Abstract: Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.

Abstract: A hydrostatic bearing configured to slide along a sliding surface of a structural body in a non-contact manner, the hydrostatic bearing includes a jetting part having a jetting surface configured to jet air onto the sliding surface; and a suction part having a suction surface configured to suction the air jetted from the jetting surface onto the sliding surface. The suction surface is situated at one of an internal circumferential side and an external circumferential side of the jetting part and is positioned higher than a lower end of the jetting part.

Abstract: Stabilization of a stage in a movable stage apparatus is enhanced, and increasing in size of the movable stage apparatus is suppressed. A reaction force cancel system is provided in the movable stage apparatus where a stage moves on a surface plate installed on a floor via a vibration-isolating spring, and cancels a reaction force generated on the surface plate upon movement of the stage. The reaction force cancel system includes a reaction force canceling actuator for applying a counter-thrust that is a force for reducing the reaction force to the surface plate. The reaction force canceling actuator is arranged at a lower position than a top surface of the surface plate so that the surface plate hangs over the reaction force canceling actuator.

Abstract: Stabilization of a stage in a movable stage apparatus is enhanced, and increasing in size of the movable stage apparatus is suppressed. A reaction force cancel system is provided in the movable stage apparatus where a stage moves on a surface plate installed on a floor via a vibration-isolating spring, and cancels a reaction force generated on the surface plate upon movement of the stage. The reaction force cancel system includes a reaction force canceling actuator for applying a counter-thrust that is a force for reducing the reaction force to the surface plate. The reaction force canceling actuator is arranged at a lower position than a top surface of the surface plate so that the surface plate hangs over the reaction force canceling actuator.

Abstract: Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.

Abstract: The present invention provides a multiple-point grounding type foot portion supporting mechanism having excellent reliability, in which the respective supporting points passively follow unevenness of the grounding surface such as a road surface, and which is capable of quickly supporting foot bottoms at polygonal points and preventing falling over even on a grounding surface having level differences by fixing the supporting points when all supporting points are grounded.

Abstract: A hydrostatic bearing configured to slide along a sliding surface of a structural body in a non-contact manner, the hydrostatic bearing includes a jetting part having a jetting surface configured to jet air onto the sliding surface; and a suction part having a suction surface configured to suction the air jetted from the jetting surface onto the sliding surface. The suction surface is situated at one of an internal circumferential side and an external circumferential side of the jetting part and is positioned higher than a lower end of the jetting part.