Patents by Inventor Takuya ITAHASHI

Takuya ITAHASHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
    Publication number: 20230234091
    Abstract: A liquid processing apparatus includes: a tank configured to store a processing liquid supplied from a processing liquid supply source; a circulation passage connected to the tank; a pump installed at the circulation passage; a plurality of liquid processors configured to perform liquid processing on a substrate; and a plurality of supply passages configured to supply the processing liquid to the plurality of liquid processors respectively, wherein the circulation passage includes a main passage portion provided with the pump, and a first branch passage portion and a second branch passage portion branching from the main passage portion, and the processing liquid flowing out from the tank passes through the main passage portion, then flows into the first branch passage portion and the second branch passage portion, and then returns to the tank through the first branch passage portion and the second branch passage portion.
    Type: Application
    Filed: March 31, 2023
    Publication date: July 27, 2023
    Inventors: Chikara NOBUKUNI, Tomoaki OJIMA, Takuya ITAHASHI, Ryoichi HORIGUCHI, Shota WAKAYAMA
  • Liquid processing apparatus and liquid processing method
    Patent number: 11691172
    Abstract: A liquid processing apparatus includes: a tank configured to store a processing liquid supplied from a processing liquid supply source; a circulation passage connected to the tank; a pump installed at the circulation passage; a plurality of liquid processors configured to perform liquid processing on a substrate; and a plurality of supply passages configured to supply the processing liquid to the plurality of liquid processors respectively, wherein the circulation passage includes a main passage portion provided with the pump, and a first branch passage portion and a second branch passage portion branching from the main passage portion, and the processing liquid flowing out from the tank passes through the main passage portion, then flows into the first branch passage portion and the second branch passage portion, and then returns to the tank through the first branch passage portion and the second branch passage portion.
    Type: Grant
    Filed: July 1, 2020
    Date of Patent: July 4, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Chikara Nobukuni, Tomoaki Ojima, Takuya Itahashi, Ryoichi Horiguchi, Shota Wakayama
  • LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
    Publication number: 20210001370
    Abstract: A liquid processing apparatus includes: a tank configured to store a processing liquid supplied from a processing liquid supply source; a circulation passage connected to the tank; a pump installed at the circulation passage; a plurality of liquid processors configured to perform liquid processing on a substrate; and a plurality of supply passages configured to supply the processing liquid to the plurality of liquid processors respectively, wherein the circulation passage includes a main passage portion provided with the pump, and a first branch passage portion and a second branch passage portion branching from the main passage portion, and the processing liquid flowing out from the tank passes through the main passage portion, then flows into the first branch passage portion and the second branch passage portion, and then returns to the tank through the first branch passage portion and the second branch passage portion.
    Type: Application
    Filed: July 1, 2020
    Publication date: January 7, 2021
    Inventors: Chikara NOBUKUNI, Tomoaki OJIMA, Takuya ITAHASHI, Ryoichi HORIGUCHI, Shota WAKAYAMA