactor from the one end thereof under heating at 120 to 350° C. to pass through the pipe reactor wherein a reaction is allowed to take place, and taking out continuously the resulting quaternary ammonium salt from the other end of the reactor.