Abstract: An exhaust gas processing device includes a NOx detection sensor, a first catalyst provided to a first branch pipe, a second catalyst provided to a second branch pipe, a first pressure sensor and a second pressure sensor which are arranged on the upstream side of the first catalyst and the second catalyst and which detect pressures in the first branch pipe and the second branch pipe, and a control device that obtains flow rates of exhaust gas flowing through the first branch pipe and the second branch pipe based on detection values of the first pressure sensor and the second pressure sensor and obtains amounts of reducing agent to be given to the first catalyst and the second catalyst from the obtained flow rates and a concentration of NOx of the exhaust gas.

Abstract: An exhaust gas processing device includes a NOx detection sensor, a first catalyst provided to a first branch pipe, a second catalyst provided to a second branch pipe, a first pressure sensor and a second pressure sensor which are arranged on the upstream side of the first catalyst and the second catalyst and which detect pressures in the first branch pipe and the second branch pipe, and a control device that obtains flow rates of exhaust gas flowing through the first branch pipe and the second branch pipe based on detection values of the first pressure sensor and the second pressure sensor and obtains amounts of reducing agent to be given to the first catalyst and the second catalyst from the obtained flow rates and a concentration of NOx of the exhaust gas.

Abstract: A temperature control system which performs control of an object whose temperature is to be controlled as accurately as possible. The system comprises: a chiller located in a fluid circulating and supplying system, for cooling a thermal fluid returning from a vacuum chamber, a first flow control valve located in the fluid circulating and supplying system in a position between the chiller and the vacuum chamber, a bypass passage for splitting and supplying thermal fluid returning from the vacuum chamber to a position between the first flow control valve and the vacuum chamber, before it reaches the chiller, a second flow control valve located in the bypass passage, and a halogen lamp heater located in the fluid circulating and supplying system in a position between a confluence point of the bypass passage and the vacuum chamber, for adjusting the temperature of the thermal fluid passing therethrough to a set temperature.