Abstract: [Object] To provide a technology or the like capable of improving driving efficiency of a diaphragm pump. [Solving Means] A diaphragm pump (10) according to the present technology includes a first diaphragm (1a), a second diaphragm (1b), and an adjustment portion (11). The first diaphragm (1a) includes a first member including a first elastic portion (5a), and a first drive unit that elastically deforms the first elastic portion (5a) by drive of the first drive unit. The second diaphragm (1b) includes a second member that includes a second elastic portion (5b) and forms a space (13) with the first member, a fluid flowing in the space, and a second drive unit that elastically deforms the second elastic portion (5b). The adjustment portion (11) is provided to at least one of the first diaphragm (1a) or the second diaphragm (1b) and is for adjusting a resonant frequency of the at least one of the first diaphragm (1a) or the second diaphragm (1b).

Abstract: [Object] To provide a valve module suitable for a compact fluid control apparatus and a fluid control apparatus and an electronic apparatus using the same. [Solving Means] A valve module according to the present technology includes a movable member and a support member. The movable member is constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having an opening through which the fluid passes and a second surface on a side opposite to the first surface. The support member has higher rigidity than rigidity of the movable member, covers a part of a region of the second surface, in which the opening is not located as viewed in a direction perpendicular to the second surface, and is fixed to the member.

Abstract: [Object] To provide a fluid control apparatus having a diaphragm structure and small flow path resistance. [Solving Means] A fluid control apparatus according to the present technology includes a first space, two flat plate members, a drive mechanism, a second space, a first check valve, and a second check valve. The first space has an inlet and an outlet. The two flat plate members face each other via the first space, and at least one of the flat plate members is an elastic body having flexibility. The drive mechanism bends the elastic body. The second space adjoins the first space, communicates with the first space via the inlet, and has a suction port. The first check valve allows fluid to flow from the suction port to the first space via the inlet. The third space adjoins the first space, communicates with the first space via the outlet, and has a discharge port. The second check valve allows the fluid to flow from the first space to the discharge port via the outlet.