Abstract: A portable power tool includes a first handle extending in an elongated manner and configured to be held by a user, an electric motor, a tool accessory that undergoes orbital and/or rotational motion in response to generation of a rotational driving force by the electric motor, and a battery mounting part configured to detachably attach a battery that serves as a power source for the electric motor. The battery mounting part includes an upward mounting surface on which the battery is mountable, and at least one terminal configured to be electrically connected to the battery when a surface of the battery that includes a connection interface is placed on the mounting surface. The mounting surface is located at a position different from the first handle in the front-rear direction, and is located below an upper side of the first handle in the up-down direction.

Abstract: A suspending member, such as a tether strap or the like, may by connected to improve convenience for an operator. The function of the suspending member shall be reliably performed by clearly notifying the user when the connecting part for connecting the suspending member is damaged. A ring-shaped notification member is incorporated in a connecting part for connecting the suspending member. The suspending member is inserted into both of a connecting hole in a connecting part and a notification member so as to be connected. When an end of a handle portion breaks due to long-term use, the notification member is pulled out such that the damage of the connecting part is notified.

Abstract: A method of manufacturing a wafer mounting table according to an embodiment includes: (a) a step of loading a ceramic slurry containing a ceramic powder and a gelling agent into opening portions of a metal mesh, inducing a chemical reaction of the gelling agent to gelate the ceramic slurry, and then performing degreasing and calcining to prepare a ceramic-loaded mesh; (b) a step of sandwiching the ceramic-loaded mesh between a first ceramic calcined body and a second ceramic calcined body obtained by calcining after mold cast forming so as to prepare a multilayer body; and (c) a step of hot press firing the multilayer body to prepare the wafer-receiving table.

Abstract: A portable machining apparatus facilitates addition of new electric components with an intended arrangement of various electric components. The portable machining apparatus includes a housing, an electric motor installed in the housing and including a motor shaft extending in an axial direction, a tip tool partially or fully exposed outside the housing and rotatable by the electric motor, a controller installed in the housing and aligned with the electric motor in the axial direction to control an operation of the electric motor, and a first electric component and a second electric component installed in an electric component compartment between the controller and the electric motor. The first electric component and the second electric component are aligned in a same plane perpendicular to an axis of the motor shaft.

Abstract: A portable power tool comprises a tool accessory, a drive mechanism, a housing and a grip having a rotating axis. The grip comprises grip portion having a first face and a second face. The grip portion is formed in a rotation asymmetric shape to the rotating axis. The grip is attachable to the housing with respect to a rotating angle around the rotating axis at a first angle and a second angle. When the grip is viewed in the rotating axis extending direction, the position of the first surface and the position of the second surface in the circumferential direction around the rotating axis in a case that the rotating angle is at the first angle are different from the position of the first surface and the position of the second surface in the circumferential direction around the rotating axis in a case that the rotating angle is at the second angle.

Abstract: A portable power tool includes a first handle extending in an elongated manner and configured to be held by a user, an electric motor, a tool accessory that undergoes orbital and/or rotational motion in response to generation of a rotational driving force by the electric motor, and a battery mounting part configured to detachably attach a battery that serves as a power source for the electric motor. The battery mounting part includes an upward mounting surface on which the battery is mountable, and at least one terminal configured to be electrically connected to the battery when a surface of the battery that includes a connection interface is placed on the mounting surface. The mounting surface is located at a position different from the first handle in the front-rear direction, and is located below an upper side of the first handle in the up-down direction.

Abstract: A ceramic heater includes: a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded; a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and power feeding members which penetrate a peripheral wall part of the tubular shaft in a vertical direction, and are electrically connected to the heating resistor. The power feeding members are embedded in the peripheral wall part of the tubular shaft, and are in tight contact with a ceramic material of the tubular shaft.

Abstract: A portable circular saw for cutting metal, a dust collection efficiency of cutting dust blown up from a cutting position into a cutting dust collection box is improved. A distance between in inner wall surface of a fixing cover and a tooth tip of a circular saw blade is set to longer than a distance between the tooth tip and a tooth bottom and also longer than twice as long as the distance. Furthermore, a distance between a front end of a window in a base and the tooth tip of the circular saw blade is set longer than the distance between the tooth tip and a tooth bottom and shorter than twice the distance.

Abstract: A ceramic heater includes a ceramic plate. An outer-peripheral-side resistance heating element is disposed in an outer peripheral zone of the ceramic plate. A wire line extends from each of a pair of terminals disposed in a central portion of the ceramic plate toward the outer peripheral zone, and a portion of the wire line close to the outer peripheral zone is a linear portion. A connection terminal is a conductive member connecting between the wire line and the outer-peripheral-side resistance heating element, and includes a first hole into which the linear portion of the wire line is inserted and a second hole into which an end portion of the outer-peripheral-side resistance heating element is inserted.

Abstract: A suspending member, such as a tether strap or the like, may by connected to improve convenience for an operator. The function of the suspending member shall be reliably performed by clearly notifying the user when the connecting part for connecting the suspending member is damaged. A ring-shaped notification member is incorporated in a connecting part for connecting the suspending member. The suspending member is inserted into both of a connecting hole in a connecting part and a notification member so as to be connected. When an end of a handle portion breaks due to long-term use, the notification member is pulled out such that the damage of the connecting part is notified.

Abstract: A method of manufacturing a wafer mounting table according to an embodiment includes: (a) a step of loading a ceramic slurry containing a ceramic powder and a gelling agent into opening portions of a metal mesh, inducing a chemical reaction of the gelling agent to gelate the ceramic slurry, and then performing degreasing and calcining to prepare a ceramic-loaded mesh; (b) a step of sandwiching the ceramic-loaded mesh between a first ceramic calcined body and a second ceramic calcined body obtained by calcining after mold cast forming so as to prepare a multilayer body; and (c) a step of hot press firing the multilayer body to prepare the wafer-receiving table.

Abstract: A member for a semiconductor manufacturing apparatus includes a ceramic disc incorporating an electrode and a ceramic cylindrical shaft supporting the disc. The disc and the shaft are integrally formed and mutually have no bonding interface. The disc has a surface with which the shaft is integrated. The surface has a region inside the shaft and a region outside the shaft. The region inside the shaft is recessed by one step with respect to the region outside the shaft and has an electrode exposure hole through which the electrode is exposed.

Abstract: A semiconductor manufacturing device member according to the present invention includes a ceramic disc with an internal electrode and a ceramic shaft that supports the disc. The disc and the shaft are integrated without having a bonding interface.

Abstract: The electrostatic chuck includes a discoidal alumina ceramic substrate and a heater electrode and an electrostatic electrode embedded in the alumina ceramic substrate. The top surface of the alumina ceramic substrate is a wafer-mounting face. The heater electrode has a pattern, for example, of a single continuous line so as to realize electric wiring over the entire surface of the alumina ceramic substrate. Upon the application of a voltage, the heater electrode generates heat and heats the wafer W. The heater electrode is made of a complex oxide of titanium, aluminum, and magnesium (Ti—Al—Mg—O) dispersed in molybdenum.

Abstract: A method for producing an electrostatic chuck 10 includes the steps of (a) pouring a ceramic slurry containing a ceramic powder, a solvent, a dispersant, and a gelling agent into a first molding die 31 in which an electrostatic electrode precursor 24 is removably attached to an inner surface of the first molding die 31, gelatinizing the ceramic slurry by causing a chemical reaction of the gelling agent, and then removing the first molding die 31 to prepare an embedded-electrode-containing ceramic molded body 41X in which the electrostatic electrode precursor 24 is embedded in a first ceramic molded body 41; (b) preparing a second ceramic molded body 42; and (c) preparing a stacked calcined body 50 using the embedded-electrode-containing ceramic molded body 41X and the second ceramic molded body 42, and conducting hot-press firing of the stacked calcined body 50.

Abstract: A method for manufacturing an alumina sintered body, according to the present invention, includes the steps of (a) obtaining a compact by putting a slurry containing an Al2O3 powder, a MgO powder, a MgF2 powder, a solvent, a dispersing agent, and a gelatinizer into a mold, gelatinizing the slurry by a chemical reaction of the gelatinizer in the mold, and causing mold release, (b) obtaining a calcined body by drying the compact, performing degreasing, and further performing calcination, and (c) obtaining a ceramic sintered body by subjecting the calcined body to hot-press firing at 1,150° C. to 1,350° C. In the step (a), the Al2O3 powder having a purity of 99.9 percent by mass or more is used and 0.1 to 0.2 parts by mass of MgO powder and 0.13 parts by mass or less of MgF2 powder relative to 100 parts by mass of Al2O3 powder are used.

Abstract: An electrostatic chuck 10 includes a disc-shaped alumina ceramic base 12, and a heater electrode 14 and an electrostatic electrode 16 that are embedded in the alumina ceramic base 12. An upper surface of the alumina ceramic base 12 functions as a wafer-receiving surface 12a. The heater electrode 14 is formed in a pattern shape, for example, in the manner of a single brush stroke so as to be arranged over the entire surface of the alumina ceramic base 12. When a voltage is applied to the heater electrode 14, the heater electrode 14 generates heat, and heats a wafer W. This heater electrode 14 contains TiSi2 as a main component.

Abstract: A method for manufacturing an alumina sintered body, according to the present invention, includes the steps of (a) obtaining a compact by putting a slurry containing an Al2O3 powder, a MgO powder, a MgF2 powder, a solvent, a dispersing agent, and a gelatinizer into a mold, gelatinizing the slurry by a chemical reaction of the gelatinizer in the mold, and causing mold release, (b) obtaining a calcined body by drying the compact, performing degreasing, and further performing calcination, and (c) obtaining a ceramic sintered body by subjecting the calcined body to hot-press firing at 1,150° C. to 1,350° C. In the step (a), the Al2O3 powder having a purity of 99.9 percent by mass or more is used and 0.1 to 0.2 parts by mass of MgO powder and 0.13 parts by mass or less of MgF2 powder relative to 100 parts by mass of Al2O3 powder are used.

Abstract: A method for producing an electrostatic chuck includes the steps of (a) placing a ceramic slurry in a molding die, the ceramic slurry containing a ceramic powder, a solvent, a dispersing agent, and a gelling agent, gelatinizing the ceramic slurry in the molding die, and removing the molding die to obtain first and second ceramic molded bodies; (b) drying, debinding, and calcining the first and second molded bodies to obtain first and second ceramic calcined bodies; (c) printing an electrostatic electrode paste on a surface of one of the first and second ceramic calcined bodies to form an electrostatic electrode while assuming the first ceramic calcined body is to form a dielectric layer of an electrostatic chuck; and (d) superposing the first and second ceramic calcined bodies on each other to sandwich the electrostatic electrode and subjecting the first and second calcined bodies to hot-press firing.