Abstract: An optical device includes a support portion, a first movable portion having an optical surface, a second movable portion having a frame shape and surrounding the first movable portion, a first coupling portion coupling the first movable portion and the second movable portion to each other, a second coupling portion coupling the second movable portion and the support portion to each other, and a softening member which has a softening characteristic and to which stress is applied when the first movable portion swings around a first axis. When viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the second movable portion, the portion extending between a drive element and the first coupling portion, and is not electrically connected to an outside.

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of the second connection portions includes a protrusion portion protruding in a second axis direction. The outer edge of the protrusion portion includes a linear portion extending in a first axis direction and a pair of curved portions positioned on both ends of the linear portion.

Abstract: A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.

Abstract: A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.

Abstract: An actuator device includes a support part, a movable part, a connecting part, a spiral coil provided to the movable part, a magnetic field generator, an external terminal provided to the support part; and a wiring connected to an inner end portion of the coil and the external terminal. The wiring includes a lead wiring connected to the external terminal, and a straddle wiring formed in a shape of a layer, provided to the movable part so as to straddle the coil, and connected to the inner end portion of the coil and the lead wiring. A thickness of the straddle wiring is smaller than a thickness of the coil. The straddle wiring is electrically insulated from the mirror surface.

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of the second connection portions includes a protrusion portion protruding in a second axis direction. The outer edge of the protrusion portion includes a linear portion extending in a first axis direction and a pair of curved portions positioned on both ends of the linear portion.

Abstract: An optical device includes a support portion, a first movable portion having an optical surface, a second movable portion having a frame shape and surrounding the first movable portion, a first coupling portion coupling the first movable portion and the second movable portion to each other, a second coupling portion coupling the second movable portion and the support portion to each other, and a softening member which has a softening characteristic and to which stress is applied when the first movable portion swings around a first axis. When viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the second movable portion, the portion extending between a drive element and the first coupling portion, and is not electrically connected to an outside.

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts, and a pair of first portions. One of the first portions is connected to one of the first connection portions and one of the second connection portions and extends in a inclined direction, and the other of the first portions is connected to the other of the first connection portions and the one of the second connection portions and extends in a inclined direction.

Abstract: An optical device includes a support portion, a first movable portion having an optical surface, a second movable portion having a frame shape and surrounding the first movable portion, a first coupling portion coupling the first movable portion and the second movable portion to each other, a second coupling portion coupling the second movable portion and the support portion to each other, and a softening member which has a softening characteristic and to which stress is applied when the first movable portion swings around a first axis. When viewed in a direction perpendicular to the optical surface, the softening member is provided to a portion of the second movable portion, the portion extending between a drive element and the first coupling portion, and is not electrically connected to an outside.

Abstract: An actuator device includes a support part, a movable part, a connecting part, a spiral coil provided to the movable part, a magnetic field generator, an external terminal provided to the support part; and a wiring connected to an inner end portion of the coil and the external terminal. The wiring includes a lead wiring connected to the external terminal, and a straddle wiring formed in a shape of a layer, provided to the movable part so as to straddle the coil, and connected to the inner end portion of the coil and the lead wiring. A thickness of the straddle wiring is smaller than a thickness of the coil. The straddle wiring is electrically insulated from the mirror surface.

Abstract: A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.

Abstract: An actuator device includes a support part, a first movable part, a second movable part, a first connecting part, a second connecting part, a spiral coil provided to the second movable part, a magnetic field generator, a first external terminal provided to the support part; and a first wiring connected to an inner end portion of the coil and the first external terminal. The first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring formed in a shape of a layer, provided to the second movable part so as to straddle the coil, and connected to the inner end portion of the coil and the lead wiring. A thickness of the straddle wiring is smaller than a thickness of the coil. The straddle wiring is electrically insulated from the mirror surface.

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts, and a pair of first portions. One of the first portions is connected to one of the first connection portions and one of the second connection portions and extends in a inclined direction, and the other of the first portions is connected to the other of the first connection portions and the one of the second connection portions and extends in a inclined direction.

Abstract: A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of each of the pair of the first connection portions includes a first linear portion that extends along a second axis direction. An outer edge of each of the pair of the second connection portions includes a second linear portion that extends along a first axis direction.

Abstract: An actuator device includes a support part, a first movable part, a second movable part, a first connecting part, a second connecting part, a spiral coil provided to the second movable part, a magnetic field generator, a first external terminal provided to the support part; and a first wiring connected to an inner end portion of the coil and the first external terminal. The first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring formed in a shape of a layer, provided to the second movable part so as to straddle the coil, and connected to the inner end portion of the coil and the lead wiring. A thickness of the straddle wiring is smaller than a thickness of the coil. The straddle wiring is electrically insulated from the mirror surface.

Abstract: An actuator device includes a support part, a first movable part, a second movable part, a first connecting part connecting the first movable part to the second movable part, a second connecting part connecting the second movable part to the support part, a spiral coil provided to the second movable part, a first external terminal provided to the support part, and a first wiring connected to an inner end portion of the coil and the first external terminal. The first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring provided to the second movable part so as to straddle the coil and connected to the inner end of the coil and the lead wiring. The width of the straddle wiring is larger than the width of the coil, and the thickness of the straddle wiring is smaller than the thickness of the coil.

Abstract: A base, which has a main surface and a back surface on an opposite side from the main surface and is made of metal, an optical surface provided on the main surface, and a vibrating element provided on the main surface or the back surface are included, in which the base has a support portion, a first extending portion and a second extending portion extending from the support portion, a movable portion disposed between the first extending portion and the second extending portion, and a first connecting portion connecting the first extending portion and the movable portion to each other, and a second connecting portion connecting the second extending portion and the movable portion to each other.

Abstract: An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of each of the pair of the first connection portions includes a first linear portion that extends along a second axis direction. An outer edge of each of the pair of the second connection portions includes a second linear portion that extends along a first axis direction.

Abstract: A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.