Abstract: Suppressed is damage of a semiconductor wafer due to charging of a cleaning liquid used in a single wafer type wafer cleaning step. A chemical solution discharged from a tip of a cleaning nozzle is brought into contact with protrusions of wafer chucks to thereby let static electricity of the chemical solution go to the wafer chucks, and subsequently, the cleaning nozzle is moved above the wafer to supply the chemical solution onto a top surface of the wafer, thereby suppressing abnormal discharge (damage) of the wafer due to charging of the chemical solution.

Abstract: Suppressed is damage of a semiconductor wafer due to charging of a cleaning liquid used in a single wafer type wafer cleaning step. A chemical solution discharged from a tip of a cleaning nozzle is brought into contact with protrusions of wafer chucks to thereby let static electricity of the chemical solution go to the wafer chucks, and subsequently, the cleaning nozzle is moved above the wafer to supply the chemical solution onto a top surface of the wafer, thereby suppressing abnormal discharge (damage) of the wafer due to charging of the chemical solution.

Abstract: A detailed data storage apparatus creates, when a detailed data database that stores therein detailed data relatint to each stage of a process executed through multiple stages receives detailed data relating to a predetermined stage, forecast detailed data indicating contents predicted for a stage next to a predetermined stage and subsequent stages from the detailed data, and stores the forecast detailed data in the detailed data database. The apparatus includes an order holding unit that orders and holds the multiple stages; a determining unit that determines whether there is a stage immediately previous to the predetermined stage; and an offset detailed-data creating unit that creates offset detailed data including a content for offsetting the forecast detailed data created at the immediately previous stage when the determining unit determines that there is the immediately previous stage, so as to store the offset detailed data in the detailed data database.

Abstract: A detailed data aggregation apparatus holds detailed data of a plurality of events and a transcription and replenishment rule. In the rule, a plurality of common items, which are common to different events as a minimum unit of aggregation, are defined, and a transcription instruction (for instructing to transcribe a value corresponding to an event definition item to a value corresponding to the common item) and a replenishment instruction (for instructing to replenish a value to be replenished as the value corresponding to the common item) are described, associated with each common item for each event. Regarding the held detailed data, transcribed/replenished detailed data including values corresponding to the common items is created from the respective detailed data according to the transcription instruction or replenishment instruction.

Abstract: To reduce the required amount of program codes when processing the whole image in a one-dimensional SIMD parallel image processing system having a smaller number of PEs than the number of pixels in the width direction of the image to be processed. A controller for controlling a PE array includes a command repetitive-execution part, which includes an operand converting part, a memory address converting part, and an operation code converting part. When a command fetching/decoding part reads and executes program codes stored in a program memory, the repetitive-execution part determines the program codes to cause the operand converting part, memory address converting part and operation code converting part to perform conversions in accordance with the command, thereby performing a repetitive execution of the one-command program description adaptive to a plurality of related pixels assigned to the PEs, whereby the program code amount can be reduced.

Abstract: Suppressed is damage of a semiconductor wafer due to charging of a cleaning liquid used in a single wafer type wafer cleaning step. A chemical solution discharged from a tip of a cleaning nozzle is brought into contact with protrusions of wafer chucks to thereby let static electricity of the chemical solution go to the wafer chucks, and subsequently, the cleaning nozzle is moved above the wafer to supply the chemical solution onto a top surface of the wafer, thereby suppressing abnormal discharge (damage) of the wafer due to charging of the chemical solution.

Abstract: A detailed data storage apparatus creates, when a detailed data database that stores therein detailed data relatint to each stage of a process executed through multiple stages receives detailed data relating to a predetermined stage, forecast detailed data indicating contents predicted for a stage next to a predetermined stage and subsequent stages from the detailed data, and stores the forecast detailed data in the detailed data database. The apparatus includes an order holding unit that orders and holds the multiple stages; a determining unit that determines whether there is a stage immediately previous to the predetermined stage; and an offset detailed-data creating unit that creates offset detailed data including a content for offsetting the forecast detailed data created at the immediately previous stage when the determining unit determines that there is the immediately previous stage, so as to store the offset detailed data in the detailed data database.

Abstract: A detailed data aggregation apparatus holds detailed data of a plurality of events and a transcription and replenishment rule. In the rule, a plurality of common items, which are common to different events as a minimum unit of aggregation, are defined, and a transcription instruction (for instructing to transcribe a value corresponding to an event definition item to a value corresponding to the common item) and a replenishment instruction (for instructing to replenish a value to be replenished as the value corresponding to the common item) are described, associated with each common item for each event. Regarding the held detailed data, transcribed/replenished detailed data including values corresponding to the common items is created from the respective detailed data according to the transcription instruction or replenishment instruction.

Abstract: To reduce the required amount of program codes when processing the whole image in a one-dimensional SIMD parallel image processing system having a smaller number of PEs than the number of pixels in the width direction of the image to be processed. A controller for controlling a PE array includes a command repetitive-execution part, which includes an operand converting part, a memory address converting part, and an operation code converting part. When a command fetching/decoding part reads and executes program codes stored in a program memory, the repetitive-execution part determines the program codes to cause the operand converting part, memory address converting part and operation code converting part to perform conversions in accordance with the command, thereby performing a repetitive execution of the one-command program description adaptive to a plurality of related pixels assigned to the PEs, whereby the program code amount can be reduced.