Patents by Inventor Takuya OBARA

Takuya OBARA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • STRUCTURE FOR SUBSTRATE PROCESSING APPARATUS
    Publication number: 20200194238
    Abstract: A structure for a substrate processing apparatus to be situated opposite a support pedestal for supporting a substrate includes an electrode plate having a surface exposed to an inner space of a chamber, the surface of the electrode plate having a first roughness, and an annular member disposed around the electrode plate and having a surface exposed to the inner space, the surface of the annular member having a second roughness, wherein the first roughness is different from the second roughness.
    Type: Application
    Filed: December 10, 2019
    Publication date: June 18, 2020
    Inventors: Daisuke ITO, Toshimasa KOBAYASHI, Toshikatsu TOBANA, Takuya OBARA, Yusuke AOKI