Abstract: A wafer transferring apparatus includes a top ring for holding a wafer on a lower end surface thereof and a pusher mechanism for transferring the wafer to and from the top ring. The pusher mechanism has a wafer rest for placing the wafer thereon and is arranged to allow the wafer released from the lower end surface of the top ring to be seated on the wafer rest. The pusher mechanism also has a sensor mechanism for detecting when the wafer is properly seated on the wafer rest. The sensor mechanism is adapted to block sensor light emitted from a light-emitting device by the wafer seated on the wafer rest.

Abstract: A rolling bearing assembly has an inner race, an outer race and a plurality of rolling elements interposed between respective raceway surfaces of the inner and outer races. A stationary raceway member, which is one of the inner and outer races that are a raceway member and which is non-rotatable, is provided with a stepped face continued with the corresponding raceway surface and located in a direction away from the rolling elements, and is also provided with a gap defining piece having a tip held in face-to-face relation to the stepped face with a gap intervening between it and the stepped face and defining a flow path between a peripheral wall thereof and the stationary raceway member; there being provided a grease reservoir communicated with the flow path.

Abstract: To provide a rolling bearing assembly, in which a grease filled within the bearing assembly is utilized to achieve a high speed feature, a long life and a maintenance-free and a lubricant oil can be stably supplied from a minute gap, a stepped face continued from the raceway surface is provided in a stationary raceway ring unit of an inner and outer ring units in a direction away from rolling elements. A gap forming piece having a free end confronting the stepped face is provided to define therebetween a flow passage and a grease reservoir communicated with the flow passage. The rolling bearing assembly is so designed that a heat cycle can be induced in the grease reservoir and, base oil of the grease can be urged to flow out from the gap by the effect of a pressure variation caused by the temperature rise.

Abstract: To provide a rolling bearing device designed to accomplish a stabilized retention of the retainer during a high speed rotation, to avoid a direct contact between guide surfaces and to reduce the power loss between retainer guide gaps, the rolling bearing device includes a rolling bearing unit having rolling elements retained by an annular retainer and intervening between raceways of inner and outer rings, and a nozzle member provided proximate to the outer ring. The nozzle member is provided with an annular collar portion inserted in a bearing space delimited between the inner ring and the outer ring and having a nozzle hole. This collar portion has an outer diametric surface in the form of a retainer guide surface, and an inner diametric surface of the retainer is guided by this retainer guide surface.

Abstract: The present invention provides a polishing platen which does not require a large force for removing a polishing pad from an upper surface of the polishing platen and can thus make it relatively easy to remove the polishing pad therefrom. The present invention also provides a polishing apparatus having such polishing platen. The polishing platen (12) according to the present invention includes a surface to which a polishing pad is attached. The surface of the polishing platen (12) includes a combination of a first surface (20) and a second surface (21) having a surface roughness which is different from that of the first surface (20).

Abstract: To provide a rolling bearing assembly, in which a grease filled within the bearing assembly is utilized to achieve a high speed feature, a long life and a maintenance-free and a lubricant oil can be stably supplied from a minute gap, a stepped face continued from the raceway surface is provided in a stationary raceway ring unit of an inner and outer ring units in a direction away from rolling elements. A gap forming piece having a free end confronting the stepped face is provided to define therebetween a flow passage and a grease reservoir communicated with the flow passage. The rolling bearing assembly is so designed that a heat cycle can be induced in the grease reservoir and, base oil of the grease can be urged to flow out from the gap by the effect of a pressure variation caused by the temperature rise.

Abstract: A wafer transferring apparatus includes a top ring (60) for holding a wafer (W) on a lower end surface thereof and a pusher mechanism (10) for transferring the wafer (W) to and from the top ring (60). The pusher mechanism (10) has a wafer rest (40a) for placing the wafer (W) thereon and is arranged to allow the wafer (W) released from the lower end surface of the top ring (60) to be seated on the wafer rest (40a). The pusher mechanism (10) also has a sensor mechanism (50) for detecting when the wafer (W) is properly seated on the wafer rest (40a). The sensor mechanism (50) is adapted to block sensor light emitted from a light-emitting device (51) by the wafer (W) seated on the wafer rest (40a).

Abstract: A rolling bearing assembly includes an inner race (1), an outer race (2) and a plurality of rolling elements (3) interposed between respective raceway surfaces (1, 2a) of the inner and outer races (1, 2). A stationary raceway member (2), which is one of the inner and outer races (1, 2) that are a raceway member and which is non-rotatable, is provided with a stepped face (2b) continued with the corresponding raceway surface (2a) and located in a direction away from the rolling elements (3). A gap defining piece (7) is provided, which has a tip held in face-to-face relation to the stepped face (2b) with a gap intervening between it and the stepped face (2b) and which defines a flow path (14) between a peripheral wall thereof and the stationary raceway member (2). A grease reservoir (9) is also provided in communication with the flow path (9).