Patents by Inventor Takuo Uchida

Takuo Uchida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrical characteristic measuring apparatus
    Patent number: 4884026
    Abstract: An electrical characteristic measuring apparatus including, a table for an object to be measured, wherein the table is formed of an insulating material. The generation of an eddy current by an electromagnetic induction effect due to noise can be prevented from occurring in the table. Therefore, the electrical characteristics of the object to be measured can be measured using a very small current with high accuracy. Further, since the insulating resistance of the table is high, electrical discharging can be prevented from occurring between the object to be measured and a ground portion when measuring with a large current. As a result, electrical characteristics can be measured with high accuracy using a large current which is 50 times or more that of a current used in a conventional apparatus.
    Type: Grant
    Filed: June 20, 1988
    Date of Patent: November 28, 1989
    Assignee: Tokyo Electron Limited
    Inventors: Yuji Hayakawa, Takuo Uchida