Patents by Inventor Takuji Ashikari

Takuji Ashikari has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer holding apparatus
    Patent number: 5520501
    Abstract: A wafer holding apparatus comprises a susceptor unit having wafer support grooves where wafers are detachably fixed, a plurality of chuck claws so provided as to be movable by air cylinders relative to a chuck body and adapted to hold the outer edge of the wafer, a transfer arm for transferring the chuck body to a predetermined position, and an automatic position correcting device for automatically correcting the positions of the chucks relative to the wafer support groove.
    Type: Grant
    Filed: May 15, 1995
    Date of Patent: May 28, 1996
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Gisuke Kouno, Takuji Ashikari