Patents by Inventor Takuma Shibayama

Takuma Shibayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SPUTTERING TARGET
    Publication number: 20150194293
    Abstract: A sputtering target is provided which contains MgO as a main component, can be used for DC sputtering, and allows a thin film having the same crystal structure as that of MgO to be deposited on a substrate by sputtering. It contains MgO which is a non-conductive oxide and TiO which is a conductive oxide. By causing the TiO content to be within a range of 20 to 60 mol %, the sputtering target is arranged to have conductivity as a whole.
    Type: Application
    Filed: May 22, 2014
    Publication date: July 9, 2015
    Applicant: KOJUNDO CHEMICAL LABORATORY CO., LTD.
    Inventors: Takahiro UNNO, Takuma Shibayama