Patents by Inventor Takuma Yokoyama
Takuma Yokoyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12117340Abstract: To provide a light source apparatus for light measurement in which time wavelength uniqueness is not lost even in a case of high output, and to enable spectroscopic measurement with high accuracy and at high speed. Broadband pulsed light having a continuous spectrum over a wavelength width of at least 50 nm in a range of 900 to 1300 nm is emitted from a pulsed light source, and divided for each wavelength by a divider, and light having each wavelength is transmitted by each of stretch fibers and emitted from a coupler. The stretch fibers have different lengths such that an elapsed time and the wavelength in one pulse correspond to each other on a one-to-one basis at an emission end.Type: GrantFiled: March 25, 2020Date of Patent: October 15, 2024Assignee: Ushio Denki Kabushiki KaishaInventors: Go Yamada, Takuma Yokoyama
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Patent number: 12092520Abstract: Broadband pulsed light from a broadband pulsed light source is pulse-stretched such that an elapsed time and a wavelength in a pulse correspond to each other on a one-to-one basis, and is radiated to an object. The light transmitted through the object is received by a light receiver and converted into a spectrum by a calculator. The broadband pulsed light is divided according to a wavelength by dividing elements, and is pulse-stretched by two fibers having different dispersion characteristics or received by two light receivers having different characteristics.Type: GrantFiled: March 25, 2020Date of Patent: September 17, 2024Assignee: Ushio Denki Kabushiki KaishaInventor: Takuma Yokoyama
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Publication number: 20240110866Abstract: An illumination device irradiates a predetermined area with measurement light whose wavelength changes over time. A light reception device includes an optical sensor that detects diffuse transmission light of an object located in the predetermined area. The light reception device is structured such that the optical sensor receives a component of the diffuse transmission light through the object which propagates in a direction deviated from an optical axis of the measurement light.Type: ApplicationFiled: March 15, 2022Publication date: April 4, 2024Applicant: USHIO DENKI KABUSHIKI KAISHAInventors: Takuma YOKOYAMA, Katsuya WATANABE
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Publication number: 20230333010Abstract: A light source apparatus generates wavelength scanning light. A pulsed light source generates pulsed light including a continuous spectrum. An optical divider spatially divides the broadband pulsed light L into a plurality of n (n?2) beams according to wavelengths. A plurality of n fibers give different delays to the n beams. The coupler multiplexes n beams output from the n fibers. In the light source apparatus, at least a part from an incident end of the optical divider to emission ends of the n fibers has a continuous waveguide structure. A light monitoring device extracts and measures part of light propagating through the continuous waveguide structure.Type: ApplicationFiled: April 13, 2023Publication date: October 19, 2023Applicant: USHIO DENKI KABUSHIKI KAISHAInventors: Takuma YOKOYAMA, Aya OTA
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Patent number: 11385173Abstract: [Object] An optimal structure for spectroscopically analyzing a solid-phase or liquid-phase sample in a wavelength range of 1100 to 1200 nm by using supercontinuum light is provided. [Solution] Supercontinuum light generated by producing nonlinear effects in light from a pulse laser source 1 by a nonlinear element 2 and having a wavelength range including 1100 nm or greater and 1200 nm or less is subjected to pulse stretching by a pulse stretching element 3, and a solid-phase or a liquid-phase sample S is irradiated with the supercontinuum light. In the supercontinuum light, elapsed time and wavelength within one pulse are in a one-to-one correspondence, and computation means 5 computes a spectrum based on a change over time in an output from a light receiver 4 that has received light that has passed through the sample S.Type: GrantFiled: September 12, 2019Date of Patent: July 12, 2022Assignee: Ushio Denki Kabushiki KaishaInventors: Go Yamada, Takuma Yokoyama
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Publication number: 20220187126Abstract: Broadband pulsed light from a broadband pulsed light source is pulse-stretched such that an elapsed time and a wavelength in a pulse correspond to each other on a one-to-one basis, and is radiated to an object. The light transmitted through the object is received by a light receiver and converted into a spectrum by a calculator. The broadband pulsed light is divided according to a wavelength by dividing elements, and is pulse-stretched by two fibers having different dispersion characteristics or received by two light receivers having different characteristics.Type: ApplicationFiled: March 25, 2020Publication date: June 16, 2022Applicant: Ushio Denki Kabushiki KaishaInventor: Takuma YOKOYAMA
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Publication number: 20220170791Abstract: To provide a light source apparatus for light measurement in which time wavelength uniqueness is not lost even in a case of high output, and to enable spectroscopic measurement with high accuracy and at high speed. Broadband pulsed light having a continuous spectrum over a wavelength width of at least 50 nm in a range of 900 to 1300 nm is emitted from a pulsed light source, and divided for each wavelength by a divider, and light having each wavelength is transmitted by each of stretch fibers and emitted from a coupler. The stretch fibers have different lengths such that an elapsed time and the wavelength in one pulse correspond to each other on a one-to-one basis at an emission end.Type: ApplicationFiled: March 25, 2020Publication date: June 2, 2022Applicant: Ushio Denki Kabushiki KaishaInventors: Go YAMADA, Takuma YOKOYAMA
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Patent number: 11268855Abstract: [Object] There is provided a wideband extended pulsed light source that maintains uniqueness of an elapsed time with respect to a wavelength and does not collapse the uniqueness of an elapsed time with respect to a wavelength even when an output is increased. [Solution] Light L1 from a pulsed laser source 11 is converted into supercontinuum light by a nonlinear element 12, is output as wideband pulsed light L2, and is caused to enter a pulse extension element 2. The pulse extension element 2 that is a multi-core fiber performs pulse extension in each of cores 211 and outputs wideband extended pulsed light L3. In the wideband extended pulsed light L3, an elapsed time and a wavelength in a pulse correspond to each other on one-to-one basis, and the wideband extended pulsed light L3 is used as light for spectrometry.Type: GrantFiled: September 12, 2019Date of Patent: March 8, 2022Assignee: Ushio Denki Kabushiki KaishaInventors: Toshikazu Nagashima, Takuma Yokoyama
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Publication number: 20210389237Abstract: [Object] An optimal structure for spectroscopically analyzing a solid-phase or liquid-phase sample in a wavelength range of 1100 to 1200 nm by using supercontinuum light is provided. [Solution] Supercontinuum light generated by producing nonlinear effects in light from a pulse laser source 1 by a nonlinear element 2 and having a wavelength range including 1100 nm or greater and 1200 nm or less is subjected to pulse stretching by a pulse stretching element 3, and a solid-phase or a liquid-phase sample S is irradiated with the supercontinuum light. In the supercontinuum light, elapsed time and wavelength within one pulse are in a one-to-one correspondence, and computation means 5 computes a spectrum based on a change over time in an output from a light receiver 4 that has received light that has passed through the sample S.Type: ApplicationFiled: September 12, 2019Publication date: December 16, 2021Applicant: Ushio Denki Kabushiki KaishaInventors: Go Yamada, Takuma Yokoyama
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Publication number: 20210356323Abstract: [Object] There is provided a wideband extended pulsed light source that maintains uniqueness of an elapsed time with respect to a wavelength and does not collapse the uniqueness of an elapsed time with respect to a wavelength even when an output is increased. [Solution] Light L1 from a pulsed laser source 11 is converted into supercontinuum light by a nonlinear element 12, is output as wideband pulsed light L2, and is caused to enter a pulse extension element 2. The pulse extension element 2 that is a multi-core fiber performs pulse extension in each of cores 211 and outputs wideband extended pulsed light L3. In the wideband extended pulsed light L3, an elapsed time and a wavelength in a pulse correspond to each other on one-to-one basis, and the wideband extended pulsed light L3 is used as light for spectrometry.Type: ApplicationFiled: September 12, 2019Publication date: November 18, 2021Applicant: Ushio Denki Kabushiki KaishaInventors: Toshikazu Nagashima, Takuma Yokoyama
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Patent number: 9946524Abstract: A method of compiling a source code described by a first programming language, the method being executed by a computer and includes: specifying a function described by a second programming language different from the first programming language from the source code, the function being allowed to use one or more arguments; and first creating an instruction to store given data that causes occurrence of an error when a register is accessed due to execution of the function in an area in the register for an argument that is not set for the function in the source code among the one or more arguments.Type: GrantFiled: January 21, 2016Date of Patent: April 17, 2018Assignee: FUJITSU LIMITEDInventor: Takuma Yokoyama
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Patent number: 9826617Abstract: An extreme ultraviolet light source device that can stably and efficiently provide EUV emission. The EUV light source device includes a first laser source that irradiates a high-temperature plasma raw material with a laser beam, and a second laser source that, after the high-temperature plasma raw material is irradiated with the laser beam and before effective extreme ultraviolet light is emitted, irradiates the raw material in that region which is irradiated with the laser beam, with a second laser beam. The EUV light source device also includes a return light blocking unit that prevents return light of the laser beam, which is emitted from the first laser source, from reaching a light emission opening of the second laser source.Type: GrantFiled: May 22, 2015Date of Patent: November 21, 2017Assignee: USHIO DENKI KABUSHIKI KAISHAInventor: Takuma Yokoyama
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Publication number: 20170094766Abstract: An extreme ultraviolet light source device that can stably and efficiently provide EUV emission. The EUV light source device includes a first laser source that irradiates a high-temperature plasma raw material with a laser beam, and a second laser source that, after the high-temperature plasma raw material is irradiated with the laser beam and before effective extreme ultraviolet light is emitted, irradiates the raw material in that region which is irradiated with the laser beam, with a second laser beam. The EUV light source device also includes a return light blocking unit that prevents return light of the laser beam, which is emitted from the first laser source, from reaching a light emission opening of the second laser source.Type: ApplicationFiled: May 22, 2015Publication date: March 30, 2017Applicant: USHIO DENKI KABUSHIKI KAISHAInventor: Takuma YOKOYAMA
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Publication number: 20160274877Abstract: A method of compiling a source code described by a first programming language, the method being executed by a computer and includes: specifying a function described by a second programming language different from the first programming language from the source code, the function being allowed to use one or more arguments; and first creating an instruction to store given data that causes occurrence of an error when a register is accessed due to execution of the function in an area in the register for an argument that is not set for the function in the source code among the one or more arguments.Type: ApplicationFiled: January 21, 2016Publication date: September 22, 2016Applicant: FUJITSU LIMITEDInventor: Takuma Yokoyama
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Publication number: 20090084992Abstract: To achieve pulse-stretched EUV radiation without putting a large heat load on electrodes or requiring sophisticated control, a pulsed power is supplied between a first electrode and a second electrode provided inside a chamber to form a narrow discharge channel therebetween. A laser beam from a laser source irradiates high temperature plasma material to form low temperature plasma gas having an ion density of approximately 1017 to 1020 cm?3 which is supplied to a narrow discharge channel formed between the electrodes. Electric discharge acts on the low temperature plasma gas to raise the electron temperature, resulting in high temperature plasma. As a result, EUV radiation is produced. Since the low temperature plasma gas is continuously supplied to the discharge channel, the pinch effect or confining effect of its self-magnetic field is repeated, resulting in the continuation of EUV radiation.Type: ApplicationFiled: October 1, 2008Publication date: April 2, 2009Applicants: USHIO DENKI KABUSHIKI KAISHA, TOKYO INSTITUTE OF TECHNOLOGYInventors: Tomonao HOSOKAI, Kazuhiko HORIOKA, Kyohei SEKI, Takuma YOKOYAMA
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Publication number: 20080237501Abstract: High temperature plasma raw material (21) is gasified by irradiation with a first energy beam (23). When the gasified raw material reaches the discharge region, pulsed power is applied between the electrodes (11, 12) and a second energy beam (24) irradiates. In this manner, the plasma is heated and excited and an EUV emission occurs. The emitted EUV emission is collected and extracted by EUV collector optics. Because of irradiation by the first and second energy beams (23, 24), a special distribution of high temperature plasma raw material density can be set to a specified distribution and demarcation of the position of the discharge channel can be set. Moreover, it is possible to lengthen pulses of extreme ultraviolet emission by supplying raw material gas of which the ion density in the discharge path is nearly the same as the ion density under EUV radiation emission conditions.Type: ApplicationFiled: March 26, 2008Publication date: October 2, 2008Applicants: USHIO DENKI KABUSHIKI KAISHA, TOKYO INSTITUTE OF TECHNOLOGYInventors: Tomonao Hosokai, Kazuhiko Horioka, Hiroshi Mizokoshi, Takuma Yokoyama, Kyohei Seki