Patents by Inventor Takumi Taura
Takumi Taura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11784000Abstract: A capacitor includes a silicon substrate, a conductor layer, and a dielectric layer. The silicon substrate has a principal surface including a capacitance generation region and a non-capacitance generation region. The silicon substrate has a porous part provided in a thickness direction in the capacitance generation region. The conductor layer has a surface layer part at least covering part of a surface of the capacitance generation region and a filling part filled in at least part of fine pores of the porous part. The dielectric layer is provided between an inner surface of the fine pores and the filling part.Type: GrantFiled: September 10, 2021Date of Patent: October 10, 2023Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Kazushi Yoshida, Yosuke Hagihara, Takumi Taura
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Publication number: 20210407734Abstract: A capacitor includes a silicon substrate, a conductor layer, and a dielectric layer. The silicon substrate has a principal surface including a capacitance generation region and a non-capacitance generation region. The silicon substrate has a porous part provided in a thickness direction in the capacitance generation region. The conductor layer has a surface layer part at least covering part of a surface of the capacitance generation region and a filling part filled in at least part of fine pores of the porous part. The dielectric layer is provided between an inner surface of the fine pores and the filling part.Type: ApplicationFiled: September 10, 2021Publication date: December 30, 2021Inventors: Kazushi Yoshida, Yosuke Hagihara, Takumi Taura
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Patent number: 10088497Abstract: An acceleration sensor includes a CV conversion circuit, an AD conversion circuit, and first and second registers. The CV conversion circuit outputs a voltage corresponding to the capacitance changes between a movable electrode and each of first and second fixed electrodes disposed to face the movable electrode. The AD conversion circuit is connected to the CV conversion circuit and has a first detection range and a second detection range. The first register is connected to the AD conversion circuit and holds a first value. The second register is connected to the AD conversion circuit and holds a second value. The first value contains information about an acceleration in the first detection range, and the second value contains information about an acceleration in the second detection range. The first and second values indicate accelerations in the same direction.Type: GrantFiled: March 18, 2016Date of Patent: October 2, 2018Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Takeshi Mori, Keisuke Kuroda, Hitoshi Yoshida, Kazuo Goda, Takumi Taura, Hideki Ueda
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Patent number: 9550663Abstract: A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.Type: GrantFiled: February 3, 2014Date of Patent: January 24, 2017Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Kazuo Goda, Takumi Taura, Shinichi Kishimoto, Hideki Ueda, Takeshi Mori
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Publication number: 20160202287Abstract: An acceleration sensor includes a CV conversion circuit, an AD conversion circuit, and first and second registers. The CV conversion circuit outputs a voltage corresponding to the capacitance changes between a movable electrode and each of first and second fixed electrodes disposed to face the movable electrode. The AD conversion circuit is connected to the CV conversion circuit and has a first detection range and a second detection range. The first register is connected to the AD conversion circuit and holds a first value. The second register is connected to the AD conversion circuit and holds a second value. The first value contains information about an acceleration in the first detection range, and the second value contains information about an acceleration in the second detection range. The first and second values indicate accelerations in the same direction.Type: ApplicationFiled: March 18, 2016Publication date: July 14, 2016Inventors: TAKESHI MORI, KEISUKE KURODA, HITOSHI YOSHIDA, KAZUO GODA, TAKUMI TAURA, HIDEKI UEDA
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Publication number: 20160091526Abstract: A configuration including a first substrate including a first movable electrode; a second substrate connected to the first substrate and including a first fixed electrode that faces the first movable electrode; and a third substrate connected to the second substrate. The first substrate, the second substrate, and the third substrate are laminated in this order, and the second substrate and the third substrate are not bonded to each other in at least a part between the first fixed electrode and the third substrate.Type: ApplicationFiled: June 10, 2014Publication date: March 31, 2016Inventors: KAZUO GODA, NOBUYUKI IBARA, HITOSHI YOSHIDA, TAKUMI TAURA, SHINICHI KISHIMOTO, HIDEKI UEDA, TAKESHI MORI
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Publication number: 20150368089Abstract: A MEMS device includes a movable section, a frame, a beam, and an electrode substrate. The frame surrounds a surrounding of the movable section. The beam extends from at least a part of the frame, and is connected to the movable section. The electrode substrate includes a fixed electrode, an extended electrode, and a substrate section. The fixed electrode is formed on the electrode substrate in at least a part of a region facing a swing section. The extended electrode is connected to the fixed electrode, and is formed on the electrode substrate in at least a part of a region facing the shaft.Type: ApplicationFiled: February 3, 2014Publication date: December 24, 2015Inventors: KAZUO GODA, TAKUMI TAURA, SHINICHI KISHIMOTO, HIDEKI UEDA, TAKESHI MORI
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Publication number: 20150260752Abstract: An acceleration sensor includes: an X detection portion that detects acceleration in an X direction by swinging a first movable electrode about a pair of beam portions; a Y detection portion that detects acceleration in a Y direction perpendicular to the X direction by swinging a second movable electrode about a pair of beam portions; and a Z detection portion that detects acceleration in a Z direction by moving a third movable electrode, which is held by two pairs of beam portions in parallel in the vertical direction, characterized in that the X detection portion, the Y detection portion and the Z detection portion are arranged in one chip.Type: ApplicationFiled: September 27, 2013Publication date: September 17, 2015Inventors: Shinichi Kishimoto, Hideki Ueda, Takumi Taura, Hitoshi Yoshida, Takeshi Mori, Nobuyuki Ibara, Kazuo Goda
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Publication number: 20130168141Abstract: A method for producing a substrate with through-electrode includes the steps of: forming recesses or through-holes in either one of a silicon substrate and a glass substrate; forming protrusions in the other substrate; laying the silicon substrate and glass substrate on each other so that the protrusions are inserted in the respective recesses or through-holes; and bonding the silicon substrate and the glass substrate to each other.Type: ApplicationFiled: January 24, 2012Publication date: July 4, 2013Applicant: PANASONIC CORPORATIONInventors: Junichi Hozumi, Takumi Taura, Shin Okumura, Tomohiro Nakatani, Ryo Tomoida