Abstract: According to an aspect of the present disclosure, a substrate state determining apparatus includes: an image capturing unit that captures an image of a substrate placed on a stage; a learning unit that executes a machine learning using training data in which information indicating a state of the substrate is attached to the image of the substrate, so as to generate a substrate state determination model in which the image of the substrate is taken as an input and a value related to the state of the substrate corresponding to the image of the substrate is taken as an output; and a determination unit that determines the state of the substrate corresponding to the image of the substrate captured by the image capturing unit, using the substrate state determination model generated by the learning unit.

Abstract: An inference device, an inference method, and an inference program that can realize high precision inference regardless of an application target are provided. An inference device includes: an acquisition section configured to acquire a time series data group measured in accordance with processing of a target object in a predetermined processing unit of a manufacturing process; and an inference section configured to tune respective output data that is output by processing the acquired time series data group using a plurality of network sections that have been machine-learned in advance and to output an inference result by combining the respective tuned output data; wherein the inference section is configured to tune the respective output data using a correction parameter corresponding to an error included in the inference result.

Abstract: A state determination device determines the state of a drive mechanism configured to operate while holding a substrate in a substrate processing apparatus. The state determination part includes: an acquisition part configured to acquire operation data for the drive mechanism; a model generation part configured to generate a monitoring model for the drive mechanism by executing machine learning using an auto-encoder based on normal operation data that is derived from the operation data acquired by the acquisition part when the drive mechanism is operating normally; and a first determination part configured to determine the state of the drive mechanism based on first output data obtained by inputting, to the monitoring model, evaluation data that is derived from the operation data acquired by the acquisition part when the drive mechanism is being evaluated.

Abstract: A virtual metrology apparatus, a virtual metrology method, and a virtual metrology program that allow a highly accurate virtual metrology process to be performed is provided. A virtual metrology apparatus includes an acquisition unit configured to acquire a time series data group measured in association with processing of a target object in a predetermined processing unit of a manufacturing process, and a training unit configured to train a plurality of network sections by machine learning such that a result of consolidating output data produced by the plurality of network sections processing the acquired time series data group approaches inspection data of a resultant object obtained upon processing the target object in the predetermined processing unit of the manufacturing process.

Abstract: A predicting device trains a trained model using multiple network sections configured to process the acquired time series data sets and the device state information, and a concatenation section configured to output, as a combined result, a result of combining output data output from each of the multiple network sections. The trained model is then applied to adapt a unit of process performed during manufacture of a processed object.

Abstract: An abnormality detection device trains a model using multiple network sections each configured to process acquired time series data sets and a concatenation section configured to combine output data output from each of the multiple network sections and to output, as a combined result, a result of combining the output data output from each of the multiple network sections. The trained model is then applied to adapt a unit of process performed during manufacture of a processed object.

Abstract: An electric power conversion apparatus includes: a heat-generating element; a case having a cooling wall portion on which the heat-generating element is held and accommodating the heat-generating element; a flow passage cover having an opening formed therein and covering a surface of the cooling wall portion on the opposite side to the heat-generating element; a standing portion standing from the cooling wall portion and inserted in the opening; a flow-passage side wall portion formed in one of the cooling wall portion and the flow passage cover to protrude toward the other; a coolant flow passage surrounded by the cooling wall portion, the flow passage cover and the flow-passage side wall portion; and a sealant that seals both a gap between the cooling wall portion and the flow passage cover at a periphery of the coolant flow passage and a gap between the standing portion and the flow passage cover.

Abstract: According to an aspect of the present disclosure, a substrate state determining apparatus includes: an image capturing unit that captures an image of a substrate placed on a stage; a learning unit that executes a machine learning using training data in which information indicating a state of the substrate is attached to the image of the substrate, so as to generate a substrate state determination model in which the image of the substrate is taken as an input and a value related to the state of the substrate corresponding to the image of the substrate is taken as an output; and a determination unit that determines the state of the substrate corresponding to the image of the substrate captured by the image capturing unit, using the substrate state determination model generated by the learning unit.

Abstract: An electric power conversion apparatus includes: a heat-generating element; a case having a cooling wall portion on which the heat-generating element is held and accommodating the heat-generating element; a flow passage cover having an opening formed therein and covering a surface of the cooling wall portion on the opposite side to the heat-generating element; a standing portion standing from the cooling wall portion and inserted in the opening; a flow-passage side wall portion formed in one of the cooling wall portion and the flow passage cover to protrude toward the other; a coolant flow passage surrounded by the cooling wall portion, the flow passage cover and the flow-passage side wall portion; and a sealant that seals both a gap between the cooling wall portion and the flow passage cover at a periphery of the coolant flow passage and a gap between the standing portion and the flow passage cover.

Abstract: A contactless power supply system includes: a power supply pad including a power supply core formed of a magnetic material, and a power supply coil that uses the power supply core as a magnetic path; and a filter circuit including an inductor coil, the filter circuit being connected to the power supply pad. The power supply pads to which the respective filter circuits are connected are brought into a face-to-face relation so that electric power is transmitted from one power supply pad to the other power supply pad in a contactless manner. An inductor coil of at least either one of the filter circuits is provided to the power supply core of the power supply pad to which the filter circuit is connected, and the inductor coil uses the power supply core as a magnetic path.

Abstract: A contactless power supply system includes: a power supply pad including a power supply core formed of a magnetic material, and a power supply coil that uses the power supply core as a magnetic path; and a filter circuit including an inductor coil, the filter circuit being connected to the power supply pad. The power supply pads to which the respective filter circuits are connected are brought into a face-to-face relation so that electric power is transmitted from one power supply pad to the other power supply pad in a contactless manner. An inductor coil of at least either one of the filter circuits is provided to the power supply core of the power supply pad to which the filter circuit is connected, and the inductor coil uses the power supply core as a magnetic path.