Patents by Inventor Takuma Fukumura

Takuma Fukumura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam device and control method of optical system of charged particle beam device
    Patent number: 11222764
    Abstract: A charged particle beam device includes: a charged particle source; an optical system which acts on a charged particle beam emitted from the charged particle source; a control unit which controls the optical system; and a storage unit which stores previous setting values of the optical system. The optical system includes a first optical element and a second optical element for controlling a state of the charged particle beam to be incident on the first optical element. The control unit obtains an initial value of a setting value of the second optical element based on previous setting values of the second optical element; and changes a state of the charged particle beam by changing the setting value of the second optical element from the obtained initial value and obtains the setting value of the second optical element based on the change in the state of the charged particle beam.
    Type: Grant
    Filed: March 23, 2020
    Date of Patent: January 11, 2022
    Assignee: JEOL Ltd.
    Inventors: Kazuya Yamazaki, Yuko Shimizu, Hirofumi Iijima, Takuma Fukumura, Naoki Hosogi, Tomohiro Nakamichi
  • Charged Particle Beam Device and Control Method of Optical System of Charged Particle Beam Device
    Publication number: 20200343072
    Abstract: A charged particle beam device includes: a charged particle source; an optical system which acts on a charged particle beam emitted from the charged particle source; a control unit which controls the optical system; and a storage unit which stores previous setting values of the optical system. The optical system includes a first optical element and a second optical element for controlling a state of the charged particle beam to be incident on the first optical element. The control unit obtains an initial value of a setting value of the second optical element based on previous setting values of the second optical element; and changes a state of the charged particle beam by changing the setting value of the second optical element from the obtained initial value and obtains the setting value of the second optical element based on the change in the state of the charged particle beam.
    Type: Application
    Filed: March 23, 2020
    Publication date: October 29, 2020
    Inventors: Kazuya Yamazaki, Yuko Shimizu, Hirofumi Iijima, Takuma Fukumura, Naoki Hosogi, Tomohiro Nakamichi